CV/MVGQ

16 10-15-62

SMC Pneumatic Clean Series

type 10 C D J 2 W L 16 60 H7B 21 C D J 2 W L 16 60 H7B Number of auto switches 2 pcs. 1 pc. n pcs.

VCL

W (44) (Y) Z (X) (V) T R T 25 IN port 2 x 3/8 l=280 l=300 : Thread type Plug provided on U side at shipping. 2.5 (N) E A (U) S Q D G C C B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 16 OUT port n x 1/4 H H P = J (Pitch) 2 n x 1/8 : Thread type L Dimension (mm) n (stations) Model Dimensions 2 3 4 5 6 7 8 9 10 L1 70 105 140 175 210 245 280 315 350 VV2CL2 L2 82 117 152 187 222 257

MXW

S n Auto switch Without auto switch (Built-in magnet) Nil Bore size (Stroke (mm)) For the applicable auto switch model, refer to the table below. 8 12 16 20 25 25, 50, 75, 100, 125, 150 50, 75, 100, 125, 150 75, 100, 125, 150, 175, 200 100, 125, 150, 175, 200, 225, 250 100, 125, 150, 175, 200, 225, 250, 275, 300 Option Nil Standard (with urethane bumper) With shock absorbers 2 pcs.

MU

-X +0.058 0 +0.058 0 +0.058 0 +0.070 0 3 4 5 6 13 14 17 23 18 22 26 32 9 11 13 16 8 10 10 14 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 8 10 10 16 21 24 27 39 8.5 10 11 16 11 14 15 20 8.5 10 11 16 19.5 24 26 36 CD-MU02 CD-MU03 CD-MU04 CD-MU05 9 11 13 16 20Knuckle pin and snap ring are included.

MU

16 LX RR 8 10 10 16 16 LD LU 11 14 15 20 20 LD LU 13 14 17 23 23 LC 16 18 20 28 28 LC 18 22 26 32 32 LB 27 31 36 46 46 LB 27 31 36 46 46 LA 35.5 41 47 62 62 LA 35 41 46 62 62 L 52.5 59 67 81 84 L 52.5 59 67 81 84 ZZ 115.5 127 137 171 175 Model MU25 MU32 MU40 MU50 MU63 Model MU25 MU32 MU40 MU50 MU63 Applicable pin 8 10 10 14 14 9 11 13 16 16 8 10 10 14 14 9 11 13 16 16 +0.058 0 +0.058 0 +

MU

MU-D02 MU-D03 MU-D04 MU-D05 MU-D06 8 10 10 14 14 8 10 10 14 14 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 Applicable pin DZ 8 10 10 14 16 CZ 8 10 10 14 16 DY 9 11 13 16 16 CX 9 11 13 16 16 DX 18 22 26 32 32 CT 9.5 11 14 17 20 DT 9.5 11 14 17 20 CR 5.3 6.4 8.4 10.5 13 DR 5.3 6.4 8.4 10.5 13 CL 26 42 54 64 72 DL 26 42 54 64 72 Part No.

3

Chromium molybdenum steel Stainless steel NBR Carbon tool steel Phosphor bronze Stainless steel Rolled steel Carbon tool steel Hexagon socket head set screw Guide pin O-ring Chromium molybdenum steel Rolled steel Rolled steel Round R-type retaining ring Coil scraper Scraper pressure Head cover C-type retaining ring Except 12, 16 Except 12, 16 Except 12, 16 Electroless nickel plated 20 to

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

12.7 18.5 20 Q 206 264 322 QQ 16 16 26 QW 46 60 72 RR1 18.9 22.0 RR2 17.9 24.0 TT 15.5 21.0 26.0 UU 16 16 21 VV 16 19 23 W 122 144 160 WW 11 13 20 YW 070 088 104 Z 240 300 360 60 80 100 25.50 29 .0 Hole sizes for centralized piping on the bottom Applicable O-ring C9 C9 C11.2 Bore size (mm) 25 32 40 D 11.4 11.4 13.4 d 6 6 8 WX 38 48 54 Y 9 11 14 S 4 6 9 (Mounting side should be machined to

Plate Cylinder

MU-D02 MU-D03 MU-D04 MU-D05 MU-D06 Size 25 32 40 50 63 8 10 10 14 14 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 8 10 10 14 14 CL 26 42 54 64 72 CR 5.3 6.4 8.4 10.5 13 CT 9.5 11 14 17 20 CX 9 11 13 16 16 CZ 8 10 10 14 16 DL 26 42 54 64 72 DR 5.3 6.4 8.4 10.5 13 DX 18 22 26 32 32 DY 9 11 13 16 16 DZ 8 10 10 14 16 DT 9.5 11 14 17 20 Applicable pin

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

XMH-16-XN1A : Produced by Mitsubishi Cable Industries, Ltd. 11 Series XMH, XYH Specifications XMH-25 XYH-25 XMH-40 XYH-40 XMH-50 XYH-50 XMH-16 Model Flange (valve) size 16, CF034 25 40, CF070 50 Valve type Manual type Fluid Inactive gas under vacuum Operating temperature C 5 to 150 Atmospheric pressure to 1 x 10-6 Operating pressure Pa Conductance l/s Note 1) 5 14 45 80 1.3 x 10-10{1 x 10

ITV

Note 2) Except for preset input type. 16 Points Preset Input Type 3 -X81 Able to control 16-point-pressure by 4 bit switching input ITV10 X81 4 0 4 ITV20 X81 0 ITV30 0 X81 4 16 points preset type Note 1) in part number is the same model no. for the standard products.

Floating Joint/Stainless Steel Type Series JS

125 14-150 18-150 1 Series JS Construction 10, 16 20 to 63 Parts list Parts list No.

Electric Actuator / Slider type 《 High performance Battery-less absolute encoder type 》

to 330 20 to 180 24 to 750 16 to 500 8 to 250 30 to 1140 20 to 760 10 to 350 range 801 to 900 24 to 610 16 to 410 8 to 200 30 to 930 20 to 620 10 to 280 Actuator specification 901 to 1000 24 to 500 16 to 340 8 to 170 30 to 780 20 to 520 10 to 250 1001 to 1100 30 to 660 20 to 440 10 to 220 1101 to 1200 30 to 570 20 to 380 10 to 190 10 Max acceleration/deceleration [mm/s2] 5000 Positioning

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

40 MSQA30 (High precision type) 20 0 10 20 30 40 50 60 70 18 16 14 12 10 8 6 4 2 0 Load N Load N MSQ7A MSQ50 MSQB50 (Basic type) MSQB7A (Basic type) 100 200 Displacement m Displacement m MSQA7A (High precision type) 80 150 60 120 40 50 MSQA50 (High precision type) 20 24 22 20 18 16 14 12 10 8 6 4 2 0 20 40 60 80 100 120 0 Load N Load N 11-9-9 10 Courtesy of Steven Engineering, Inc.-230 Ryan

10

Made to Order (For details, refer to pages 16 to 21.)

Electric Actuator

Note 7) Up to 16 axes can be set.

Electric Actuator / Guide rod Slider

Overhang direction:L3[mm] 250 250 600mm stroke L3 m 200 200 500mm or less 150 150 600mm stroke or less 100 100 50 50 0 0 0 1 2 3 4 5 0 1 2 3 4 5 Workload[kg] Workload[kg] 300 300 250 250 Overhang direction:L4[mm] L4 m Overhang direction:L4[mm] 600mm stroke 200 200 600mm stroke or less 500mm stroke or less 150 150 100 100 50 50 0 0 0 1 2 3 4 5 0 1 2 3 4 5 Workload[kg] Workload[kg] 500 500

VDW Series

(the value under the prescribed conditions) 0.8 0.7 0.6 Subsonic Critical pressure 0.5 0.4 0.45 0.45 Sonic 0.4 0.4 0.35 0.35 0.3 0.3 0.3 0.25 0.2 0.25 0.2 0.2 0.15 0.15 0.1 0.05 0.1 0.1 0.05 S = 0.54 VDW101 10 60 50 40 30 20 10 20 VDW 1.6 S = 1.2 125 100 75 50 S = 3.2 VDW202.3 350 300 250 200 150 100 50 S = 5.8 VDW203.2 600 500 400 300 200 100 S = 2.8 VDW302 300 250 200 150 100 50 VDW303

Air Slide Table Series MXS

Bore size (Stroke (mm)) 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 6 8 12 16 20 25 Functional option Standard With buffer With end lock Axial piping type With buffer and end lock With buffer, Axial piping type Nil F R (2) P FR (2) FP Adjuster option Note