Please contact us for the latest version.sales@ocaire.com, MFLD, PLUG-IN W/SI UNIT, VALVE, SS5V2 MANIFOLD SV2000, 1S, SS5V2 OTHER SIZE RATING, 2.70386 lb

Please contact us for the latest version.sales@ocaire.com, MANIFOLD, VALVE, NEW SY3000 MFLD, 1S, NEW SY3000 MFLD, OTHER SIZE, 1.68112 lb

Please contact us for the latest version.sales@ocaire.com, MANIFOLD, VALVE, NEW SY3000 MFLD, 1S, NEW SY3000 MFLD, OTHER SIZE, .00000 lb

Please contact us for the latest version.sales@ocaire.com, MFLD, PLUG-IN, D-SUB CONNECTOR, VALVE, SS5V2 MANIFOLD SV2000, 1S, SS5V2 OTHER SIZE RATING, 3.52739 lb, Model1, 5, 34, 2 (P,EA,EB)(A,B)bCvbCvSS5V2-16C10C82.30.280.502.70.180.56

Please contact us for the latest version.sales@ocaire.com, MFLD, PLUG-IN, D-SUB CONNECTOR, VALVE, SS5V2 MANIFOLD SV2000, 1S, SS5V2 OTHER SIZE RATING, 3.38041 lb, Model1, 5, 34, 2 (P,EA,EB)(A,B)bCvbCvSS5V2-16C10C82.30.280.502.70.180.56

Please contact us for the latest version.sales@ocaire.com, MFLD, BODY PT, CASSETTE, VALVE, SS5Y3 MANIFOLD SY3000, 1S, SS5Y3 OTHER SIZE RATING, .44092 lb

Please contact us for the latest version.sales@ocaire.com, MFLD, PLUG-IN, D-SUB CONNECTOR, VALVE, SS5V2 MANIFOLD SV2000, 1S, SS5V2 OTHER SIZE RATING, 1.52485 lb, Model1, 5, 34, 2 (P,EA,EB)(A,B)bCvbCvSS5V2-16C10C82.30.280.502.70.180.56

Please contact us for the latest version.sales@ocaire.com, MFLD, PLUG-IN, D-SUB CONNECTOR, VALVE, SS5V2 MANIFOLD SV2000, 1S, SS5V2 OTHER SIZE RATING, 1.53098 lb, Model1, 5, 34, 2 (P,EA,EB)(A,B)bCvbCvSS5V2-16C10C82.30.280.502.70.180.56

Please contact us for the latest version.sales@ocaire.com, MFLD, PLUG-IN, D-SUB CONNECTOR, VALVE, SS5V2 MANIFOLD SV2000, 1S, SS5V2 OTHER SIZE RATING, 2.44705 lb, Model1, 5, 34, 2 (P,EA,EB)(A,B)bCvbCvSS5V2-16C10C82.30.280.502.70.180.56

Please contact us for the latest version.sales@ocaire.com, MFLD, PLUG-IN W/SI UNIT, VALVE, SS5V1 MANIFOLD SV1000, 1S, SS5V1 OTHER SIZE RATING, 1.76369 lb

Please contact us for the latest version.sales@ocaire.com, MFLD, PLUG-IN W/SI UNIT, VALVE, SS5V1 MANIFOLD SV1000, 1S, SS5V1 OTHER SIZE RATING, 1.48310 lb

High Vacuum Slit Valve

Application Remarks XGT311-50336A1-1 For XGT31-50336C XGT311-50336A1-1A For XGT31-50336-A C Bonnet ASSY XGT311-50336A1-1C For XGT31-50336-C C XGT311-50336A1-1F For XGT31-50336-F C Gate ASSY XGT300-2-1S Body O-ring (FKM) XGT300-9-10S AS568-273 FKM XGT300-9-9S For XGT31-50336-1 AS568-271 Gate O-ring Kalrez4079 XGT300-9-11S For XGT31-50336-2 AS568-271 Actuator O-ring (FKM) XGT300-9-7S AS568-

New

deionized water 1 (Seal material: FKM) Port thread Oil-free Grommet (With surge voltage suppressor) Nil A B C D E F G H K L Z Rc, One-touch fitting2 G NPT Rc, One-touch fitting2 Grommet Grommet (With surge voltage suppressor) 1E 12 VDC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC 12 VDC 1F 1G 1H 1V 1J 1K 1L 1M 1W 1N 1P 1Q 1R 1Y 1S

Rotary Actuator/Vane Style Series CRB1

180 +4, 270 +4 0 0 0 90 +4 Standard Rotating angle 0 The body of the rotary actuator can be mounted directly. 100 +4 0 0 0 100 +4, 190 +4, 280 +4 Option 0 Air (Non-lube) Fluid CRB2 Two different port locations (side and axial) are available. 1.5 MPa Proof pressure 5 to 60C Ambient and fluid temperature CRBU2 1.0 MPa Max. operating pressure CRB1 0.15 MPa Min. operating pressure 0.1 to 1s

3

pressure range Note 2) Karman vortex 0.5 to 4 L/min 2 to 16 L/min 5 to 40 L/min 10 to 100 L/min 50 to 250 L/min 0 to 90oC (with no freezing and condensation) p3% F.S. p2% F.S. p5% F.S. (25oC reference) 0 to 1 MPa Note 2) Proof pressure Note 2) 1.5 MPa Pressure loss (without flow adjustment valve) 45 kPa or less at the maximum flow 60 kPa or less at the maximum flow Response time Note 3) 1s

10

Grommet (With surge voltage suppressor) Other option Low concentration ozone resistant and applicable to deionized water/ Oil-free/Port thread Grommet Grommet (With surge voltage suppressor) 1E 12 VDC Symbol Low concentration ozone resistant and applicable to deionized water1 1F 1G 1H 1V 1J 1K 1L 1M 1W 1N 1P 1Q 1R 1Y 1S 1T (Seal material: FKM) Port thread Oil-free 48 VAC 220 VAC 240 VAC

Please contact us for the latest version.sales@ocaire.com, SS5V1 OTHER SIZE RATING, VALVE, SS5V1 MANIFOLD SV1000, 1S, SS5V1 OTHER SIZE RATING, 1.10231 lb

Please contact us for the latest version.sales@ocaire.com, MANIFOLD, VALVE, NEW SY5000 MFLD, 1S, NEW SY5000 MFLD, OTHER SIZE, 1.98416 lb

Please contact us for the latest version.sales@ocaire.com, MFLD, PLUG-IN, CIRCULAR CONN., VALVE, SS5V1 MANIFOLD SV1000, 1S, SS5V1 OTHER SIZE RATING, 1.10231 lb

Please contact us for the latest version.sales@ocaire.com, SS5V2 OTHER SIZE RATING, VALVE, SS5V2 MANIFOLD SV2000, 1S, SS5V2 OTHER SIZE RATING, 2.32808 lb