&snac

i n o f e a c n s e p a r a t 0 t i n s t a l l e d i n l D G 3 * M ( V ) , i DGSxl.l(v ) at teast 0nce a rn0nth ' f o l t o v i n g t h e c l e a n i n g P r o c e d u r e b e l o w , t 0 G 5 l ( M ( v ) , s h o u l d b e d o n e a f t e f o p e r a t i o n o f a o P r o x i m a t e 2 Y e a r s ' R e f e r t o t h e r e P t a c e i n s P r o c e d u f e b e l o v / . l f P r e s s u r e

2/3 Port Valve

M G H J K A H G, J S Q E P K K A H B J V M V M E, X N, P Polyacetal B Stainless steel L Stainless steel, Silver Trichloro ethane Trichloroethylene Polyacetal M (Non-leak) N P Q S T Perchloroethylene Brake oil Helium Non-leak(105atm cc/sec) Water Stainless steel H Brass, Copper (High temperature) B Polyacetal X V (Non-leak) Note 1) The leakage amount(105atm cc/sec) of "V", "M" option is

High Vacuum Angle Valve

ULTIC ARMOR is a registered trademark of Nippon Valqua Industries, Ltd. 427 B XLF/XLFV Series Specifications Model XLF(V)-16 XLF(V)-25 XLF(V)-40 XLF(V)-50 XLF(V)-63 XLF(V)-80 XLF(V)-100 XLF(V)-160 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum XLF 5 to 60 (High temperature type: 5 to 150) Operating temperature (C) XLFV 5 to 50 Operating pressure

Air Cylinder

) Note 13) v v v v v XC9 Note 15) Note 14) Note 14) v v v v v v v XC10 v v v v v v v XC11 v v v v v XC12 v v v v XC13 v v v v XC20 Note 15) v v v XC22 Note 2) v v v v v v XC27 v v v v v v v XC29 v v v v XC35 v v v v v v v XC37 v v v v v XC42 v v v XC85 X446 Note 8) Copper-free for the externally exposed part.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

PCB (With surge voltage suppressor) r Seal material t Orifice diameter and port size V V V Symbol Seal material N NBR F FKM E EPDM Symbol Orifice diameter [mm] Port size Size 10 20 30 101 1.6 1/8 V 201 2.4 1/8 V 301 3.2 1/8 V 302 1/4 V 303 3/8 V 402 4.0 1/4 V V 403 3/8 V V 502 5.6 1/4 V V 503 3/8 V V 702 7.1 1/4 V V 703 3/8 V V CS Conduit (With surge voltage suppressor)

Secondary Batteries

/Fixed Mounting Height Heavy Duty Stopper Cylinder Floating Joint /Standard Type /For Compact Cylinders /Stainless Steel Type Shock Absorber Rotary Table/Rack & Pinion Style P.33 P.34 Auto Switches D-M9BW(V)SDPC-900 D-M9BW(V)L-900 D-Y7BW(V)L-900 D-A90L-900 D-Z80L-900 P.62 P.63 P.64 P.65 P.65 P.66 Solid State Auto Switch Direct Mounting Style 90-JA 90-JB 90-JS 90-RB/RBC 92-MSQ P.35 P.35 P.35

MY1

(L) 5 (Z) Z76 Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW 3-wire (NPN equivalent) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire Reed switch IC circuit 5 V Yes Yes Grommet Relay, PLC 12 V 100 V 24 V Y69A Y7PV Y69B Y7NWV Y7PWV Y7BWV IC circuit 5 V, 12 V Solid state switch Relay, PLC 12 V Grommet 24 V IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 12 V

Free Mount Cylinder

F9BWV Relay, PLC 2-wire IC circuit No 5 V, 12 V 100 V or less 3-wire (NPN) IC circuit 5 V, 12 V 3-wire (PNP) IC circuit 2-wire 12 V Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) 5 V, 12 V Diagnostic indication (2-color indication) 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) M9N 3 mL (Example) M9NL 5 mZ (Example) M9NZ Solid state switches marked with are produced upon

SMC Basic Pneumatics

P N E U A T I C T E C H N O L O G Y Fnopennes oF GAsEs t S o T H E R M I C C H A N G E ( B O Y L E ' S L A W ) "...with constant temperature, the pressure of a given mass of gas is inversely proportional to its voltlme", or: P' Y= constant v = 1 i p = 1 p 1 x V l = = p 3 x V 3 p 2 x V 2 Fig. 3.5 illustration of Boyle's Law lf volume V. = 1 m3at a standard absolute pressure ot 101325 Pa is

%silltr

P N E U A T I C T E C H N O L O G Y Fnopennes oF GAsEs t S o T H E R M I C C H A N G E ( B O Y L E ' S L A W ) "...with constant temperature, the pressure of a given mass of gas is inversely proportional to its voltlme", or: P' Y= constant v = 1 i p = 1 p 1 x V l = = p 3 x V 3 p 2 x V 2 Fig. 3.5 illustration of Boyle's Law lf volume V. = 1 m3at a standard absolute pressure ot 101325 Pa is

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

12 V 100 V 200 V 110 V 220 V Part no.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

W V 2 E = () 2 1000 Note 2) Consider made-to-order products, depending on an operating condition. Determination of pressure (P) when making intermediate stop P Ps P > Ps (Refer to page 8-31-1.) Note 2) (For intermediate stops, refer to page 8-15-74.)

V

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

SZ3000

0 V 24 V 0 V Power supply { 24 V 0 V D G D G 24 V 0 V 24 V 0 V D G D G 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V Power supply { Transmission line Transmission line G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V Black White Brown Blue Crimp connector SL-J1A Main transmission line Transmission line 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V D G D G 24 V 0 V

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

v 01 02 03 Configuration v v 2 position single (B) 2 (A) 4 1 Manual override 5 (R1) 1 (P) 3 (R2) Non-locking push style (Flush) : B: Locking style (Slotted) 2 position double (A) 4 (B) 2 (A) 4 (B) 2 2 5 (R1) Metal Rubber 5 (R1) 1 (P) 3 (R2) 1 (P) 3 (R2) 3 position closed center (B) 2 (A) 4 3 5 (R1) 1 (P) 3 (R2) Electrical entry 3 position exhaust center (A) 4 (B) 2 G: Grommet (DC specification

SX

3 ground Type 3 ground Type 3 ground Power supply 24 V 0 V 24 V 0 V D G D G 24 V 0 V Slave unit (S1 unit) Slave unit (S1 unit) Slave unit Master station (S1 unit) SG B A SG B A FG SG B A FG SG B A FG FG Power supply 24 V 0 V Twisted pair wire with shielding DG 1-6-115 116 SX3000: Serial Transmission Unit/Plug-in SS5X3-45SStations UC4 C6 (Pitch) P = 10.5 DIN rail release button 2-One-touch

Aluminum High Vacuum Angle Valve

U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd. 417 XLA/XLAV Series Specifications Model XLA(V)-16 XLA(V)-25 XLA(V)-40 XLA(V)-50 XLA(V)-63 XLA(V)-100 XLA(V)-160 XLA(V)-80 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum XLA 5 to 60 (High temperature type: 5 to 150) Operating temperature (C) XLAV 5 to 50 1 x 10-6 to atmospheric pressure Operating

XL

-16 XL(A, C, H) [V]-25 XLD [V]-25 XL(F, G) [V]-16 XL(F, G) [V]-25 XLD [V]-40 XL [V]-40 XLD [V]-50 XL [V]-50 XLD [V]-63 XL [V]-63 XLD [V]-80 XL [V]-80 Construction No.

Electric Actuator/Slider Type

L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time T = T1 + T2 + T3 + T4 [s] [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

REA/REB

F7BWV F7BAV 200 V 100 V 12 V Relay, PLC 2-wire 24 V Connector 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC circuit Grommet 2-wire 12 V Connector Relay, PLC 3-wire (NPN) 3-wire (PNP) Yes 24 V Diagnostic indication (2-color indication) 5 V, 12 V IC circuit Grommet 2-wire Water resistant (2-color indication) 12 V 4-wire (NPN) With diagnostic output (2-color indication) 5 V, 12 V IC circuit