Modular Type Filter Regulator Series AW

y y e e r r r u u u Drain Drain Drain Parts list Material No.

HRX-OM-X084

70 or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ion silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Not detected Not detected Referential item Ammonium ion [mg/L] 0.1 or less 1.0 or less Residual chlorine [mg/L] 0.3 or less 0.3 or less Free carbon dioxide [mg/L] 4.0 or less 4.0 or less

VEX1

Calculation by effective area Q: Flow rate (l/min) P: Pressure differential (P1P2) P1: Upstream pressure (MPa) P2: Downstream pressure (MPa) G: Specific gravity (Air = 1) : Temperature (C) S: Effective area (mm2) P(P2+0.1013) G 273 273+ Q=226S . ... l/min(ANR) wEquation in the domain of sonic flow. . 273 273 + Q=113S(P1+0.1013) 1 G . l/min(ANR) External Pilot Piping VEX312 VEX332 VEX350 VEX370

10

Bore size [mm] Dd9 L l m d Part no.

MNB

: MNBWL Rc 1/8 GA GC GD BC element Rc P Rc BP unlocking port Rod side cylinder port W GR GL GL1 GE Rc P Head side cylinder port B B2 S + Stroke H + Stroke H C K F Width across flats B1 GF F GB BN A A K AL Cushion valve 2-J (Both sides) Effective thread length MM H1 MM V Q D E E D LY LH 4-LD Width across flats T Y X X Y LS + Stroke VA N LT Courtesy of Steven Engineering, Inc.-230 Ryan Way,

MNB

: MNBL Rc 1/8 BC element GA Rc P Rod side cylinder port Rc BP unlocking port GD GC Unlocked when pressurized GR GL W GL1 GE B B2 C H S + Stroke Width across flats B1 A F GB K BN GF Cushion valve 2-J (Both sides) Rc P MM Effective thread length Head side cylinder port H1 Q E D V LY 4-LD LH Width across flats Y X X Y N T LX VA LT LS + Stroke ZZ + Stroke LZ Width across flats Bore size (mm)

Cylinder with Lock

18 Construction p. 20 Dimensions p. 21 Auto Switch Mounting p. 24 MWB-UT Series/Lock Unit How to Order/Specifications p. 32 Construction p. 33 Dimensions p. 34 Made to Order Individual Specifications p. 35 Dimensionally Compatible with the MNB Series (-X3000) Simple Specials p. 36 Change of Rod End Shape (-XA0 to XA30) Made to Order Common Specifications p. 38 With Coil Scraper

Electric Actuator Triple Axis P&P Unit

P Unit How to Order Single Axis LG 240Z 50 Y G J Y axis/Z axis Axis type Ball screw specifications Rolled ball screw (mm) 15, lead 5 15, lead 10 15, lead 20 16, lead 32 Symbol H A C J Y axis motor in-line mount Z axis motor in-line mount Z axis motor side mount Y ZB ZC 1 2 Stroke(mm) 1) Used for X axis in double and triple axis P&P. 2) Used for Y axis in double and triple axis P&P. 100

Free Mount Cylinder

Rod end nut 2-P through M5 x 0.8 (32: Rc 1/8) Bleed port 16 to 32 Width across flats L 2-P through 4-T counterbore A' Auto switch Rod End Nut/Accessory Material: Carbon steel Part no.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

L plug connector (L) VQ 2.0 3.0 M plug connector (M) (A) 2 VKF 1 (P) 3 (R) M plug connector (M) VQZ N.O.

ZX

Nil Grommet (0.6 m) L Grommet (3 m) Nil Y M5 x 0.8 M6 x 1 (Option) C Connector (0.6 m) Filter case CL Connector (3 m) Caution 1. The case is made of polycarbonate.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

m Dd9 L (Drill through) 3 x 18 l 4 x 25 l 4 x 35 l 4 x 36 l 0.040 0.076 CD-M03 CD-M05 CD-M08 CDP-7A 10 14 22 25 20, 25 32, 40 50, 63 80 3 4 4 4 4 4.5 5 5 36 51 72 78 44 60 82 88 0.050 0.093 0.065 0.117 0.065 0.117 l m L Note) When using cotter pins, flat washers are used together.

air-filter-e

m 100 L/4000 cm2 Pure water cleaning Others Note 1) Filtration accuracy: tested with ultrapure water, flow rate at P = 0.01 MPa.

Air Preparation Equipment

m 100 L/4000 cm2 Pure water cleaning Others Note 1) Filtration accuracy: tested with ultrapure water, flow rate at P = 0.01 MPa.

MNB

P-76 (M)

Rotary Actuator

Angle adjusting screw Angle adjusting screw Angle adjusting screw n o A R ti n 0 0 n c ot g 9 e 9 o l e y at ir ti y c d a a a io e d w g w ir n j n u y d y ti s ra e e g s ti k k u n n n g j ti of d g of s d a e u ir e e e e j d of c l g a g ti g o n n e n k A n l g n ra ra A e y n n w io io a y at at 9 ot ot 0 R R The rotation range under the adjustment of an angle at 60 is indicated

VZS

Body type Rc 1 8 Plug-in type VVZS3000-P-01-1 Non plug-in type VVZS3000-P-01-2 Rc 1 4 VVZS3000-P-02-1 VVZS3000-P-02-2 Body type Plug-in type AXT625-12A Non plug-in type Part no. Part no. Body type Plug-in type VVZS3000-22A-1 Non plug-in type VVZS3000-22A-2 Part no.

Multi-Axis Step Motor Controller

4 r t y u i !5 !6 No.

CNS

NPT port) G G FA MM Q CL D EA LY E CL1 V 4-LD LH Width across flats KA MLGC VA BN N N X X Y Y CNG LT LX C B S + Stroke ZZ + Stroke LS + Stroke MNB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CNA With rod boot CNS 75 CLS CLQ 15 40 l h + l ZZ1 + l + Stroke MLGP

ITV-E

The expect ed perf orm ance and saf et y assurance w i l l be t he responsi bi l i t y of t he person w ho has det erm i ned t he com pat i bi l i t y of t he syst em .