Large Size Vacuum Module: Series ZR

0 q y t !2 u w e r i Component Parts No. Description Manifold base Material Aluminum Stainless steel PBT PBT Polycarbonate Part Model Material Part Model No. Description 8 9 10 Refer to Table (2) on page 944-1.

PSE530/200

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com P1 P2 Set value t (ms) t (ms) Time The pressure values measured within the response time that is selected by the user are averaged.

5 Port Pilot Operated Solenoid Valve Series VFR2000 Rubber Seal, Plug-in/Non Plug-in How to Order Option Port size (P, A, B port) Thread type Electrical entry Rc Nil Nil Nil None Without sub-plate F: Plug-in type 01 1 8 F Z G With light/surge voltage supp

Series VFR2000 5 Port Pilot Operated Solenoid Valve Rubber Seal, Plug-in/Non Plug-in How to Order F: Plug-in type Electrical entry Option Port size (P, A, B port) Thread type Nil F G Rc Nil Z None Nil 01 Without sub-plate 1 8 1 4 With light/surge voltage suppressor 02 N NPT Piping (P, A, B, EA, EB port) T NPTF EA, EB port: Rc 1/8 Nil B Side ported Bottom ported Option SJ 1 00 01 F Plug-in

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

1 u u TMH r t r t ASD e !3 e !3 AS q AS-FE !1 !1 i !4 y q q KE i !5 i !5 AS-FG AS-FP AS-FM AS321F-02 Meter-out type AS3201F-02 Meter-in type AS3211F-02 AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ Component Parts No.

VQ5000

T. Manufacturing Co., Ltd.

4-channel Flow Monitor ( compatible)

W Line name 9th letter Y U8 0x00 Refer to Figure "Line name communication data (7 seg)". (0) 1 R/W Line name 1st letter dot Y U8 0x00 0: OFF (dot OFF) 1: ON (dot ON) (0) 2 R/W Line name 2nd letter dot Y U8 0x00 0: OFF (dot OFF) 1: ON (dot ON) (0) 3 R/W Line name 3rd letter dot Y U8 0x00 0: OFF (dot OFF) 1: ON (dot ON) (0) 4 R/W Line name 4th letter dot Y U8 0x00 0: OFF (dot OFF) 1: ON (dot

Refrigerated Thermo-chiller

NPT fittings Option symbol Y DI Control Kit Y HRZ HRZ00-L1-Y HRZ00-H1-Y HRZ00-W1-Y HRZ010-W1S-Y HRZ00-L2-Y HRZ010-W2S-Y Applicable model DI control kit Select this option if you want to maintain the electric resistance ratio (DI level) of the circulating fluid at a certain level. However, some components have to be fitted by customer.

Tie-rod Type Hydraulic Cylinder

T V V 2 x Rc P 4 x J GA F GA A MA a CHM A MA a Cushion adjustment screw Air release R (max.)

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

3 @5 q @3 t r u e o y @1 i !7 !1 Component Parts Material NBR NBR Stainless steel Stainless steel POM, Stainless steel (1) Note Description DY seal DY seal Spring Spring Cassette Seal Spacer O-ring O-ring O-ring O-ring Ring Description No. !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 Note Material PBT PBT PBT Brass Brass Brass Brass Brass Brass Brass No. q w e r t y u i o !0 !1 !2 !

Process Pump

E 21 S LQ1 LQ1 fittings Nut (including insert bushing), 1 location removed Fitting type E Union elbow T Union tee Applicable tube size Metric Inch Applicable tube size (mm) Applicable tube (inch) Reducing Reducing Size No.

AC Servo Motor Driver (SSCNET Type)

Different units (mm, inch, degree, and PLS) are applicable to different systems: mminch X-Y table, conveyor (Select mm or inch depending on the machine specifications) degree Rotating body (360 degrees/rotation) PLS X-Y table, conveyor When you change the unit, note that the values of other parameters and data will not be changed automatically.

Power Valve: Economy Valve Series VEX5

(Refer to the figure-1.) 4) Remove the cable gland r, plain washer t and rubber seal y.

VQC

B DIN rail mounting bracket [-D] VVQ1000-57A for {F, L, M, P, S (EX500) kit} VVQC1000-57A-S for {S (EX250) kit} VVQC1000-57A-T for {T, S (EX126) kit} 17 SOL. A 5 Station 7 SOL. B 18 SOL. A 6 Station 8 SOL.

CL

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Water-cooledThermo-chiller

RESET u [RUN] indicator Lights up when the unit is in the operating status. t S EL [ALARM] indicator Lights up when the unit is alarming. EN T y Alarm This unit can display 23 kinds of alarm messages as standard. Also, it can read out the serial RS-485 communication. Alarm code Alarm message Operation status Main reason Liquid deposits in the drain pan of this unit.

CL

y u i o !

70pvpump

Diaphragm material 1 VXA PTFE (Fluoro resin) JIS Symbol Style VN Port size 1 3 Built-in solenoid valve Air operated LVC 01 1/8 (6A) FLUID OUT AIR SUP AIR EXH LVA Thread type FLUID IN Nil T Rc NPTF G NPT LVH Built-in solenoid valve F LVD N T, F, N are options.

VZS2000

M plug connector 2 position double: VZS2250-M(Z)-01 3 position closed center: VZS2350-M(Z)-01 3 position exhaust center: VZS2450-M(Z)-01 3 position pressure center: VZS2550-M(Z)-01 DIN terminal 2 position double: VZS2250-D(Z)-01 3 position closed center: VZS2350-D(Z)-01 3 position exhaust center: VZS2450-D(Z)-01 3 position pressure center: VZS2550-D(Z)-01 Applicable cable O.D.: 3.5 to 7 MAX

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

Bit line Bit Details 7 6 5 4 3 2 1 0 Time base Multiplier Bit 0 to 5: Multiplier (0 to 1) Bit 6 to 7: time base (00, 01, 10) Calculation condition Time base Time base value Calculation Cycle time 00 0.1 ms Multiplier x Time base 0.4 ms to 6.3 ms 01 0.4 ms 6.4 ms + multiplier x Time base 6.4 ms to 31.6 ms 10 1.6 ms 32.0 ms + multiplier x Time base 32.0 ms to 132.8 ms -78No.EX-OMX1011 Data

Fieldbus system EtherNet/IP compatible SI Unit

Bit line Bit Details 7 6 5 4 3 2 1 0 Time base Multiplier Bit 0 to 5: Multiplier (0 to 1) Bit 6 to 7: time base (00, 01, 10) Calculation condition Time base Time base value Calculation Cycle time 00 0.1 ms Multiplier x Time base 0.4 ms to 6.3 ms 01 0.4 ms 6.4 ms + multiplier x Time base 6.4 ms to 31.6 ms 10 1.6 ms 32.0 ms + multiplier x Time base 32.0 ms to 132.8 ms -78No.EX-OMZ0024 Data