VCL

(mm) A B C D E F G H J L Port size Bracket part no.

ZQ-OM01401

-40 10 -20 -20 5 0 0 0 0.2 0.3 0.4 0.5 0 1 2 3 4 5 6 [MPa] [L/min (AMR) ] ZQ07A 0.43MPa -100 40 -100 35 -80 [L/min (AMR) ] -80 [L/min (AMR) ] 30 [kPa] [kPa] -60 25 -60 20 -40 -40 15 10 -20 -20 5 0 0 0 0 2 4 6 8 10 12 0.2 0.3 0.4 0.5 [MPa] [L/min (AMR) ] ZQ10A 0.43MPa -100 70 -100 60 -80 [L/min (AMR) ] -80 [L/min (AMR) ] [kPa] [kPa] 50 -60 -60 40 -40 30 -40 20 -20 -20 10 0 0 0

Precision Cylinder Series MTS

freezing) Bearing type Ball spline Rubber bumper Cushion Air cushion Effective cushion length (mm) 11 12 9 10 17 17 Lubrication Non-lube Reed switch: D-A9 Solid state switch: D-F9 D-F8 Reed switch: D-A9 Solid state switch: D-F9 Auto switches +1.0 0 Stroke tolerance mm 0.1 or less (within allowable torque values) 0.2 or less (within allowable torque values) Non-rotating accuracy Port size

VCS

Stainless Steel (mm) A B C D E F G H J L Bracket part no.

AR20-B to AR60-B

J Bracket (Option) AR20(K)-B to AR40(K)-06-B 2 x P1 Panel fitting dimensions A (Port size) Y W C B Q V K OUT OUT IN IN Z Plate thickness AR20(K)-B to AR30(K)-B: Max. 3.5 AR40(K)-B : Max. 5 R F P2 S (Pressure gauge port size) Bracket (Option) U M J D T N AR50(K)-B/AR60(K)-B 2 x P1 A (Port size) B Q C K OUT IN R F P2 S (Pressure gauge port size) Bracket (Option) T N J M D U 73 Regulator Series

Filter Regulator AW30, 40

Filter Regulator AW30, 40 Related Equipment How to Order Integration of a filter and regulator allows simple wiring. 03 BE 30 1N AW F Optional specifications Filter regulator Applicable models AW30, 40 AW30, 40 AW30, 40 AW30, 40 AW30, 40 AW30, 40 AW30, 40 AW30, 40 AW30, 40 Symbol 1 2 6 8 J N R W Z Contents 0.02 to 0.2MPa setting Metal bowl Nylon bowl Metal bowl with level gauge Drain guide

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Example) 10-ARP30K-03BE-1RY Clean room compliant, copperfree, fluorine-free, silicon-free Clean room compliant Copper-free, fluorine-free Symbol 20 30 40 Body size Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without

212

140.5 LVR50-V19 22 80 120 169 C F E Breathing port M5 x 0.8 J Tube extensions 4 x 7 Mounting hole 1/8 (Rc, NPT) Pilot port A H D B G Breathing port M5 x 0.8 Model A B C D E LVR20-T07(06) 40 40 49.3 68 20.1 LVR40-T11(10) 82.5 82.5 89 115 33 IN C F Model F G H J K LVR20-T07(06) 8 27 56 33.5 126.2 LVR40-T11(10) 14 64.5 100 40 183.3 E K J J Breathing port M5 x 0.8 5 Applicable Fluids Regulator

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

specifications Model P1 P2 A B Note 1) C D F J K ARP20(K) ARP30(K) ARP40(K) 28.5 Note 2) 1/8, 1/4 1/8 40 98 27 28.5 M28 x 1 2 1/4, 3/8 1/8 53 117 29 29.5 M38 x 1.5 29.5 2.5 1/4, 3/8, 1/2 1/4 70 148 41 34 M42 x 1.5 34 1 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K)

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Standard specifications Model P1 P2 A B Note 1) C D F J K ARP20(K) 1021 1021 1021 2 Note 2) 40 1/8 98 27 28.5 M28 x 1 28.5 1/8, 1/4 ARP30(K) 2.5 1/8 53 117 29 29.5 M38 x 1.5 29.5 1/4, 3/8 ARP40(K) 1 1/4 70 148 41 34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) H J H J M N

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Standard specifications Model P1 P2 A B Note 1) C D F J K ARP20(K) 1021 1021 1021 2 Note 2) 40 1/8 98 27 28.5 M28 x 1 28.5 1/8, 1/4 ARP30(K) 2.5 1/8 53 117 29 29.5 M38 x 1.5 29.5 1/4, 3/8 ARP40(K) 1 1/4 70 148 41 34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) H J H J M N

Style: Pressure Switch w/ T-Spacer, Body Size: 40 (AC40), Thread Type: Rc, Port Size: 02 (1/4), Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: 0.5m, Pressure Unit of the Scale Plate: MPa

Style: Pressure Switch w/ T-Spacer, Body Size: 40 (AC40), Thread Type: Rc, Port Size: 03 (3/8), Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: 0.5m, Pressure Unit of the Scale Plate: MPa

Style: Pressure Switch w/ T-Spacer, Body Size: 40 (AC40), Thread Type: N (NPT), Port Size: 02 (1/4), Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: 0.5m, Pressure Unit of the Scale Plate: MPa

Style: Pressure Switch w/ T-Spacer, Body Size: 40 (AC40), Thread Type: N (NPT), Port Size: 03 (3/8), Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: 0.5m, Pressure Unit of the Scale Plate: MPa

Style: Pressure Switch w/ T-Spacer, Body Size: 40 (AC40), Thread Type: N (NPT), Port Size: 04 (1/2), Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: 0.5m, Pressure Unit of the Scale Plate: MPa

Style: Pressure Switch w/ T-Spacer, Body Size: AC40, Thread Type: Rc, Port Size: 1/4, Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: 0.5m, Pressure Unit of the Scale Plate: MPa

Style: Pressure Switch w/ T-Spacer, Body Size: AC40, Thread Type: Rc, Port Size: 3/8, Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: 0.5m, Pressure Unit of the Scale Plate: MPa

Style: Pressure Switch w/ T-Spacer, Body Size: AC40, Thread Type: NPT, Port Size: 1/4, Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: 0.5m, Pressure Unit of the Scale Plate: MPa

Style: Pressure Switch w/ T-Spacer, Body Size: AC40, Thread Type: NPT, Port Size: 3/8, Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: 0.5m, Pressure Unit of the Scale Plate: MPa