2-Color Display Digital Flow Switch Series PFM

/min 30% 70% 40% 60% 8% 92% 1.0 to 52.5 l/min 1.0 to 50.0 l/min 20.0 mA 5.00 V 0 to 52.5 l/min 10% 90% PFM750 20% 80% 1.0 to 42.0 l/min 1.0 to 40.0 l/min 16.8 mA 4.20 V 0 to 42.0 l/min 30% 70% 40% 60% 8% 92% 2 to 105 l/min 2 to 100 l/min 20.0 mA 5.00 V 0 to 105 l/min 10% 90% PFM711 2 to 95 l/min 2 to 90 l/min 18.4 mA 4.60 V 0 to 95 l/min 20% 80% 30% 70% 2 to 84 l/min 2 to 80 l/min 16.8 mA

17

R R L L L R Standard piping/Centralized piping (mm) L R WXX Y S d D R Applicable O-ring Model Operating direction Centralized piping MY1B25 MY1B32 MY1B40 15.5 16.2 5.5 6 11.4 1.1 C9 20 20.4 5.5 6 11.4 1.1 L R 23.5 25.9 6 8 13.4 1.1 C11.2 DO-ring R R R Centralized piping (mm) R R R L L L WX SS Model L -X MY1B25 MY1B32 MY1B40 R R 26.5 10 Centralized piping Piping tube 40 5.5 Note) Refer to

Programless controller Step motor (servo 24 VDC)

Refer to the table below for the speed and the acceleration LEP6J LEP6K LEP10 (L)J LEP10 (L)K Speed [mm/s] Acceleration Speed Acceleration Speed [mm/s] Acceleration Speed Acceleration [mm/s2] [mm/s] [mm/s2] [mm/s2] [mm/s] [mm/s2] 0 20 200 10 200 20 200 10 200 1 30 300 15 300 30 300 15 300 2 40 400 20 400 40 400 20 400 3 50 500 30 500 50 500 30 500 4 60 600 40 600 75 600 40 600 5 70 700 50

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

MDHR2-10/15 MDHR2-20/30 D20H H L L Auto switch of D-M9 is used. When auto switch D-M9V is used. Auto switch of D-M9V is used. (mm) Max. Protrusion of Auto Switch from Edge of Body: H Max.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

AC : SY100-30-2AOther AC voltages: SY100-30-3A3 4 Lead wire length 300mm 600mm 1000mm 1500mm 2000mm 2500mm 3000mm 5000mm 6 10 15 20 25 30 50 Electrical entry Grommet (Lead wire length: 300mm) Grommet (Lead wire length: 600mm) With lead wire Without lead wire Without connector With lead wire Without lead wire Without connector G H L LN LO M MN MO L plug connector M plug connector 1.2-33

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

7 20 20 L (mm) L K J V H S Z M MA W Model 36 40 93 82 58 20 102 40 30 65 MXP16-20B 42 50 119 108 70 30 128 56 46 75 MXP16-30B 14

MHY2/MHW2

(F: Thrust of one finger) Pressure 0.6MPa 0.5 40 8 0.5 Holding force (N) Holding force (N) 0.4 30 6 0.4 0.3 0.3 20 4 0.2 0.2 10 2 0.1 0.1 0 20 30 50 60 Holding point L (mm) 40 0 30 40 60 70 Holding point L (mm) 50 80 F F F F MHY2-16D MHY2-25D 35 100 Pressure 0.6MPa Pressure 0.6MPa 30 0.5 0.5 80 25 External hold Holding force (N) Holding force (N) 0.4 0.4 60 20 0.3 0.3 15 40 0.2 0.2 10 20

VQ7-6/7-8

) (A, B port) Y 12 50(63) 38(53) 5 3 32(42) 38(53) 23(30) 1 2-3/8, 1/2, 3/4 3/8, 1/2, 3/4 R1, R2 port 2-3/8, 1/2, 3/4 X(PE) port 1/8 P port 30(42) 30(42) 10 (11) A, B port ( ): 3/4 2 position double : VQ7-8-FG-D double (Reverse pressure): VQ7-8-YZ-D 3 position closed center : VQ7-8-FHG-D exhaust center : VQ7-8-FJG-D pressure center: VQ7-8-FIG-D 180.5 175.5 175.5 82.5 93 98 93 82.5 56(71)

LG1H

D: Resting time (0.4sec.)

180° Angular Style Air Gripper Series MHY2/MHW2

Pressure 0.6 MPa 0.5 40 8 0.5 Gripping force (N) Gripping force (N) 0.4 30 6 0.4 0.3 0.3 20 4 0.2 0.2 10 2 0.1 0.1 0 20 30 50 60 Gripping point L (mm) 40 0 30 40 60 70 Gripping point L (mm) 50 80 MHY2-16D MHY2-25D F F F F 35 100 Pressure 0.6 MPa Pressure 0.6 MPa 30 0.5 0.5 80 25 Gripping force (N) External grip Gripping force (N) 0.4 0.4 60 20 0.3 0.3 15 40 0.2 0.2 10 20 0.1 0.1 5 L L 0 20

High Vacuum Angle Valve, XL Series

IEC529 Standard IP67 watertight (JISCO920) For a lead wire length of 3m, "L" is added at the end of the part number. Example) D-F9NL Main switch circuit Main switch circuit Output Black [White] () Blue [Black] D-F9P (+) Brown [Red] Auto Switch Dimensions (mm) 1in=25.4mm Output Black [White] D-F9N, D-F9P, D-F9B () Blue [Black] D-F9B (+) Brown [Red] L dimension (mm) Part No.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Standard piping type Centralized piping type Operating direction Operating direction Side Front Side Front L R L R L L L R L R R R R R R R L L L L L R L L L Back New Back R R R Bottom Bottom Port variation Port variation R and L can be mounted in any desired position.

Modular Type Filter Regulator Series AW

Note 2) Symbol Nil B C D E G H Applicable model AW20K to 40K AW20K to 40K AW30K, 40K AW20K to 40K AW20K to 40K AW20K to 40K Port size Body size Symbol Port size 20 30 40 Float type auto drain (N.O.)

Cylinder with Lock Series MNB

14 102 73 64 45 86 30 111 12.5 11 10 65 359 14 22 + 0.084 0 22 MB-B08 80, 100 55 30 175 116 73 64 45 86 30 111 12.5 11 10 65 379 + 0.084 0 14 22 22 10 Series MNB Dimensions of Accessories Dimensions of Accessories Knuckle joint pin Clevis pin Rod end nut (standard equipment) 30 d Dd9 2d D C L l m H B Bore size (mm) Clevis Knuckle Part No. d Bore size (mm) Part No.

Guide Cylinder/Compact Type Series MGC

D-B7/B8 D-G7/K7 Auto Switch Proper Mounting Position Auto Switch Mounting Height (mm) (mm) D-G59F D-G5W D-K59W D-G5BAL D-G5 D-K59 D-G5NTL D-B7/B80 D-B73C D-B80C D-G79/K79 D-K79C D-H7C D-G5NTL D-G5/K59 D-G5W D-K59W D-B5/B64 D-B59W D-G5BAL D-G59F Auto switch model Auto switch model D-B7/B80 D-B73C D-B80C D-G79/K79 D-K79C D-H7W D-H7BAL D-H7 D-H7C D-H7NF D-C7/C80 D-H7 D-H7W D-H7NF D-H7BAL D-C7

VQ4000

(Except L kit) U D U D The maximum and minimum number of stations are varied depending on kit. (Refer to the table below.)

Thermo-chiller/Rack Mount Type

min] Circulating fluid flow rate [L/min] HRR050-A-20, HRR050-W-20 0.5 Circulating fluid pressure [MPa] Outlet: 60 Hz 0.4 0.3 Outlet: 50 Hz Return port Return port (Option Z) 0.2 Allowable operating range 0.1 0 0 10 20 30 40 Circulating fluid flow rate [L/min] Required Facility Water Flow Rate 012 018 024 030 HRR -W HRR010-W-20 30 20 Facility water flow rate [L/min] Facility water flow rate

MLGP

Example Data Theoretical Output Minimum Stroke for Auto Switch Mounting OUT IN (N) (mm) Rod size (mm) Operating direction Piston area (mm2) Operating pressure (MPa) Bore size (mm) D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 No. of auto switches mounted D-Y69 D-Y7PV D-Y7WV D-Y7BAL D-P5DWL 283 314 220 251 157 188 94 126 314 63 OUT 20 10 236 212 189 165 142 118 94 71 47

MLGP

Example Data Theoretical Output Minimum Stroke for Auto Switch Mounting OUT IN (N) (mm) Rod size (mm) Operating direction Piston area (mm2) Operating pressure (MPa) Bore size (mm) D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 No. of auto switches mounted D-Y69 D-Y7PV D-Y7WV D-Y7BAL D-P5DWL 314 283 251 220 188 157 126 94 63 314 OUT 20 10 236 212 189 165 142 118 94 71 47

Digital Flow Switch

3000 L/min 6000 L/min 12000 L/min 30 L/min 3000 L/min PF3A703H 3150 L/min 30 L/min 0 L/min 3150 L/min 60 L/min 6000 L/min PF3A706H 6300 L/min 60 L/min 6300 L/min 0 L/min 120 L/min 12000 L/min 12600 L/min 12600 L/min PF3A712H 120 L/min 0 L/min Rated flow range Set point range Display range Analog Output Output Output Flow/Analog Output 0 L/min A*2 B Voltage output (1 to 5 V)*1 1 V 1.04 V