Speed Controller: Standard Type Series AS In-line Type 1

32, 40, 50, 63 124 AS3000-03 3/8 810 12.3 810 12.3 221 AS4000-02 1/4 1,670 25.5 1,670 25.5 40, 50, 63 80, 100 214 AS4000-03 3/8 1,670 25.5 1,670 25.5 205 AS4000-04 1/2 1,670 25.5 1,670 25.5 242 AS5000-02 1/4 2,840 44 2,840 44 40, 50, 63 80, 100 233 AS5000-03 3/8 4,270 66 4,270 66 224 AS5000-04 1/2 4,270 66 4,270 66 AS4000 Note) Flow rate values are measured at 0.5 Mpa and 20C.

Rotary One-touch Fittings Manifold Series KM

N L1 L2 Weight (g) Port B Min. port size L3 L4 L5 L6 P Q1 Q2 MA MB FA FB KM11-03-09-6 KM11-03-09-10 KM11-07-11-6 KM11-07-11-10 KM11-09-13-6 KM11-09-13-10 6 65 10 40 22 5 32 5 16 18 29.5 19.5 27 10.6 12 16 18.5 6 10 86 6 77.8 10 104 6 85 10 115 61.5 30 48 32 10 19.5 31.5 21.5 30.5 13.2 13 17 21 7 1 4 3 8 73.5 44 52.8 44 12.7 23.7 37.7 25 35.9 15.2 15 18.5 22 9.5 5 16 1 2 83 62 Metric Applicable

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

SRP

mounting hole 40 8.5 20 28 72.5 (when set = 75.5) Bleed exhaust hole 6.5 28 41 1.6 Port size A B IN OUT Model Port size D C B A 30 30 23.5 14 M5 x 0.8 SRP111-M5 40 40 22.5 15 Rc 1/8 SRP111-01 C D 3 Series SRP Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

SRP

mounting hole 40 8.5 20 28 72.5 (when set = 75.5) Bleed exhaust hole 6.5 28 41 1.6 Port size A B IN OUT Model Port size D C B A 30 30 23.5 14 M5 x 0.8 SRP111-M5 40 40 22.5 15 Rc 1/8 SRP111-01 C D 3 Series SRP Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

Style: Pressure Switch with Piping Adapter, Body Size: 30 (AC30), Thread Type: Rc, Port Size: 03 (3/8), Set Pressure Range: 6 (0.1 to 0.6 MPa), Lead Wire Length: 0.5m, Pressure Unit of the Scale Plate: MPa, Mounting: R (Left)

Style: Pressure Switch with Piping Adapter, Body Size: 30 (AC30), Thread Type: Rc, Port Size: 03 (3/8), Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: L (3m), Pressure Unit of the Scale Plate: MPa, Mounting: Right

Style: Pressure Switch with Piping Adapter, Body Size: 30 (AC30), Thread Type: Rc, Port Size: 03 (3/8), Set Pressure Range: 6 (0.1 to 0.6 MPa), Lead Wire Length: 0.5m, Pressure Unit of the Scale Plate: MPa, Mounting: Right

Style: Pressure Switch with Piping Adapter, Body Size: 30 (AC30), Thread Type: Rc, Port Size: 03 (3/8), Set Pressure Range: 6 (0.1 to 0.6 MPa), Lead Wire Length: L (3m), Pressure Unit of the Scale Plate: MPa, Mounting: Right

Style: Pressure Switch with Piping Adapter, Body Size: 30 (AC30), Thread Type: Rc, Port Size: 03 (3/8), Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: Z (5m), Pressure Unit of the Scale Plate: MPa, Mounting: Right

Style: Pressure Switch with Piping Adapter, Body Size: 30 (AC30), Thread Type: Rc, Port Size: 03 (3/8), Set Pressure Range: 6 (0.1 to 0.6 MPa), Lead Wire Length: Z (5m), Pressure Unit of the Scale Plate: MPa, Mounting: Right

Body Size: AC30, Thread Type: Rc, Port Size: 3/8, Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: 3m, Pressure Unit of the Scale Plate: MPa, Mounting: Right

Body Size: AC30, Thread Type: Rc, Port Size: 3/8, Set Pressure Range: 0.1 to 0.6 MPa, Lead Wire Length: 0.5m, Pressure Unit of the Scale Plate: MPa, Mounting: Right

Body Size: AC30, Thread Type: Rc, Port Size: 3/8, Set Pressure Range: 0.1 to 0.6 MPa, Lead Wire Length: 3m, Pressure Unit of the Scale Plate: MPa, Mounting: Right

Body Size: AC30, Thread Type: Rc, Port Size: 3/8, Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: 5m, Pressure Unit of the Scale Plate: MPa, Mounting: Right

Body Size: AC30, Thread Type: Rc, Port Size: 3/8, Set Pressure Range: 0.1 to 0.6 MPa, Lead Wire Length: 5m, Pressure Unit of the Scale Plate: MPa, Mounting: Right

VHS

Padlock mounting position D SUP. C A 1(P) 2(A) Air Supply Warning B 1 Mount air filter to supply side close to valve. Filtration rating has to be 5m or smaller. 3(R) Model VHS2500 VHS3500 VHS4500 VHS5500 A 60 78 85 136 B 20 29 32 56 C 12.8 12.8 12.6 32 D 40 53 70 90 E 44 53 64 80 F 33 42 49 65 G 28 29 36 54 H 7.5 7.5 10 10 3.6-18

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

Option J: With drain guide Bracket (Option) female thread Maintenance space Drain M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 166 187 187 218 218 241 241 277 334 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 N 35 40 40 50 50 55 55 65 85 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100

AMH

Option J: With drain guide Bracket (Option) female thread T: With element service indicator Maintenance space Drain Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35