Rotary Cylinder Series MRQ Size: 32, 40 1

6 !7 !8 !

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.

Compact Cylinder with Lock Series CLQ

Hs A Auto switch mounting height (mm) Proper auto switch mounting positions (mm) D-F9 D-F9V D-F9W D-F9WV D-A9V D-F9BAL D-F9V D-F9WV D-A9 D-A9V Bore size (mm) D-F9BAL Bore size (mm) Hs Hs Hs 20 22 22.5 25 B A B A A B 20 25 36 6.5 37 7.5 33 3.5 24.5 27 24 25 32 41 8.5 9.5 38 5.5 42 27 29 26.5 32 40 8 9 43 5 44 40 32.5 30 30.5 40 50 10.5 49 7.5 50 11.5 46 36 36.5 38.5 50 63 48 13.5 49 14.5 45

HEC_W-E

-5-3 FIG. 5-4 DISPLAY -5-4 FIG. 5-5 RESERVOIR CAP -5-4 FIG. 6-1 COOLING CAPACITY OF HEC006 -6-3 FIG. 6-2 HEATING CAPACITY OF HEC006 -6-3 FIG. 6-3 PUMP CAPACITY OF HEC006 -6-4 FIG. 6-4 PRESSURE LOSS OF HEC006 -6-4 FIG. 6-5 COOLING CAPACITY OF HEC012 -6-5 FIG. 6-6 HEATING CAPACITY OF HEC012 -6-5 FIG. 6-7 PUMP CAPACITY OF HEC012 -6-6 FIG. 6-8 PRESSURE LOSS OF HEC012 -6-6 FIG. 9-1 ALARM INDICATION

HRX-OM-W038

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-W038 Contents 6.3 Option T [High-pressure pump] . 6-2 6.3.1 Option T [High-pressure pump] . 6-2 6.4 Optional Accessories [Electric resistivity /conductivity

Cylinder with Lock Series CLS

BBA1: For use with D-A5, A6, F5, J5 The above stainless steel screws are used when D-F5BAL type switches are mounted on a cylinder at the time of shipment. Also when switches are shipped separately, BBA1 is included with them. 35 + 30 (n 2) 110 + 30 (n 2) n = 2, 4, 6, 8 ... Different side "n" pcs. 100 + 10 (n 2) 110 + 100 (n 2) n = 2, 4, 6, 8 ...

LX Series Compact Electric Actuators

q . r. lksi : Screw LXFH5BC 30 Ball t : : t l : . : : : : : t : i : : t : i ' . serie!: LXF: LXFH5BD 30 Screw LXFH5SA 30 Slide LXFH5SB 20 I LXP82BC 60 50 220 Linear ball bearing LXP82BD 60 50 90 Ball Screw 60 50 160 6 0 ' .

ZR

Arrangement (Right valve station which is looked from valve side is first station.) 06 B Both sides 6 Viewed from the front side of valve unit, confirm the port location on the right and/or left side. 1 1 1 station only 1 station only 6 6 6 stations only 6 stations only All stations A All stations A If more than one spacer is required, specify all spacers.

Support Guide/11-LEFG Series

500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 4 8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work load

MK

D-A7lH, A80H D-A73C, A80C D-F7l, J79 D-F7lV, J79C D-A79W D-F9l D-F9lV D-F9lWV D-F9lW D-F9BAL D-P5DW D-A9l D-A9lV D-A7, A8 Model B 6.5 7 6 8.5 11.5 14.5 A 28.5 29 33 24 28.5 28.5 B 7 7.5 6.5 9 12 15 B 4 4.5 3.5 6 9 12 B 11 11.5 10.5 13 16 19 B 4.5 7.5 10.5 B 5 7.5 10.5 13.5 B 9 11.5 14.5 17.5 A 34.5 25.5 30 30 B 8 10.5 13.5 16.5 A 19.5 24 24 A 28 28.5 32.5 23.5 28 28 A 25.5 26 30 21

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

LJ1 60 72 A A Motor mounting area B Section BB When mounting a coupling on the motor, mount it within the dimensional range shown on the left. 9.2 Thread P.C.D. 32.5 Coupling Motor 29.5 30 8 Dimensions D C F D E With brake (mm) 101 8.5 26 32 Without brake (mm) 93 17 19 27.5 E F Coupling mounting dimensions Section AA (Housing interior) Series LJ1H S20 Motor mounting area dimensions Mitsubishi

Digital Flow Switch

Accuracy [%F.S.] 50% 50% 50% 40% 40% 40% With 1 1/4" connected With 1 1/2" connected 30% 30% 30% With 3/4" connected Elbow piping (2") Elbow piping (1 1/2") 20% 20% 20% Elbow piping (1") 10% 10% 10% 3% 3% 3% 8 7 6 5 4 3 2 1 0 0% 0% 0% 8 7 6 5 4 3 2 1 0 8 7 6 5 4 3 2 1 0 Straight section [d] Straight section [d] Straight section [d] Straight When piping with diameter smaller than the straight

Series VQ Metal Seal/Rubber Seal Body Ported

AXT661-12A AXT661-14A AXT661-14A-6 AXT661-14A-10 AXT661-14A-20 AXT661-14A-30 Lead wire length Single/3 position No. AXT661-12A AXT661-14AN AXT661-14AN-6 AXT661-14AN-10 AXT661-14AN-20 AXT661-14AN-30 Double No.

RLQ

50 63 D-F7WV D-F9WV D-F7BAVL D-F7V D-J79C D-M9V Number of auto switches D-A7, A7H D-A73C D-A80, A80H D-A80C 11 10 12 12 D-A79W D-A9, A9V 13 14 14 16 CL 1 pc. 2 pcs. 20 20 20 20 20 20 20 20 9.5 9.5 9.5 11.5 D-F7, F7V D-J79, J79C D-F7W, F7WV D-J79W D-F7BAL, F7BAVL D-F7NTL, F79F CL1 D-F7W D-J79W D-F7BAL D-F79F D-F9BAL 6 6 6 6.5 MLGC Number of auto switches D-A9 D-M9 D-A79W CNG D-M9, M9V 3.5

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

Lateral Load Resisting Low Friction Cylinder Series MQM 6, 10, 16, 20, 25 Metal Seal How to Order MQML D B 10 15 Lateral load resisting low friction specification Action D Double acting Type Cylinder stroke L Lateral load resisting type (Built-in basic bushing) Bore size (mm) Standard stroke (mm) Mounting 6 15, 30, 45, 60 B L F G C Note 1) Basic type Foot type Front flange type Rear flange

Solid State Auto Switches

Weight (g) Model D-A90 6 30 D-A90V 6 30 D-A93 6 11 30 47 D-A93V 6 30 47 D-A96 8 41 D-A96V 8 41 0.5 m (Nil) 1 m (M) 3 m (L) 5 m (Z) Lead wire length Dimensions (mm) D-A90/D-A93/D-A96 D-A90V/D-A93V/D-A96V 2 2.8 4.5 2.7 Slotted set screw M2.5 x 4 L 4 24.5 (22) 22 2 6 Slotted set screw M2.5 x 4 L D-A90 without indicator light Indicator light 2.7 D-A90V without indicator light Indicator

CE2

For detailed specifications, refer to page 10-20-1. 50 7 63 9 80 9.5 100 10.5 CV D-Z7/Z80 D-A3/A44 D-A3C, D-A44C D-A5/A6 D-B5/B64 D-A59W D-B59W D-Y5/Y6 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL D-F5/J5 D-F5W/J59W D-F5BAL/F5NTL D-F59F D-G5/K59 D-G5W/K59W D-G5NTL/G5BAL D-G59F D-G39/K39 D-G39C, D-K39C MVGQ Electrical entry (Fetching direction) D-A53/A56 D-A64/A67 D-B64 D-Z80 D-F59/F5P/J59 D-F59W/F5PW/J59W

Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) 1

D-A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT ( ) Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30 30 30 Resistor Reed switch Zener diode Dimensions OUT () Blue D-A90, D-A93, D-A96 Blue (Black) D-A96V DC (+

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

A L D VQZ D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 VQD Color: White VZS VFS EXH port silencer VS 63 Silencer is installed in the EXH port.

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

Output type Load voltage Lights when ON 2 color indicator Relay, PLC D-F9N D-F9NV NPN type 8mA or less 0.4V or less 28VDC or less 10A or less at 24VDC D-F9NW D-F9NWV D-F9P D-F9PV 12mA or less 24VDC (10 to 28VDC) 50mA or less Lights when ON 2 color indicator 10mA or less PNP type 1.5V or less D-F9PW D-F9PWV Lights when ON 4.5V or less D-F9B D-F9BV 1mA or less at 24VDC 24VDC (10 to 28VDC) 24VDC