MGG

(mm) Bore size (mm) Stroke range (mm) AL AK AP AJ AI AH AG N AB M AA L K J I V B U T A O P S 63 80 100 12 14 60 180 158 250 228 100 25 66 25 180 135 117 65 108 228 192 30 M12 x 1.75 depth 23 Rc 1/4 200 72 75, 100, 125 150, 200, 250 300 16 14 70 200 178 284 262 115 27 76 30 214 160 138 75 128 262 224 M12 x 1.75 depth 28 Rc 3/8 35 230 89 16 16 80 226 200 326 300 125 30 80 32 245 190 153 85

MB

, 250, 300, 350, 400, 450, 500 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400

5

S 1 pc. n n pcs.

LEF-OM002xx

H 8 W(kg) 15 30 6 10 20 4 5 2 10 0 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 LECPA Horizontal Transfer 50 12 B B 20 B 10 A A 40 W(kg) A W(kg) H H W(kg) 15 8 30 6 10 20 4 10 5 2 0 0 0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 V(mm/s) V (mm/s)

CJ2

A Bottom mounting style Example Rail mounting style CDJ2RA16-60S-A CJ2RA 16 45 S Without auto switch CDJ2RA10-45S-B Band mounting style For rail mounting style, screws and nuts for 2 pcs. switches come with the rail. 16 45 S J79W CDJ2RA With auto switch Number of auto switches Nil S n Built-in magnet 2 pcs. 1 pc. n pcs.

Thermo-chiller

Operating time 20 s 30 s Voltage 10 s 5 s Min. 2 s dV dt 1 s = Voltage increase ratio 0.5 s dV 0.2 s 0.1 s Time 0.05 s 0.02 s dt 0.01 s 100 125 200 300 500 400 600 700 1000 2000 3000 4000 1500 < For option B [With earth leakage breaker]> 3. This product is installed with a breaker with the following operating characteristics.

Cylinder with Lock

200 Maximum speed V [mm/s] Maximum speed V [mm/s] Graph n Graph c 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa 1000 1000 80 80 100 100 63 63 50 50 40 40 80 80 100 100 100 100 63 63 50 50 Load mass m [kg] Load mass m [kg] 32 32 [Example] 50 50 40 40 32 32 10 10 1 100 500 1000 1 100 500 1000 400 300 200 400 300 200 Maximum speed V [mm/s] Maximum speed V [mm/s] Graph m Graph v 0.5 MPa P 0.5 MPa

25

[mm] Ionizer front back direction [mm] 150 100 50 0 50 100 150 150 100 50 0 50 100 150 250 200 150 100 50 0 50 100 150 200 250 0 0 50 50 100 100 1 s 0.5 s 150 150 0.5 s 200 200 2 s 1 s 2 s 250 250 5 s 5 s 300 300 3) With energy saving type de-ionizing cartridge, Supply pressure: 0.3 MPa Installation distance in height from ionizer to workpiece (Charged object location) [mm] Installation

Table of Contents

AL SMC SMC SMC SMC SMC SMC 0.1 0.3 0.2 0.4 0.5 0.6 IS1000 MPa SMC SMC SMC K K K P P P C C C U U U O O O SMC SMC SMC SMC S S S L L L H H H MADE IN JAPAN K K K P P P C C C U U U O O O S S S L L L H H H Mixed manifold Mixed manifold Front handle/Bottom ported Front handle/Top ported Common exhaust type and individual exhaust type can be mounted on the same manifold base.

Thermo-chiller

(CO2) [mg/L] 4.0 or less v Reference item 5 s 2 s 1 s Min. 0.5 s 0.2 s 0.1 s *1 In the case of [Mcm], it will be 0.003 to 0.01.

Aluminum High Vacuum Angle Valve

plug connector M type plug connector 2 200 VAC, 50/60 Hz 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz XLA U 5 24 VDC 6 12 VDC S type: Not available for AC.

HRS100/150

Operating time 20 s 30 s HRZ 10 s Voltage HRZD 5 s Min. 2 s HRW 1 s 0.5 s dV dt HECR = Voltage increase ratio 0.2 s 0.1 s dV HEC 0.05 s 0.02 s Time HEB 0.01 s 100 125 200 300 500 400 600 700 1000 2000 3000 4000 1500 dt HED Current (% for chiller main breaker volume) < For option B [With earth leakage breaker]> 3.

Auto Switch Guide

C J G5-S CV MVGQ Applicable cable (Heavy-duty cord) Applicable to cable O.D. of 6.8 to 11.5.

LEF-OM006xx

15 8 30 8 6 8 10 5 5 20 4 5 12 10 16 10 12 16 10 2 0 0 0 0 100 200 300 400 500 600 V (mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) -9- (1)(DC24V) LEFS40 (mm) 1) 200, 300, (400), 500, (600) (700), 800, (900), (1000) 50 60 (kg) ) 23 (mm/s) 2) 20500 10250 (mm/s 2) 3,000 (mm) 0.02 (mm) 20 10 (m/s 2) 3) 50/20 () 540 (%) 90 RH ) 56.4 (DC24V) A/B 800 / (

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

L : Stroke [mm] (Operating condition) T2 = T1 T2 T3 T4 200 0.5 300 (0.1 + 0.1) 300 = V : Speed [mm/s] (Operating condition) T1 = V/a1 [s] T3 = V/a2 [s] = 0.57 [s] a1: Acceleration [mm/s2] (Operating condition) T2: Constant speed time can be found from the following equation.

42

/s.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Stroke range (mm) Bore size (mm) AP AL AK AJ AI AH AG AB AA V U T S N M L K J I B A O P 63 60 12 14 180 158 250 228 25 25 108 192 30 72 100 66 180 135 117 65 228 200 Rc 1/4 M12 x 1.75 depth 23 75, 100, 125 150, 200, 250 300 80 70 16 14 200 178 284 262 27 30 128 224 35 89 115 76 214 160 138 75 262 230 Rc 3/8 M12 x 1.75 depth 28 100 80 16 16 226 200 326 300 30 32 143 262 40 110 125 80 245 190

SQ1000/2000

plate assembly u F kit L kit T kit S kit P (J) kit q !

SYJ3000/5000/7000

rate: 50% Stroke 300 mm 6 10 16 20 25 32 40 Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ3140-M5 Cylinder is in extending.

MNB

500 400 300 500 400 300 80 80 63 63 100 100 MLGP 200 200 50 50 40 40 80 80 100 100 RLQ 63 63 50 50 Load weight: m (kg) Load weight: m (kg) 32 32 50 40 30 50 40 30 MLU 40 40 32 32 20 20 ML1C [Example] 10 10 D5 4 3 5 4 3 -X 2 2 201 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100