Table of Contents

I = m x (a2 + b2) / 12 + m x H2 I = 0.15 x (0.062 + 0.042) / 12 + 0.15 x 0.032 = 0.0002 kgm2 Moment of inertia Kinetic energy 6 Confirm that the loads kinetic energy is within the allowable value. 1/2 x I x 2 = < Allowable energy 1 / 2 x (0.0002) x (2 x ( / 2) / 0.3)2 = = 2 / t (: Terminal angular velocity) 0.01096 J < Allowable energy OK : Rotation angle (rad) t: Rotation time (s) Allowable

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

I = m x (a2 + b2) / 12 + m x H2 I = 0.15 x (0.062 + 0.042) / 12 + 0.15 x 0.032 = 0.0002 kgm2 Moment of inertia Kinetic energy 6 Confirm that the loads kinetic energy is within the allowable value. 1/2 x I x 2 = < Allowable energy 1 / 2 x (0.0002) x (2 x ( / 2) / 0.3)2 = = 2 / t (: Terminal angular velocity) 0.01096 J < Allowable energy OK : Rotation angle (rad) t: Rotation time (s) Allowable

High vacuum angle valve; Type: manual, bellows seal; Flange size: 16 ~ 50; Heater type: H1 (80°C), H2 (100°C), H3 (120°C); Auto switches not available

The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.High vacuum angle valve; Type: manual, bellows seal; Flange size: 16 ~ 50; Heater type: H1 (80°C), H2 (100°C), H3 (120°C); Auto switches not available

High vacuum angle valve; Type: manual, bellows seal; Flange size: 16 ~ 50; Heater type: H1 (80°C), H2 (100°C), H3 (120°C); Auto switches not available

High vacuum angle valve; Type: manual, bellows seal; Flange size: 16 ~ 50; Heater type: H1 (80°C), H2 (100°C), H3 (120°C); Auto switches not available

Economy Valve

If the product malfunctions, please return the valve as it is. 11 No.VEX-OMA0019-C Revision history AE ARenewal Ny A BE ASafety Instructions Po A CE ARenewal WU 1st printing : January 1987 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation

C95

(Rochester) 245 Summit Point Drive Henrietta, NY 14467 Tel: (716) 321-1300 FAX: (716) 321-1865 SMC Pneumatics lnc. (Austin) 2324-D Ridgepoint Drive Austin, TX 78754 Tel: (512) 926-2646 FAX: (512) 926-7055 SMC Pneumatics Inc. (Nashville) 5000 Linbar Drive, Suite 297 Nashville, TN 37211 Tel: (615) 331-0020 FAX: (615) 331-9950 SMC Pneumatics Inc. (Dallas) 12801 N.

CJ1

(Rochester) 245 Summit Point Drive Henrietta, NY 14467 Tel: (716) 321-1300 FAX: (716) 321-1865 SMC Pneumatics lnc. (Austin) 2324-D Ridgepoint Drive Austin, TX 78754 Tel: (512) 926-2646 FAX: (512) 926-7055 SMC Pneumatics Inc. (Nashville) 5000 Linbar Drive, Suite 297 Nashville, TN 37211 Tel: (615) 331-0020 FAX: (615) 331-9950 SMC Pneumatics Inc. (Dallas) 12801 N.

CJ2

(Rochester) 245 Summit Point Drive Henrietta, NY 14467 Tel: (716) 321-1300 FAX: (716) 321-1865 SMC Pneumatics lnc. (Austin) 2324-D Ridgepoint Drive Austin, TX 78754 Tel: (512) 926-2646 FAX: (512) 926-7055 SMC Pneumatics Inc. (Nashville) 5000 Linbar Drive, Suite 297 Nashville, TN 37211 Tel: (615) 331-0020 FAX: (615) 331-9950 SMC Pneumatics Inc. (Dallas) 12801 N.

Copper-free Actuators

(Rochester) 245 Summit Point Drive Henrietta, NY 14467 Tel: (716) 321-1300 FAX: (716) 321-1865 SMC Pneumatics lnc. (Austin) 2324-D Ridgepoint Drive Austin, TX 78754 Tel: (512) 926-2646 FAX: (512) 926-7055 SMC Pneumatics Inc. (Nashville) 5000 Linbar Drive, Suite 297 Nashville, TN 37211 Tel: (615) 331-0020 FAX: (615) 331-9950 SMC Pneumatics Inc. (Dallas) 12801 N.

Series CQ2

(Rochester) 245 Summit Point Drive Henrietta, NY 14467 Tel: (716) 321-1300 FAX: (716) 321-1865 SMC Pneumatics Inc. (Columbus) 3687 Corporate Drive Columbus, OH 43231 Tel: (614) 895-9765 FAX: (614) 895-9780 SMC Pneumatics Inc. (Nashville) 5000 Linbar Drive, Suite 297 Nashville, TN 37211 Tel: (615) 331-0020 FAX: (615) 331-9950 SMC Pneumatics Inc.

CQS

(Rochester) 245 Summit Point Drive Henrietta, NY 14467 Tel: (716) 321-1300 FAX: (716) 321-1865 SMC Pneumatics lnc. (Austin) 2324-D Ridgepoint Drive Austin, TX 78754 Tel: (512) 926-2646 FAX: (512) 926-7055 SMC Pneumatics Inc. (Nashville) 5000 Linbar Drive, Suite 297 Nashville, TN 37211 Tel: (615) 331-0020 FAX: (615) 331-9950 SMC Pneumatics Inc. (Dallas) 12801 N.

CXT

(Rochester) 245 Summit Point Drive Henrietta, NY 14467 Tel: (716) 321-1300 FAX: (716) 321-1865 SMC Pneumatics lnc. (Austin) 2324-D Ridgepoint Drive Austin, TX 78754 Tel: (512) 926-2646 FAX: (512) 926-7055 SMC Pneumatics Inc. (Nashville) 5000 Linbar Drive, Suite 297 Nashville, TN 37211 Tel: (615) 331-0020 FAX: (615) 331-9950 SMC Pneumatics Inc. (Dallas) 12801 N.

AKH/AKB Series

(Rochester) 245 Summit Point Drive Henrietta, NY 14467 Tel: (716) 321-1300 FAX: (716) 321-1865 SMC Pneumatics Inc. (Columbus) 3687 Corporate Drive Columbus, OH 43231 Tel: (614) 895-9765 FAX: (614) 895-9780 SMC Pneumatics Inc. (Nashville) 5000 Linbar Drive, Suite 297 Nashville, TN 37211 Tel: (615) 331-0020 FAX: (615) 331-9950 SMC Pneumatics Inc.

AMPSeries

(Rochester) 245 Summit Point Drive Henrietta, NY 14467 Tel: (716) 321-1300 FAX: (716) 321-1865 SMC Pneumatics Inc. (Columbus) 3687 Corporate Drive Columbus, OH 43231 Tel: (614) 895-9765 FAX: (614) 895-9780 SMC Pneumatics Inc. (Nashville) 5000 Linbar Drive, Suite 297 Nashville, TN 37211 Tel: (615) 331-0020 FAX: (615) 331-9950 SMC Pneumatics Inc.

Tamper Proof and Flat Head Screw

(Rochester) 245 Summit Point Drive Henrietta, NY 14467 Tel: (716) 321-1300 FAX: (716) 321-1865 SMC Pneumatics Inc. (Columbus) 3687 Corporate Drive Columbus, OH 43231 Tel: (614) 895-9765 FAX: (614) 895-9780 SMC Pneumatics Inc. (Nashville) 5000 Linbar Drive, Suite 297 Nashville, TN 37211 Tel: (615) 331-0020 FAX: (615) 331-9950 SMC Pneumatics Inc.

Corporation of America

(615) 331-0020 PORTLAND, OR (503) 252-9299 CINCINNATI, OH (859) 647-5600 AUSTIN, TX (512) 926-2646 TAMPA, FL (813) 243-8350 HOUSTON, TX (713) 460-0762 MILWAUKEE, WI (262) 827-0080 NEWARK, NJ (732) 537-0120 RICHMOND, VA (804) 527-0500 CLEVELAND, OH (330) 963-2727 BOSTON, MA (978) 326-3600 INDIANAPOLIS, IN (317) 899-4440 MINNEAPOLIS, MN (952) 943-1299 PHOENIX, AZ (623) 492-0908 ROCHESTER, NY

Series IDG

(Rochester) 245 Summit Point Drive Henrietta, NY 14467 Tel: (716) 321-1300 FAX: (716) 321-1865 SMC Pneumatics Inc. (Columbus) 3687 Corporate Drive Columbus, OH 43231 Tel: (614) 895-9765 FAX: (614) 895-9780 SMC Pneumatics Inc. (Nashville) 5000 Linbar Drive, Suite 297 Nashville, TN 37211 Tel: (615) 331-0020 FAX: (615) 331-9950 SMC Pneumatics Inc.

Pneumatics, Inc.

LOUIS, MO (314) 209-0080 HOUSTON, TX (713) 460-0762 BOSTON, MA (978) 326-3600 CLEVELAND, OH (330) 963-2727 NEWARK, NJ (908) 253-3241 MILWAUKEE, WI (262) 827-0080 RICHMOND, VA (804) 222-2762 TAMPA, FL (813) 243-8350 CHARLOTTE, NC (704) 597-9292 COLUMBUS, OH (614) 895-9765 ROCHESTER, NY (716) 321-1300 TULSA, OK (918) 252-7820 Business Deve lopment Cente r , I n d i a n a p o l i s, I N