Booster Regulator/Air Tank

ARJ AR425 to 935 Air-operated type Pilot pressure VBA11A VBA10A, 20A, 40A, 43A ARX Drive chamber A Governor Drive chamber A Governor Drive chamber B Booster chamber A AMR IN (Inlet) IN (Inlet) Drive chamber B ARM VBA22A, 42A Piston rod Piston rod ARP Booster chamber A IR-A Piston Piston IR Check valve Booster chamber B Booster chamber B Check valve IRV Switching valve Switching valve E OUT

7.4

S07B5 4(A) 2(B) 5(R1) 3(R2) 1(P) 5 (R1) 4 (A) 1 (P) 2 (B) 3 (R2) y t N.O. + N.O. Component Parts S07C5 2(B) No.

CLS

Bore size (mm) A B Hs Ht Hs Ht 125 1.5 1.5 69.5 71 69.5 69 140 1.5 1.5 76 77 76 76 160 1.5 1.5 85 88.5 85 85 180 7 5 95 97.5 95 95 200 9.5 7.5 106 108 106 106 9-9-22 23 Auto Switch Specifications Series CLS Proper Auto Switch Mounting Position for Lock Unit Auto switch Auto switch model D-M9N D-M9P D-M9B D-A90 D-A93 SMC CLS125 MODEL b a b a b Bore size (mm) 125 140 160 180 200 250 a 59 39

Modular Type Lubricators Series AL

level gauge B B B B B B B Dimensions B Barb fitting Applicable tubing: T0604 Model Standard specifications Optional specifications Bracket mount P M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 A 25 40 53 70 75 90 95 B 77 115 142 176 176 250 268 C 26 36 38 40 38 41 45 D 12.5 20 26.5 35 35 45 47.5 E 30 38 38 45 G 35 60 80 110 110 110 110 J 12.5 20 26.5 35 35 45 47.5 M 30 41 50

CNG

CNS D-H7C D-B5, D-B6, D-B59W CLS HS HS Auto switch Auto switch 12 8.5 CLQ 24.5 16 MLGP A B A B 33 38.2 RLQ MLU Proper Auto Switch Mounting Position Auto Switch Mounting Height ML1C Auto switch model D-C7/C80 D-H7 D-H7W D-H7NF D-H7BAL D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-C7/C80 D-C73C D-C80C D-B5/B64 DD-B5/B64 D-B59W D-G5NTL D-H7C D-C73C D-C80C D-G5NTL D-B59W -X Bore size (mm) A B A B A B A B

Compact Type

A C D-F9 D-F9W D-M9 D-A93 D-A90 D-A96 D-F9V D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 D 7.5 5 2 5 7 7.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38

HRX-OM-W002

-A/W-10/20. 9-11 HRR Series HRX-OM-W002 Contents 9.4.2 HRR018-A/W-10/20. 9-11 9.4.3 HRR024-A/W-20. 9-12 9.4.4 HRR030-A/W-20. 9-12 9.5 Heating capacity . 9-13 9.5.1 HRR012-A/W-10-,HRR018-A/W-10-. 9-13 9.5.2 HRR012-A/W-20,HRR018-A/W-20 . 9-13 9.5.3 HRR024-A/W-20,HRR030-A/W-20 . 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR012/018/024/030-A/W. 9-14 9.6.2 HRR012/018-A/W-10-T/MT . 9-14 9.6.3 HRR012/018

Table of Contents

CDU Double Acting, Single Rod D-A9, D-A9V D-M9, D-F9W D-M9V, D-F9WV Bore size (mm) B W A W W B B A A 6 10 16 20 25 32 3.5 4.5 17.5 6.5 0.5 3.5 13.5 17.5 2.5(5) 7.5 0.5 16.5 2.5 3.5 7.5 12.5 16.5 1.5(1) 8 0.5 20 1.5 4 8 16 20 2(0.5) 10 2 24 0 6 10 20 24 4(1.5) 11 3.5 26.5 1.5 7 11 22.5 26.5 5.5(3) 12.5 4.5 27.5 2.5 8.5 12.5 23.5 27.5 6.5(4) Note 1) Figures in the table above are used as a

Table of Contents - Tubing

lines in clean room environments TPH 06 04 B 20 Tube O.D.

1

Auto switch model Bore size [mm] 20 25 32 40 D-M9m(V) D-M9mW(V) BM8-020 (A set of a, b, c, d) BM8-025 (A set of a, b, c, d) BM8-032 (A set of a, b, c, d) BM8-040 (A set of a, b, c, d) BM8-025S (A set of a, b, c, d) * S: Stainless steel set screw BM8-032S (A set of a, b, c, d) * S: Stainless steel set screw BM8-040S (A set of a, b, c, d) * S: Stainless steel set screw D-M9mA(V) BM8-020S (A

CRQ2

Rotational axis B d D I m kgm I = m kgm 8 8 Gear: I a + b I = m kgm IB = I + I + I kgm 12 Substitute the moment of inertia IB for rotation around shaft B with the moment of inertia IA for rotation around shaft A. Gear: I IA = (A/B)IB [A/B: Gear tooth ratio] Find the actual moment of inertia.

Basic Type/Direct Mount Type

7 t 18a CY3R15, 20 CY3R15 Component Parts No. Description Body End cover A End cover C End cover B End cover D Cylinder tube No.

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

Hs Auto switch 24.5 A B 49.5 A 33 B Proper auto switch mounting positions (mm) D-G39 D-K39 D-A3 D-A44 D-H7 D-H7C D-H7W D-H7BAL D-C7 D-C80 D-C73C D-C80C D-B5 D-B64 D-G5NTL D-H7F D-B59W Bore size (mm) A B A A A A A A B B B B B B 16 15.5 7.5 12 14 17.5 12.5 11 19 20 8 4 6 9.5 4.5 25 17.5 13.5 17 7 15.5 19 10.5 14 20.5 7.5 3.5 5.5 9 4 32 20.5 16.5 9 20 18.5 22 23.5 12.5 17 9.5 5.5 7.5 11 6 40

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

MY1CW16/20 MY1MW16/20 B A Reed Switch Solid State Switch D-A90(V), D-A93(V), D-A96(V) (mm) D-M9N(V), D-M9P(V), D-M9B(V) D-F9NW(V), D-F9PW(V), D-F9BW(V) 16 20 Mounting position Mounting position 16 20 A A B B Operating range Note) Operating range Note) Solid State Switch Reed Switch 24 Series MY1W Mounting of Auto Switch & Installation of Lead Wire Cover (50, 63) Caution Be sure to install

ARM10/11

Common supply bushing 136144-S Individual supply bushing 136144-K Single unit regulator / Port plug for regulator block 136144-S 136144-K Option A-A A Nil X17 None A-A A Oil-free 12 12 10 A A 8 8 15 15 10 14-4-38 21 Regulator Single Unit Type Series ARM10 How to Order F.R.L. ARM10 06 B Z 1 AV AU 1 2 3 4 1.

ARM10/11

Common supply bushing 136144-S Individual supply bushing 136144-K Single unit regulator / Port plug for regulator block 136144-S 136144-K Option A-A A Nil X17 None A-A A Oil-free 12 12 10 A A 8 8 15 15 10 14-4-38 21 Regulator Single Unit Type Series ARM10 How to Order F.R.L. ARM10 06 B Z 1 AV AU 1 2 3 4 1.

Electric Actuator / Slider Type 《 AC Servo Motor 》

When the positioning mode is set: The minimum unit of the travel distance of the actuator should be 1 [m]. 9 - LECSB LEFS25 LEFS32 LEFS40 Series Lead symbol H A B H A B H A B Lead 20 12 6 24 16 8 30 20 10 Parameter Para. No.

Cylinder with Lock Series CNG

HS Auto switch Auto switch 12 8.5 24.5 16 A B A B 33 38.2 Auto switch mounting position Auto switch mounting height (mm) (mm) Auto switch model D-C7, C8 D-H7 D-H7W D-H7F D-H7BA D-H7 D-H7C D-H7W D-H7BA D-C7, C8 D-C73C D-C80C D-B5, B6 D-C73C D-C80C D-B5, B6 D-B59W D-G5NT D-H7C D-G5NT D-B59W D-H7F Bore size (mm) A A B A B A A HS HS HS B B B B A 20.5 (28.5) 14.5 (22.5) 17.5 (25.5) 19.5 (27.5)

MXW Series Long Stroke Slide Table

direction 10.5 B A 9.5 10 20 20 18 A 10.5 43 31 23 21.5 Z A Cross section AA (scale 50%) 4-M6 x 1 thread depth 12 3 x H G Bottom through hole 5.1 H 7 depth 5.5 6H9 +0.03 0 F E 6H9 +0.03depth 5.5 0 Model Z H G F E MXW16-75 270 45 71.5 112 83 MXW16-100 295 50 74 126 86 Note) Adjuster bolt Y shown in the section above is attached only on B type (with shock absorber). 148 148 148 Long Stroke

LEY-OM007

INP 1 INP ON 0.50 2 INP ON a bINP ON < / [mm/sec] [mm/sec] 1 4 30% 1 4 40% 5 20 35% 5 20 60% LEY*16** 21 50 60% 85% LEY*16*A* 21 50 80% 95% 1 4 20% 1 4 40% 5 20 35% 5 20 60% LEY*25** 21 35 50% 65% LEY*25*A* 21 35 80% 95% 1 4 20% 5 20 35% LEY*32** 21 30 60% 85% -41- LEY*16** LEY*25** LEY*32** LEY*16*A* LEY*25*A* A B C A B C A B C A B C A B C [kg] 1 1.5