,,: ,.

Reference toroue sDecification Table #3 Straight Union: Dor/$rE ril'Hrirm ilUf / fiOf I Wn 1il0fi1 lflL/ l0L$epi Female Connector: KVF 14.29 9.2 1 . 5 15.5 17.6 14.5 14.29 't0 27 10.8 1 6 1.6 11.4b 40.7 14.29 10.7 '10.9 16.5 17.46 31.3 13.6 14.29 12.5 '10.6 1 7 |.44 31.2 13-3 22.23 15.2 30.8 r.3 17.46 17.4 2l 34.5 1 5 ,t ,a 36.6 23.81 40.6 18.9 it.4 r5.4 13,8 6.4 14.8 23.81 40.8 1E.8 22.23

Size: 3 (30), Body Material: A (Aluminum), Seal Material: N (NBR), Port Size: 402 (Orifice Diameter: ø4mm; Port Size: 1/4), Thread Type: N (NPT), Rated Voltage: J (230 VAC), Electrical Entry: WN (M12 Connector/without Connector Cable; with Surge Voltage Suppressor), Coil Orientation: Upward, Blow Port Position: F (Front), Oil-free Option: D (Oil-free)

Size: 4 (40), Body Material: A (Aluminum), Seal Material: N (NBR), Port Size: 402 (Orifice Diameter: ø4mm; Port Size: 1/4), Thread Type: N (NPT), Rated Voltage: J (230 VAC), Electrical Entry: WN (M12 Connector/without Connector Cable; with Surge Voltage Suppressor), Coil Orientation: Upward, Blow Port Position: F (Front), Oil-free Option: D (Oil-free)

0.5

Fine particles are generated due to wear of emitters and motor sliding during operation. 26 IZF10/IZF10R Series Dimensions 96 82 80 79 39 37 110 121 96.5 94 103 Holding bolt Bracket 60.3 6.5 46 1 Power supply switch LED indicators Balance adjustment trimmer IZF10R 98.9 Air flow adjustment switch 64.1 Without bracket (39) 30 3 x 5.5 through 33.5 1.5 4 23 25 24.5 (46) 50 12.5 66.8 5.5 5.5 30

PFxx-OMJ0005CN

420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I 1 W Z (2 m) (2 m) + () 2 R S () () T V () () A A B B -11No.PF-OMJ0005CN-I IN OUT X693 IN OUT 73 IN OUT X694 IN OUT 73 X731 (Ar)(CO2) (ArCO2) 92:890:1080:2070:3060:40 75 / ZS-33-D 2 m () ZS-33-F ZS-33-J

PFxx-OMO0004CN

No.PF-OMO0004CN-E // PFMB7201 2 10 13 14 16 16 19 21 [] 25 OU1OUT2 {3 ] 26 28 [] 28 28 F0 29 F1 OUT1 31 F2 OUT2 39 F3 44 F10 45 F13 46 F20 47 F22 48 F30 49 F31 50 F80 OFF 51 F81 52 F90 53 F98 55 F99 56 57 61 62 64 65 65 68 71 -1No.PF-OMO0004CN-E (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic

LV50-OMQ0002

[F10] Sub screen Page 41 Flow direction [F20] External input Page 45 [F22] Analogue output Page 46 Free range analogue output for instantaneous flow: OFF [F30] Accumulated value display Page 47 OFF [F32] Setting of flow direction / back flow detection function.

SFOD-OMT0005CN

23 5.3 SII/O . 23 (1) . 23 (2) . 24 5.4 P1P2: EtherNet/IP . 24 6 . 25 6.1 . 25 6.2 . 25 6.3 . 26 (1)(C24V,M24V,0V) . 26 (2)(EMG) . 26 (3)(LK RLS) . 26 6.4 . 27 (1)() . 27 (2)() . 28 -1- (3)((2)) . 29 7LED . 30 7.1 LED . 30 7.2 LED . 30 8 . 31 8.1 . 31 8.2 No. . 31 8.3 / . 31 8.4 . 31 9 . 32 9.1 . 32 (1) . 32 (2) . 33 (3) . 37 (4) . 37 10 . 41 10.1 . 41 10.2 . 44 10.3 . 46

OMR0032

NP-/PPTransistor: OFF Photo coupler: OFF 46 - [About the photo coupler ON/OFF in the LATCA pulse input circuit during differential input connection] Photo coupler ON Command pulse signal High Inside the controller Upper level device side NP+/PP+ A current is passing through the circuit.

IDX-OM-W017

83 101 152 3/h m (ANR)1 10 17 34 50 91 112 168 MPa 0.7 oC 35 oC 25 230V 50Hz oC 550 MPa 0.15 MPa 1.0 oC 24085% 1 AC230V10% 50Hz 4 2 A 1.2 1.2 1.2 1.4 2.7 2.9 2 W 180 180 180 208 385 420 3 A 5 10 50 dB R134aHFC g 1505 2005 2305 2705 2905 3505 Rc3/8 Rc1/2 Rc3/4 Rc1 R3/8 R1/2 R3/4 R1 mm 10 12 kg 18 22 23 27 28 46 1ANR 2065% 2 330mA 4 () 6-1 IDFA Series 6 1 IDX-OM-W017

VNH

lubricated.) 5.5 MPa 10.5 MPa Proof pressure Ambient temperature Max. operating frequency Mounting position Port size Orifice size (mm) Flow characteristics Av x 10-5 VDW 5 to 50C 20 times/min Vertical upwards VQ Rc 1 2 Rc 3 8 Rc 3 4 Rc1 Rc 3 8 Rc 1 2 Rc 3 4 Rc1 Rc 3 8 Rc 1 2 Rc 3 4 Rc1 VX2 7.1 86 8.7 110 10.6 190 14.3 15 3.9 29 5.2 38 6.2 58 7.3 54 8 75 9.5 140 13 210 15.7 Rc 46

VVX31/32/33

46 F 33 34 34 H 24 25 25 J 30 40 40 D 22 24 24 A 40 44 44 B 20 22 22 C 9 10 10 Model VVX31 VVX32 VVX33 TI/ TIL PA PAX PB 17-3-91

Cooling Method: W (Water-cooled Refrigeration), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting)], Power Supply: 20 [3-phase 200 VAC (50 Hz); 3-phase 200 to 230 VAC (50/60 Hz], Option: B (w/Earth Leakage Breaker)

Cooling Method: W (Water-cooled Refrigeration), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting)], Power Supply: 20 [3-phase 200 VAC (50 Hz); 3-phase 200 to 230 VAC (50/60 Hz], Option: JM (J + M)

Cooling Method: W (Water-cooled Refrigeration), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting)], Power Supply: 20 [3-phase 200 VAC (50 Hz); 3-phase 200 to 230 VAC (50/60 Hz], Option: M (Applicable to Deionized Water Piping)

Cooling Method: Water-cooled Refrigeration, Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting)], Power Supply: 20 [3-phase 200 VAC (50 Hz); 3-phase 200 to 230 VAC (50/60 Hz], Option: J + M

Cooling Method: Water-cooled Refrigeration, Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting)], Power Supply: 20 [3-phase 200 VAC (50 Hz); 3-phase 200 to 230 VAC (50/60 Hz], Option: Applicable to Deionized Water Piping

Cooling Capacity: 9 kW, Piping thread type: NPT (Rc-NPT conversion fitting included), Optional specifications: With earth leakage circuit breaker

Thermo-chiller HRS offers convenient functions, self diagnosis and check display for easy maintenance.  An angled supply port facilitates the supply of circulating fluid, even when units are stacked.  A large digital display provides a clear view of the current and set values.  The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS filter

Cooling Method: W (Water-cooled Refrigeration), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting)], Power Supply: 20 [3-phase 200 VAC (50 Hz); 3-phase 200 to 230 VAC (50/60 Hz], Option: BM (B + M)