VEX1

terminal i Conduit terminal j DIN connector a Model b d e f VEX5500 VEX5501 19 130 110 9 12 2.3 187 187.5 205.5 205 32 VEX5700 VEX5701 136 9 20 2.3 204 204.5 222.5 120 222 VEX VEX5900/5901 AN AMC 5.1-34 VEX5 Dimensions Select style VEX5510/E5511 VEX5710/E5711 Port size E F G H I J L M P A Model R T U B C K N O Q S D A,P port Rc(PT) , ,1 R port Rc(PT) VEX5510 VEX5511 1 2 3 4 , ,1 1 2 3 4

ZSE30A(F)/ISE30A

A2 Bracket B (Option unit part no.: ZS-38-A2) 42.5 (A) A3 Bracket C (Option unit part no.: ZS-38-A3) Bracket configuration allows mounting in four orientations. 30 1.6 25 20 20 45 30 5.2 5.5 5.2 9.1 13.6 A B 41.4 16.4 Bracket B B 7.5 7.2 53 28 Bracket C 20 When using the bracket B or C, install it by taking the dimensions of the piping part into consideration. 38 2-Color Display High-Precision

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Description Material Note 1 Body A PBT 2 Elbow body PBT 3 Body B Stainless steel 4 Knob POM 5 Needle PBT 6 Needle guide Stainless steel 7 U-seal HNBR 8 O-ring NBR 9 O-ring NBR 10 O-ring NBR 11 Cassette 12 Seal NBR 13 Spacer PBT 3.2 and 1/8" only 14 Bonnet A POM 15 Bonnet B POM 16 Gear POM 17 Indicator gear POM 18 Clip Stainless steel 19 Gasket NBR/Stainless steel 20 Seal NBR 691 AS-FSG Series

Stopper Cylinder Adjustable Mounting Height Type Series RSG

U A 38.2 Auto switch mounting positions Auto switch mounting height (mm) D-C7 D-C8 D-H7 D-H7W D-H7F D-H7BAL U D-C7 D-C8 D-C73C D-C80 Auto switch model D-H7W D-H7F D-H7BAL D-H7 D-H7C D-C73C D-C80C D-H7C Bore size (mm) A B A B A B U U 40 22.0 26.0 21.0 25.0 19.5 23.5 35.0 38.0 37.5 50 30.0 18 29.0 17.0 27.5 15.5 40.5 43.5 43.0 26 Series RSDG Auto Switch Internal Circuits Lead wire colors inside

Clean Regulator/Fluororesin Type

ARM 2 2 3 3 3 4 4 5 5 6 6 2 2 2 3 3 4 4 5 5 6 6 1 2 1 2 3 1 2 1 2 1 2 A B C A B A B A B A B 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" SMC SMC SMC ARP P U Panel mount union Union IR-A IR SMC IRV : Basic size : With reducer

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

Series AS-FM/AS-M/ASD-FM

Material 1 2 3 4 5 6 7 8 9 10 NBR Body A U-seal PBT NBR Elbow body U-seal PBT Black POM, Stainless Note 3) Handle Cassette PBT Note 1) Electroless nickel plated NBR Body B Seal Brass Electroless nickel plated NBR Body B O-ring Brass Electroless nickel plated NBR Needle O-ring Brass Electroless nickel plated NBR Seat ring O-ring Brass Electroless nickel plated NBR Needle guide O-ring Brass

125

(R) e r Port 3 (R) Port 2 (A) Port 1 (P) Port 23(P2) (Pilot air port) y i Port 2(A) u r y Port 1(P) t q VEX3320 (Air operated) VEX3420 (Air operated) w e q r y y t w r e u t t 12(P1), 23(P2) Port Port 3(R) y y (Pilot air port) r i Port 2(A) u r Port 1(P) t q Port 1(P) Port 2(A) Port 3(R) Component Parts No.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

rep-modular-e

4 u @8 !5 @7 r Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Modular Pressure Control Equipment F.R.L. Replacement Procedure

4 u @8 !5 @7 r Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

3 Port Solenoid Valve Rubber Seal Series SY100 1

Type S41 How to Order Applicable solenoid valve Note) SY114SY114ASY124SY124AApplicable blanking plate assembly SY100-77-1A SS3Y1 S41 05 M3 Stations A port side 02 M3 M5 M3 x 0.5 M5 x 0.8 2 stations 20 20 stations P R R port M5 x 0.8 P port M5 x 0.8 A port M3 x 0.5 M5 x 0.8 Note) SY114(A) and SY124(A) cannot be mounted on the same manifold.

30

to 63 M Center of sphere M U U D F G P H A R E B Standard type Pneumatic: to 1 MPa (mm) Applicable cylinder bore size Maximum thread depth P Model Nominal size Pitch Allowable eccentricity U Maximum operating tensile and compressive force N Center of sphere R M A B D E F G H Weight kg JC20-8-125 JC30-10-125 JC40-14-150 JC63-18-150 30.5 34 38 47.5 0.03 0.05 0.12 0.23 300 800 1250 3100 13

CQS

auto switch A 45.5 46.5 61 67.5 Without auto switch A 40.5 41.5 51 57.5 Bore size (mm) Stroke range (mm) B 22 22 29.5 32.5 B 17 17 19.5 22.5 CL 39.5 40.5 52 57.5 CL 34.5 35.5 42 47.5 CD hole H10 Rod d9 12 16 20 25 5, 10 Bore size (mm) L + Stroke B + Stroke CL + 2 (Stroke) RR CB CD CT CU CW CX CZ L L1 A + 2 (Stroke) 12 16 20 25 14 15.5 18.5 22.5 6 6 9 10 12 14 20 24 5 5 8 10 4 4 5 5 7 10

CQS

Foot Without auto switch With auto switch Without/with auto switch Long stroke Standard stroke (mm) Standard stroke (mm) Long stroke (mm) Bore (mm) LS B 20 20 29 29 A 32 32 41 44 LS 50.3 50.3 62.7 66.2 B 10 10 17.5 17.5 A 22 22 29.5 32.5 LS 40.3 40.3 51.2 54.7 B 5 5 7.5 7.5 A 17 17 19.5 22.5 12 16 20 25 35.3 35.3 41.2 44.7 35 to 100 35 to 100 75 to 200 75 to 300 5 to 30 5 to 30 5 to 50 5

Cylinder with Lock

0.6 55 50 70 15 76 96 13.5 20 19 11 353.5 393.5 Rotating Angle Bore size [mm] A B A + B + 90 32, 40 25 45 160 50, 63 40 60 190 80, 100 30 55 175 32 C96N Series Construction (Double Rod) @0!

MK

x 135l M8 x 105l M8 x 135l 50 100 200 66 120 DMK2B20-10 MK2B20-20 MK2B25-10 MK2B25-20 MK2B32-10 MK2B32-20 MK2B40-10 MK2B40-20 MK2B50-20 MK2B50-50 MK2B63-20 MK2B63-50 Cylinder speed (mm/s) 8.5 To attach and detach the arm to and from the piston rod, fix the arm with a wrench or vise and then tighten the bolt.

Air Fittings & Tubing

53 34.5 22 MS Note1) D1: max. diameter SKQ12, #18 to #25 Tl 2.1-20 Series KQ2 Extended male elbow: KQ2W A (1) (2) Tube O.D.

VCA

D U 25 Approx. 44 R C C R G1/2 E E G1/2 B B 2-P Port size A A D 2-P Port size (S) Port size G1/2 Compatible heavy duty cord Cable O.D. 6.8 to 10 L L K 2-M Thread depth 6 K 2-M Thread depth 6 (mm) Electrical entry P Port size B C Model A D E F K L M Grommet: G Conduit: C DIN connector: D Conduit terminal: T U 81 91.5 101 103.5 Q 98 101 104 104 R 36 44 53 55.5 S 68 71 74 74 Q 46 50 52 52 R

MK

Symbol A 11.5 12 B 4.5 4 W 19.5 21.5 W 5.5 6 A 11.5 12 B 4.5 4 A 7.5 8 B 0 0 Hs 17 19 W 1.5(4) 2(4.5) A 7.5 8 B 0 0 12 16 Bore size (mm) D-F9BAL Model Symbol Bore size (mm) A 10.5 11 B 3.5 3 W 14.5 15 Hs 17 19 12 16 4.1-13 Rotary Clamp Cylinder/Heavy Duty Series MK2 20, 25, 32, 40, 50, 63 How to Order MK2 B S A73 20 10 R F Number of auto switches Rotary clamp cylinder S 2 1 Mounting Style