MQQ

Dd9 L d l m t 0.030 0.040 0.040 0.076 0.040 0.076 0.040 0.076 IY-J015 IY-G02 IY-G03 IY-G04 10 5 16.6 4.8 12.2 1.5 0.7 Type C 5 for axis 16 8 Type C 8 for axis 21 7.6 16.2 1.5 0.9 20 10 25.6 9.6 20.2 1.55 1.15 Type C 10 for axis 10 25, 28 41.6 9.6 36.2 1.55 1.15 Type C 10 for axis 10-5-16 16 Low Friction Cylinder: Anti-lateral Load Type Metal Seal Series MQM 6, 10, 16, 20, 25 How to Order

MQQ

Dd9 L d l m t 0.030 0.040 0.040 0.076 0.040 0.076 0.040 0.076 IY-J015 IY-G02 IY-G03 IY-G04 10 5 Type C 5 for axis 16.6 4.8 12.2 1.5 0.7 16 8 21 7.6 16.2 1.5 0.9 Type C 8 for axis 20 10 25.6 9.6 20.2 1.55 1.15 Type C 10 for axis 10 25, 28 41.6 9.6 36.2 1.55 1.15 Type C 10 for axis 10-5-16 16 Low Friction Cylinder: Anti-lateral Load Type Metal Seal Series MQM 6, 10, 16, 20, 25 How to Order

CL

C shape 8 for axis C shape 10 for axis C shape 10 for axis NT-02 NT-03 NT-G04 C shape 8 for axis C shape 10 for axis 13 17 19 20 25, 32 40 15.0 19.6 21.9 12.5 16.5 18 M8 X 1.25 M10 X 1.25 M14 X 1.5 5 6 8 IY-G02 0.040 0.076 8 CD-G02 20 21 7.6 16.2 1.5 0.9 0.040 0.076 8 43.4 7.6 38.6 1.5 20 0.9 IY-G03 0.040 0.076 10 CD-G25 0.040 0.076 10 25, 32 25.6 1.55 1.15 9.6 20.2 48 1.55 1.15 9.6 42.6

Industrial Filters

Nil S L Stainless steel 304 G46-10-02-SRB (Stainless steel at wetted parts) None (with plug) FGF Please use the applicable pressure gauge depending on the fluid used.

Regulator for 2 MPa ARX 20

01 G46 10 02 G36 4 01 G46 4 02 G36 P10 N01 G46 P10 N02 G36 P4 N01 G46 P4 N02 1348110A B Regulating pressure range Bracket 0.05 to 0.85MPa 0.05 to 0.30MPa 0 1 ARX20 Nil F ARX21 Nil F Thread type G Pressure gauge Rc NPT G Nil N F ARX20N ARX21N P Port size Panel nut 1/8 1/4 01 02 Option combination numbers Panel nut is also included with B.

ZX

-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Vacuum switch unit E C ZX1 1 10 Ejector unit Filter unit F ZX1 1 10 Ejector unit PV/V port size Ejector unit nozzle dia.

CNG

IY-G02 IY-G03 IY-G04 Type C 8 for axis Type C 10 for axis Type C 10 for axis NT-02 NT-03 NT-G04 CD-G02 CD-G25 CD-G03 CD-G04 0.040 0.076 8 Type C 8 for axis Type C 10 for axis Type C 12 for axis Type C 14 for axis 0.9 1.5 20 25, 32 40 21 7.6 9.6 9.6 16.2 13 17 19 20 25, 32 40 (15) 12.5 16.5 18 M8 x 1.25 5 6 8 0.040 0.076 8 0.9 1.5 38.6 7.6 20 25 32 40 43.4 0.040 0.076 10 0.040 0.076 10 1.15

MQQ

Dd9 L d l m t -0.030 -0.040 IY-J015 1.5 C type 5 for shaft 10 5 12.2 0.7 16.6 4.8 -0.040 -0.076 IY-G02 1.5 C type 8 for shaft 16 8 16.2 0.9 21 7.6 -0.040 -0.076 IY-G03 1.55 C type 10 for shaft 20 10 20.2 1.15 25.6 9.6 -0.040 -0.076 IY-G04 1.55 C type 10 for shaft 25, 28 10 36.2 1.15 41.6 9.6 9 10 Lateral Load Resisting Compact Low Friction Cylinder Series MQM 6, 10, 16, 20, 25 Metal Seal

0.01

to 60 (No freezing) Dustproof and jetproof (Equivalent to IP65) Environment with no corrosive or explosive gas 0.2 or less Free 30/150 or less 24/12 VDC, 100/110/200/220 VAC (50/60 Hz) 10% rated voltage B type VCA2: 6.5 W Valve type Fluid Withstand pressure MPa Body material Seal material Ambient temperature C Fluid temperature C Enclosure Atmosphere Valve leakage cm3/min (ANR) Mounting

HRX-OM-M090

9.6.3 HRS012--10-T, HRS018--10-T, HRS012--10-MT, HRS018-10-MT 0.8 80 0.7 70 Circulating fluid pressure [MPa] 0.6 60 0.5 Pump head [m] Available area 50 0.4 Outlet60Hz 40 0.3 30 Outlet50Hz 0.2 20 Return port 0.1 10 Available area 0.0 0 0 5 10 15 20 25 5 Circulating fluid flow [L/min] Fig 9.6-3 Pump capacity(HRS012--10-T, HRS018--10-T, HRS012--10-MT, HRS018--10-MT) 9.6.4 HRS012--20-T, HRS018

CL

Part no. l Applicable snap ring t m 16.2 20.2 36.2 1.5 1.55 1.55 0.9 1.15 1.15 Type C 8 for axis Type C 10 for axis Type C 10 for axis IY-G02 IY-G03 IY-G04 CD-G02 CD-G25 CD-G03 CD-G04 Type C 8 for axis Type C 10 for axis Type C 12 for axis Type C 14 for axis 38.6 42.6 54 65 1.5 1.55 1.55 2.05 0.9 1.15 1.15 1.15 9-2-34 33 Lock-up Cylinder Double Acting, Single Rod Series CL1 40, 50, 63, 80

HRX-OM-Y098

2 to 45 Circulating fluid1 CH1 : Clear water,DI water (pure water)9 / CH2 : Clear water,DI water (pure water) Set temperature range C CH1 : 5 to 35 / CH2 : 10 to 40 Cooling capacity2 kW 9 1 8 19 1 8 26 1 8 Heating capacity3 kW 1.5 1 4.5 1 6.5 1 Temperature stability 4 C CH1 0.1 CH2 0.5 Rated flow rate (Outlet) L/min 45 10 45 10 125 10 (0.43MPa) (0.45MPa) (0.45MPa) (0.45MPa) (0.45MPa) (0.45MPa

HRX-OM-W060

temperature C 2 to 45 Circulating fluid CH1 : Clear water / CH2 : Clear water,DI water (pure water) 1 Set temperature range C CH1 : 15 to 25 / CH2 : 20 to 40 Cooling capacity2 kW 9 1 8 19 1 8 26 1 8 Heating capacity3 kW 1.5 1 4.5 1 6.5 1 Temperature stability 4 C CH1 0.1 CH2 0.5 Rated flow rate (Outlet) L/min 45 10 45 10 125 10 (0.43MPa) (0.45MPa) (0.45MPa) (0.45MPa) (0.45MPa) (0.45MPa

CNG

NT-02 NT-03 NT-G04 (15) (19.6) (21.9) M8 x 1.25 M10 x 1.25 M14 x 1.5 12.5 16.5 18 13 17 19 20 25, 32 40 5 6 8 20 C type 8 for shaft C type 8 for shaft IY-G02 0.040 0.076 8 16.2 21 7.6 0.9 1.5 20 CD-G02 0.040 0.076 8 38.6 1.5 43.4 7.6 0.9 C type 10 for shaft C type 10 for shaft IY-G03 20.2 25.6 9.6 1.15 0.040 0.076 10 1.55 25, 32 0.040 0.076 10 CD-G25 42.6 1.55 48 9.6 1.15 25 C type 10 for

Air-hydro Unit

Bore size (mm) Bore size (mm) AS2000-01/02 AS600-10 Piping bore Piping bore Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) No load No load No load No load Load ratio Load ratio Bore size (mm) Bore size (mm) AS4000-02/03/04 AS3000-02/03 Piping bore Piping bore Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) Circuit diagram No load No load No load No load Load ratio

CC

Conditions: Operating pressure 0.5MPa, Operating oil Turbine oil Class 1 (ISO VG32), Piping length 1m AS420-02, 03, 04 AS500-06 AS2000-01, 02 AS600-10 AS3000-02, 03 AS4000-02, 03, 04 Circuit 4.12-12

HRX-OM-R016

HRS012/018--10-T/MT HRS012/018/024/030--20-T HRS012/018/024/030--20-MTNote 1) Applicable model Rated flow50/60Hz Note 2) 3) 7(0.36MPa)/10(0.42MPa) 10(0.44MPa)/14(0.40MPa) 10(0.32MPa/)/14(0.32MPa) Pump 18/22 Maximum flow rate (50/60 Hz) L/min Maximum pump head (50/60 Hz) m 55 70 60 Output W 320 550 Circuit protector 15A (10 A for standard) A 15 Recommended earth leakage breaker capacity 15

CL

Part no. l Applicable snap ring t m 16.2 20.2 36.2 1.5 1.55 1.55 0.9 1.15 1.15 Type C 8 for axis Type C 10 for axis Type C 10 for axis IY-G02 IY-G03 IY-G04 CD-G02 CD-G25 CD-G03 CD-G04 Type C 8 for axis Type C 10 for axis Type C 12 for axis Type C 14 for axis 38.6 42.6 54 65 1.5 1.55 1.55 2.05 0.9 1.15 1.15 1.15 9-2-34 33 Lock-up Cylinder Double Acting, Single Rod Series CL1 40, 50, 63, 80

Compressed Air Preparation Filter

AD27-D AM54P-m120AS-C AM64P-m120AS-C With bowl guard AD27-C-D AD37m-D AD47m-D Normally open (N.O.)

Cylinder with Lock Series CNG

NT-02 NT-03 NT-G04 (15) (19.6) (21.9) M8 x 1.25 M10 x 1.25 M14 x 1.5 12.5 16.5 18 13 17 19 20 25, 32 40 5 6 8 20 C type 8 for shaft C type 8 for shaft IY-G02 0.040 0.076 8 16.2 21 7.6 0.9 1.5 20 CD-G02 0.040 0.076 8 38.6 1.5 43.4 7.6 0.9 C type 10 for shaft C type 10 for shaft IY-G03 20.2 25.6 9.6 1.15 0.040 0.076 10 1.55 25, 32 0.040 0.076 10 CD-G25 42.6 1.55 48 9.6 1.15 25 C type 10 for