4-channel Flow Monitor ( compatible)

For precise flow detection, allow the product to warm up for 10 to 15 minutes. Check if the product satisfies the specified accuracy 10 minutes after supplying power. Warming up inadequate Product failure Replace the product. -94No.PF-OMA1011-A Problem No.

ZQ-OM01401

0 0 0 5 10 15 20 25 0.2 0.3 0.4 0.5 [MPa] [L/min (AMR) ] Pmax Qmax 10 Pmax 2 (P1 Q1 ) 3 Qmax 0 37 - No.ZQ-OM01401-B 11.2 () ZQ000A 11.3 -100 -80 [kPa] -60 -40 -20 0 (V 6 ) 0 5 10 15 20 [L/min (AMR) ] ZQA (PD)() ZQ000A (PD) 100 80 [L/min(ANR)] 70 [L/min(ANR)] 0.5MPa 0.5MPa 80 60 0.4MPa 50 0.35MPa 0.3MPa 60 0.3MPa 40 40 30 20 20 10 0 0 0 1 2 3 4 5 0 1 2 3 4 5 [] [] ZQA (PD)()

IDX-OM-W023

(Ex.) 1. 2. 3. 4. 14-2 IDU8E/11E/15E1-23-V IDF-S0198 1.6MPa AC230V10% (50Hz) ON 0.5sec OFF 30 IDU Series 141 IDX-OM-W023 14 V 14-3 1) 2) 3) 4) ON OFF 4 6 2 3 8 4 2 1 10 0.5 5 0.5 ON:SEC OFF:MIN 14-4 1-1 IDU Series 142 IDX-OM-W023 15 15 15-1 / IDU Series 15-1 A2020/1 B2021/5 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Tel: +81 3 5207

Ionizer Nozzle type IZN10 Series IZS

Maintenance detection signal ON OFF Output Requirement for maintenance detected ON OFF Input External switch signal 1, 2 455 IZN10 Series Dimensions 06 07 06 07 Energy saving static neutralization nozzle/IZN10-01 High flow rate nozzle/IZN10-02 20 Note 1) (110) 16 100 5 5 46 A 3.4 18.5 11 6 5 6 A 8 7 (Tap for ground wiring) M3 x 0.5 depth 4 40 25 12 A 93.6 A-A (mm) A Model 01 02 01 02 IZN1006

ARJ310

ARJF310F-01 y e !

ARJ1020F

ARJF310F-01 y e !

Miniature Regulator Series ARJ310

ARJF310F-01 y e !

PF-OMN0011_C

) ZS-26-01 1 (ZS-26-B) 190 2,1/41/2 72 2, , -15No.PF-OMN0011CN-C , 1 DC() 2 N.C.

lPSMt

3-15 osi A used ptugged 1i2 Snlit t) 3-15 nsi rl plugged USEQ 1/2 Solil B Reverse _z 3-15 osi USEd plugged 1/2 Solil B 3-15 osi A plugged useo 1/2 Snlit D Fig. TO OPERATION SIGNAL RANGE INSTALLATION STYLE (REF.

lPSMt

3-15 osi A used ptugged 1i2 Snlit t) 3-15 nsi rl plugged USEQ 1/2 Solil B Reverse _z 3-15 osi USEd plugged 1/2 Solil B 3-15 osi A plugged useo 1/2 Snlit D Fig. TO OPERATION SIGNAL RANGE INSTALLATION STYLE (REF.

VSA4

VSA4120-02 VSA4120-03 VSA4220-01 VSA4220-02 VSA4220-03 VSA4320-01 VSA4320-02 VSA4320-03 VSA4420-01 VSA4420-02 VSA4420-03 2 position single VA 1 4 1 8 Rc 0.60 1 8 Rc 1 8 Rc SA 2 position double 1 4 1 8 Rc 0.70 1 8 Rc VA 1 8 Rc 3 position closed center 1 4 1 8 Rc 0.86 VM 1 8 Rc Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200

PSxx-OMS0006CN

N01 C4H C6H N7H C4L C6L N7L M50.8 R1/8 NPT1/8 4 mm 6 mm 1/4 5/32 inch inch 4 mm 6 mm 1/4 5/32 inch inch () PBTCB156PPSO HNBR C3604( ) POMSUS304NBRC3604 SUS304NBR 22 g 32 g 34 g 25 g 26 g 27 g 28 g 28 g 34 g 35 g 2(AWG26) 0.15 mm 1.0 mm (3 ) 3.4 -63No.PS-OMS0006CN-G M5 7 3.5 01/N01 A 01 R1/8 10 N01 NPT1/8 12 C4HC6HN7H 2.5 A B C4H 15.6 8 C6H 16.5 10 N7H 16 10.3 C4LC6LN7L

JXCx-OMT0028CN

JXC-OMT0028CN (GW)(EtherNet/IP) / LEC-GEN1 . 4 2. . 6 2.1 . 6 2.2 . 6 2.3 . 7 2.4 () . 8 (1) . 8 (2)GW . 8 (3)LEC . 8 (4)GW . 8 (5)GW . 8 (6) . 9 (7) . 9 3 . 10 3.1 . 10 3.2 . 12 3.3 . 13 (1)(LECGEN1) . 13 (2)DIN (LECGEN1D) . 13 3.4 . 14 (1) . 14 (2) . 14 4. . 15 4.1GW (B RATE) . 15 4.2 (CN2SW) . 16 4.3LEC . 16 4.4GW EtherNet/IP . 22 5. . 26 5.1 CN4 . 26 5.2 CN3 . 26 5.3

Speed Controller: Standard Type Series AS In-line Type 1

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. 15-9-28 2 Speed Controller: Standard Type In-line Type Series AS Needle Valve/Flow Characteristics Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Effective area (mm2) Effective

Lubrication Equipment

A B 63 63 80 85 90 100 C Port size Rc(PT) INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 Model No. 1/4 15 15 15 20 22 22 141 164.5 170 180 230 251 3/8 1/4 , 3/8 , 1/2 3/4 B C D E F Port size Rc(PT) 3/4 , 1 1 Model No. A 1 2 150 165 42.7 76.3 45 65 40 60 35 40 80 80 ALBA90-10 ALBA90-20 1.17-24

Air Pilot Operated

,|e 4 = \bh unit only (N\6A31 14 only; see page 7) 5 = Foot mounting;pipe tap in body hing 0O = Manilold mounting (NVSA 3114) 01 = 1/8" NPrF 0 SA 31 15, 3125) 02 = 1/4" NPTF (N\6A 3t 15, 3t25) 03 = 3/8" NPTF N\ISA 3135) (X = 1/2" NPTF (N\^sA 31 35, 31 45) 06 = 3/,1" NPTF (N!6A 3145) DIBECTIOI{ALAIBVALYE DIMENSIONS/PARTS LIST SERIES NVSA 3115 NVSA 3115 oPttot{a!l frg. lasE axl 338.

Air Pilot Operated Series NVSA

,|e 4 = \bh unit only (N\6A31 14 only; see page 7) 5 = Foot mounting;pipe tap in body hing 0O = Manilold mounting (NVSA 3114) 01 = 1/8" NPrF 0 SA 31 15, 3125) 02 = 1/4" NPTF (N\6A 3t 15, 3t25) 03 = 3/8" NPTF N\ISA 3135) (X = 1/2" NPTF (N\^sA 31 35, 31 45) 06 = 3/,1" NPTF (N!6A 3145) DIBECTIOI{ALAIBVALYE DIMENSIONS/PARTS LIST SERIES NVSA 3115 NVSA 3115 oPttot{a!l frg. lasE axl 338.

Quick Exhaust Valve Series AQ

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. 15-12-1 2 Series AQ Construction AQ1500/1510 AQ2000/3000/5000 Component Parts Material/Model No.

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

Connection Female Thread: G Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 45 3 to 4 1/4 15 to 30 4 to 5 3/8 15 to 30 8 to 9 1/2 15 to 30 14 to 15 Winding direction Sealant tape Expose approx. 1 thread 2. The gasket can be reused up to 6 to 10 times.

Ionizer Gun

Ionizer IZG10 08 01 01 Ionizer Gun One-touch fitting Nozzle type Symbol Applicable tube O.D.