HRX-OM-R005

9.3.1 HRS060-A-20-(BJM) . 9-5 9.3.2 HRS060-W-20-(BJM) . 9-6 9.4 Cooling capacity . 9-7 9.4.1 HRS060--20-(BJM) . 9-7 9.5 Heating capacity . 9-7 9.5.1 HRS060-A-20-(BJM) . 9-7 9.5.2 HRS060-W-20-(BJM) . 9-7 9.6 Pump capacity. 9-8 9.6.1 HRS060--20-(BJM) . 9-8 9.7 Required facility water flow (For water-cooled type) . 9-8 9.8 Compliance . 9-9 HRS Series HRX-OM-R005 Contents 9.9 Sample DoC. . 9-

SYJA300

M5 x 0.8 SYJA514-01 0.32 0.46 1.1 0.32 0.41 1.2 64 (Without subplate 34) N.C. Base mounted (with sub-plate) 1/8 0.34 0.48 1.2 0.33 0.37 1.3 N.O. SYJA524-01 SYJA712-01 SYJA722-01 SYJA714-01 SYJA714-02 0.76 0.69 0.69 0.66 0.63 0.64 0.51 0.42 0.34 0.33 0.45 0.48 2.5 2.4 2.7 2.6 2.3 2.3 0.77 0.72 0.71 0.74 0.70 0.68 0.43 0.38 0.32 0.31 0.21 0.31 2.8 2.7 2.9 3.0 2.8 2.7 N.C.

Microspeed Cylinder

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" 38 (1.33) 7 (0.25) Flow rate l/min (ANR) (CFM) 12 (0.42) Controlled flow 0.6 (0.03) 0.2 (0.01) 0.1 (0.006) Effective area

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted

32 50 50 7 60 120 96 118 1 2, 3 4 82 68 88 92 1 181 53 12 81 70 35 36 66 52 9 66 140 96 133 DC C Model VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 A B Port size Rc 1 4, 3 8, 1 2 163 64 50.8 196 68 60.5 1 2, 3 4 4-16-7

Series 10-, 21- AW-B Filter Regulator

Fittings & Tubing Air Cylinders Rotary Actuators Nil 1 Note 6) Set pressure c 0.05 to 0.85 MPa setting 0.02 to 0.2 MPa setting + Polycarbonate bowl Metal bowl Nylon bowl Metal bowl with level gauge With bowl guard Nylon bowl with bowl guard + Nil 2 6 8 C 6C Bowl d Semi-standard J Drain port Note 7) Drain guide 1/8 Drain guide 1/4 + Nil N Exhaust mechanism e Relieving type Non-relieving type

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

Valve model Port size VCS21 VCS20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCS30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCS31 VCS30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCS40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCS30-12-04 VCS41 1/2 48 56 36 44 23 23 6 5.5 7 23 VCS40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCS Direct Operated

ISG

CEP: 09950-350, Brasil TEL: 11-4051-1177 FAX: 11-4071-6636 GREECE (Distributor) S.Parianopoulos S.A. 7, Konstantinoupoleos Street 11855 Athens, Greece TEL: 01-3426076 FAX: 01-3455578 DENMARK SMC Pneumatik A/S Knudsminde 4 B DK-8300 Odder, Denmark TEL: 70252900 FAX: 70252901 COLOMBIA (Distributor) Airmatic Ltda. Calle 18 69-05 Apart.

155

Compatible cable Cord O.D.: 4.5 to 7 (Reference) 0.5 to 1.5 mm2, 2-core or 3-core, equivalent to JIS C 3306 Applicable crimped terminals O-terminals: Equivalent to R1.25-3 defined in the JIS C2805 Y-terminals: Equivalent to 1.25-3 manufactured by J.S.T. Mfg. Co., Ltd.

1

: A9 Symbol: A10 Symbol: A11 WA C C0.5 file chamfer C76 AL B MM R sphere TP R sphere C85 DC 30 C95 H W1 T H H H Symbol: A12 Symbol: A13 Symbol: A14 Symbol: A15 CP95 C AL MM C DA DA DA DA C0.5 R sphere 30 30 30 NCM NCA A A A H H C H T W1 H D-X 20Data 6-17-7 7 Simple Specials: -XA0 to XA30: Change of Rod End Shape These changes are dealt with Simple Specials System.

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

Valve model Port size VCL2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCL4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCL Direct Operated

Clean Room Rodless Cylinder Series CYP ø15, ø32

-ASD330F-01-08 10-ASD230F-M5-06 2.

5

Smooth Smooth Low Speed MQ RHC Operating Range RZQ (mm) Auto switch model Bore size 32 40 50 63 80 100 D-M9l(V) D-M9lW(V) D-M9lA(V) 5 5 6 6.5 7 7.5 D-A9l(V) 9 9.5 9.5 11 10.5 10.5 D-A7l(H)(C) D-A80l(H)(C) 10.5 11.5 11 13 11.5 11.5 D-A79W 14 15.5 14.5 17 15 15.5 D-F7l(V) D-J79(C) D-F7lW(V) D-F7NT D-F79F 5 5 5 6 7 8 D-P3DWA 6 6 7 7.5 7.5 7.5 * Values which include hysteresis are for guideline

Swivels

A B C D Dia.

HRX-OM-X010

7 System Maintenance . 7-1 7.1 Water Quality Management . 7-1 7.2 Inspection and Cleaning . 7-2 7.2.1 Daily inspection . 7-2 7.2.2 Quarterly inspection . 7-3 7.3 Storage . 7-3 7.3.1 Draining of circulating fluid out of tank . 7-4 HRZ Series TOC-3 HRX-OM-X010 Table of Contents 7.3.2 Draining of facility water. 7-5 7.4 Periodic Replacement Parts . 7-6 Chapter 8 Appendix . 8-1 8.1 Specification

20

N) 7 Series VMG Specific Product Precautions 1 Be sure to read this before handling.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Description Material ML1C25G ML1C32G C-7 SO-015-24 SO-016-9 C-4 SO-010-16 C-6 AS568-048 TMY-32 RCS-10 GMY32 ML1C40G C-7 SO-020-31 SO-015-20 C-4 SO-010-16 C-8 C-150 TMY-40 RCS-12 GMY40 O-ring O-ring O-ring Needle gasket O-ring O-ring O-ring Tube gasket Cushion seal Piston seal Scraper Bypass gasket O-ring $6 $7 $8 $9 %0 %1 %2 %3 %4 %5 %6 %7 %8 NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR

ML1

ML1C32G C-7 SO-015-24 SO-016-9 C-4 SO-010-16 C-6 AS568-048 NLP-32A RCS-10 GMY32 ML1C40G C-7 SO-020-31 SO-015-20 C-4 SO-010-16 C-8 C-150 NLP-40A RCS-12 GMY40 NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR C-7 SO-015-22 SO-015-16 8.3 X 4.5 X 1.9 SO-010-16 SO-010-16 C-100 NLP-25-19A RCS-8 GMY25 $6 $7 $8 $9 %0 %1 %2 %3 %4 %5 %6 %7 %8 %9 Hard anodized Hard anodized Hard anodized M1L025

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Description Material ML1C25G ML1C32G C-7 SO-015-24 SO-016-9 C-4 SO-010-16 C-6 AS568-048 TMY-32 RCS-10 GMY32 ML1C40G C-7 SO-020-31 SO-015-20 C-4 SO-010-16 C-8 C-150 TMY-40 RCS-12 GMY40 O-ring O-ring O-ring Needle gasket O-ring O-ring O-ring Tube gasket Cushion seal Piston seal Scraper Bypass gasket O-ring $6 $7 $8 $9 %0 %1 %2 %3 %4 %5 %6 %7 %8 NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR

9.8

Note 4) Not available for piping specifications of M5R, 01 and N01. Note 5) The DIN rail needs to be prepared by the customer.

PF2A/PF2W

MULTI COUNTER:CEU5 UP M/C COUNT PRESET FUNC. LEFT RIGHT DOWN SEL.