90

Pressure sensor assembly With 2 screws and 1 gasket 15 Vacuum Unit Series ZK2 Replacement Parts/How to Order yValve assembly !

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

9..14 0..7 See above See above Channel parameter Channel 16 to 23 15..20 0..7 See above See above Channel parameter Channel 24 to 31 21..26 0..7 See above See above -95No.EX-OMX1011 Configuration format (EX600-DX#B/C) EX600-DX#B/C (4 byte) Byte Bit Parameter Setting value 0..3 Unit No. 0..8 0 4..7 Parameter type 1 1 0..7 Unit ID EX600-DX#B: 01 (Hex) EX600-DX#C: 03 (Hex) Unit parameter

Fieldbus system EtherNet/IP compatible SI Unit

9..14 0..7 Refer to above Refer to above Channel parameter Channel 16 to 23 15..20 0..7 Refer to above Refer to above Channel parameter Channel 24 to 31 21..26 0..7 Refer to above Refer to above -97No.EX-OMZ0024 Configuration format (EX600-DX#B/C) EX600-DX#B/C (4 byte) Byte Bit Parameter Setting value 0..3 Unit No. 0..8 0 4..7 Parameter type 1 1 0..7 Unit ID EX600-DX#B: 01 (Hex) EX600-

Vacuum Ejector Series ZM

SP Nil 6 10 15 20 25 30 300 mm 600 mm ZCUK 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm AMJ AMV How to Order AEP ZM Nozzle diameter Body style Standard supply pressure HEP Related 0.35 MPa (Double diffuser) (Except nozzles diameter 05,, and 15,, type) 0.45 MPa (Single diffuser) (Nozzle diameter 13,, and 15,, only) 0.5 MPa (Double diffuser) (Except nozzles diameter 15,, type) Equipment

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

L n L: Dimensions n: Stations 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 L2 L3 L4 173 185.5 185.5 198 210.5 223 235.5 248 248 260.5 273 285.5 298 298 310.5 162.5 175 175 187.5 200 212.5 225 237.5 237.5 250 262.5 275 287.5 287.5 300 140.9 150.9 160.9 170.9 180.9 190.9 200.9 210.9 220.9 230.9 240.9 250.9 260.9 260.9 280.9 16 17.5 12.5 13.5 15 16 17.5 18.5 13.5 15 16 17.5 18.5 18.5 15 47 Series

SMC Wireless System PROFINET compatible

(EX600-WPN#) Information TAG Max. 15 letters Available Product No.

SMC Wireless System EtherNet/IP ® compatible

(EX600-WEN#) Information TAG Max. 15 letters Available Product No.

Ionizer

Static Neutralization Characteristics 1) Installation distance and discharge time (Discharge time from 1000 V to 100 V) High speed static neutralization cartridge Air purge: Yes Supply pressure: 0.02 MPa (1 L/min (ANR) per nozzle) Air purge: No 30 45 25 40 60 Hz 35 1 Hz Discharge time (s) Discharge time (s) 1 Hz 20 30 15 Hz 5 Hz 25 15 20 Sensing DC 10 15 Sensing DC 1 Hz/60 Hz 60 Hz 30 Hz

VXA21/22

LVQ 1 (1.5 mm) 2 (2.2 mm) 3 (3 mm) 4 (4 mm) VXA31 VXA32 LQ 01 ( ) 1 8 02 ( ) 1 4 02 ( ) 1 4 03 ( ) 3 8 LVN TI/ TIL Ordering example (Example) Series VXA31, Orifice size 1.5 mm, Rc 1/8 (Part no.) VXA3114-01 PA PAX PB 17-3-103 8 The VX series will be revised shortly.

-fl Seies

Terminal:2 position double/NVFB2210-OT 3 position closed center/WFR231 0-OT 3 position exhaust center/NVFR2410-OT 3 position pressure center/NVFB2s1o-OT o Series NVFRzO00:Base Mounted Tlpe M ani fo l.d P lug in T g pe / Non P lug in T U pe / D ime ns io rc inch (mm) Plug-in type (connector plug with lead wirc):NW5FR2-01@t@ Bottom podng Nl/vsFR2-01-@;r'3-)2.@ with indicatq xait 0 A5l2t.5)

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Terminal:2 position double/NVFB2210-OT 3 position closed center/WFR231 0-OT 3 position exhaust center/NVFR2410-OT 3 position pressure center/NVFB2s1o-OT o Series NVFRzO00:Base Mounted Tlpe M ani fo l.d P lug in T g pe / Non P lug in T U pe / D ime ns io rc inch (mm) Plug-in type (connector plug with lead wirc):NW5FR2-01@t@ Bottom podng Nl/vsFR2-01-@;r'3-)2.@ with indicatq xait 0 A5l2t.5)

With Factory Installed

( 01, -02 and -03 after model no. means port size{01 1/8,02' 114,03 3/8,04 1/2} 5 Filter I Regulator Series AW e How to Order AW 01 Filte~ Regulator '-Optional specifications 0.02~0.2MPa 1 (0.2 ~ 2.0kgf/cm2) setting Accessory (optional) 20 1/8 Type of thread Body size _-1 2 Metal bowl 6 Nylon bowl Description Applicable model Symbol 8 Metal bowl with level gauge ~ ~ ~ ( pn 0 (Only AW3001

AS-FPQ/AS-FPG

Metric sizes Type 04 06 08 10 12 4 6 8 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 01 02 03 04 M5 x 0.8 1/8 1/4 3/8 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06 15

VZM400

-01-06 VZM550-01-06S Toggle lever VZM550-01-08 PAT.

Digital Pressure Switch

For detecting fine pressures, warm up the product for 10 to 15 minutes. Check if the product satisfies the specified accuracy after 10 minutes warm up time.

Speed Controller with Residual Pressure Release Valve: Standard Type Series AS



E In-line Type (Metal Body) 1

1 15-9-41 3 Dimensions AS2000E/3000E 2-port size L7 Max. Min. L1 D L2 L3 L4 L5 L6 L8 Model Port size AS2000E-01 4.5 16 57 61.5 15.5 10 17 30 5 40 1/8 AS2000E-02 4.5 20 59 63.5 17 12 23 30 5 40 1/4 AS3000E-02, 03 5.5 26 69 76 20.6 13.25 25 45.5 5.25 56 1/4, 3/8 AS4000E 2-1/4 to 1/2 72 (Max. 80) Effective thread depth 6 15-9-42

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Auto switches are not mounted, but rather packaged together with the cylinder for shipment. 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 12, 16 20 25 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 32, 40 Manufacturing intermediate strokes Intermediate strokes can be manufactured in 1mm increments by installing spacers in a standard stroke cylinder.

Plug-in Unit

A (+) () () (+) 15 15 Station 8 Station 8 SOL. B SOL. B (+) () () (+) 16 16 Hirose Electric CO., Ltd. Sumitomo/3-M Limited Fujitsu, Ltd. Japan Aviation Electronics Industry, Ltd. J.S.T. Mfg. Co., Ltd. Oki Electric Cable Co., Ltd. SOL. A SOL. A (+) () () (+) 17 17 Station 9 Station 9 SOL. B SOL. B (+) () () (+) 18 18 SOL. A (+) () 19 COM (+) () 19 Station 10 SOL.

HRX-OM-K003

1.7.1 Circulating fluid disposal. 1-15 1.7.2 System disposal . 1-15 1.8 Material Safety Data Sheet (MSDS) . 1-15 Chapter 2 Name of Each Section . 2-1 2.1 Name of Each Section . 2-1 Chapter 3 Transporting and Installation . 3-1 3.1 Transporting . 3-1 3.1.1 Transporting with forklift . 3-2 3.1.2 Transporting with caster . 3-3 3.2 Installation . 3-3 3.2.1 Installation conditions . 3-4 3.2.2

CG1

to 49st 50st or more 10st or more 15 to 49st 50st or more 10st or more 15 to 59st 60st or more 10st or more 15 to 59st 60st or more 10st or more 10st or more 15 to 64st 20 to 64st 65st or more 65st or more 10st or more 10st or more 15 to 64st 20 to 64st 65st or more 65st or more D-B5, B6, G5, K5 10st or more 15 to 74st 75st or more 10st or more 15 to 74st D-G5W, K59W, G5BA 75st or more D-G59F