SMC Corporation of America
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VFS Manifold Specifications VS SS5Y5-60 SY560 SS5Y3-60 SY360 Model SS5Y7-60 SY760 Applicable valve VS7 Manifold type Stacking DIN rail mounted type P (SUP)/R (EXH) type Common SUP/Common EXH VQ7 Valve stations 2 to 20 stations Note 1) Ports A, B location Valve C10 (10 One-touch fitting) C8 (8 One-touch fitting) C12 (12 One-touch fitting) Ports P, R 1/8 C4 (4 One-touch fitting) C6 (6 One-touch

SY3000 SY30M-60-1A SY5000 SY50M-60-1A SY7000 SY70M-60-1A Intermediate stop Drop prevention Applicable valve SY 3 5 7400 1 SY 3 5 7 1 2 00 1 With Residual Pressure Release Valve EXH. 2(B) 4(A) 3(EB) 1(P) 5(EA) Circuit diagram (Intermediate stop: When 3-position exhaust center valve is mounted) Vacuum Release Valve with Restrictor Double check spacer assembly with residual pressure release

Load A Displacement CRB2 MSQB70 MSQB100 CRBU2 80 80 70 70 CRB1 Displacement m Displacement m 60 60 50 50 MSU 40 40 CRJ 30 30 20 20 CRA1 10 10 CRQ2 18 16 14 12 8 6 4 10 2 0 8 6 4 12 10 2 0 Load Nm Load Nm MSQ MSQB200 MSZ 90 80 CRQ2X MSQX Displacement m 70 60 MRQ 50 40 30 20 10 30 25 20 15 10 5 0 Load Nm Rotation Accuracy: Displacement Values at 180 (Reference values) Rotating amount of table

5 Port Solenoid Valve Connector Type Manifold Metal Seal / Rubber Seal IP67 enclosure compatible [Option] Power saving Power saving RoHS compliant Standard: 0.4 W Standard: 0.4 W (Reduced by 60% compared to existing model) (Reduced by 60% compared to existing model) High-pressure (1 MPa, Metal seal): 0.95 W High-pressure (1 MPa, Metal seal): 0.95 W Series VQC1000/2000 CAT.ES11-101A Connector

Static Neutralization Characteristics 1) Installation distance and discharge time (Discharge time from 1000 V to 100 V) High speed static neutralization cartridge Air purge: Yes Supply pressure: 0.02 MPa (1 L/min (ANR) per nozzle) Air purge: No 30 45 25 40 60 Hz 35 1 Hz Discharge time (s) Discharge time (s) 1 Hz 20 30 15 Hz 5 Hz 25 15 20 Sensing DC 10 15 Sensing DC 1 Hz/60 Hz 60 Hz 30 Hz

MSQA3A (High precision type) 50 130 150 40 MSQA30 (High precision type) 20 0 10 20 30 40 50 60 70 18 16 14 12 10 8 6 4 2 0 Load N Load N MSQ7A MSQ50 MSQB50 (Basic type) MSQB7A (Basic type) 100 200 Displacement m Displacement m MSQA7A (High precision type) 80 150 60 120 40 50 MSQA50 (High precision type) 20 24 22 20 18 16 14 12 10 8 6 4 2 0 20 40 60 80 100 120 0 Load N Load N 11-9-9 10 Courtesy

0 6 5 4 3 2 1 0 5 10 15 20 25 30 Load N Load N MSQ20 MSQB2A 300 100 MSQB20 (Basic type) Displacement m Displacement m 250 80 10 20 30 40 190 200 60 MSQA20 (High precision type) 40 0 0 10 20 30 40 50 10 8 6 4 2 Load N Load N MSQ30 MSQB3A MSQB30 (Basic type) 300 100 Displacement m Displacement m 250 90 200 80 50 130 150 MSQA30 (High precision type) 70 60 0 0 10 20 30 40 50 60 70 12 10 8 6

Hz) 4.2 A 10 A 180/200 W 50/60 Hz 220 W 0.01 m (99.9% filtration efficiency) Particles of 0.3 m or more: 3.5 particles/L [ANR] or less Heater operation, PID control Singlephase 200 VAC (50/60 Hz) 2.1 A 5 A Singlephase 230 VAC (50/60 Hz) 2.1 A 5 A Singlephase 100 VAC (50/60 Hz) 9.4 A 15 A Singlephase 200 VAC (50/60 Hz) 4.8 A 10 A Singlephase 230 VAC (50/60 Hz) 4.8 A 10 A Power supply Note

Features 4 Fieldbus System Series EX600 RoHS How to Order S EX600 SI Unit Version Protocol Symbol Description PROFIBUS DP DeviceNet CC-Link EtherNet/IP Note 1) Symbol Description When MJ or EN or EC is selected When PR or DN is selected PR DN MJ EN EC Nil A EtherCAT Note 1) Output type Symbol Description PNP (Negative common) NPN (Positive common) 1 2 DX EX600 Digital Input Unit Input type

Plug-in Common Dimensions Made to Order Manifold Exploded View Light A side: Orange B side: Green Light A side: Orange B side: Green Solenoid a Solenoid a Output circuit Solenoid b Solenoid b Surge voltage 24 V 0 V sol.1: Energized 60 V Changing Connector Entry Direction R Surge voltage Internal circuit 24 V 0 V Caution sol.2: De-energized 60 V R Surge

CAT.ES11-57 J High Capacity & Simple Choices Series SY 5 Port Rubber Seal Solenoid Valve Series SY 9000 newly released CE Marking Compliant Products The SY series complies with the EMC Directive and the Low Energy Directive based on approval by TUV Rheinland, an EC Notified Body (EC authorization No. 0197). " When ordering CE marking compliant products, add " Q" at the end of the standard

. : -20 to 60 C Humidity : 35 to 85%RH(No dew condensation) Setting accuracy 0.2 C at max.

This product Your system Write or read Monitoring 60 sec. time Write or read Monitoring 60 sec. time Passage of 180 sec. Excess at no 60 sec. Broken communicatio wire n monitoring o r time. coming 60 sec. off AL19 Communication error is generated.

This product Your system Broken wire o r coming off AL19 Communication error is generated. 60 sec. Communication error automatic restoration Normal connection 60 sec. Write or read Monitoring time 60 sec. Write or read Monitoring time 60 sec.

Home position return (PLC) 60 8.1 Returning to home position . 60 9. Positioning operation (PLC) 62 9.1 Setting of Operation data . 62 9.2 Movement MOD . 66 10.

This product Your system Write or read Monitoring 60 sec. time Write or read Monitoring 60 sec. time Passage of 180 sec. Excess at no 60 sec. Broken communicatio wire n monitoring o r time. coming 60 sec. off AL19 Communication error is generated.

This product Your system Write or read Monitoring 60 sec. time Write or read Monitoring 60 sec. time Passage of 180 sec. Excess at no 60 sec. Broken communicatio wire n monitoring o r time. coming 60 sec. off AL19 Communication error is generated.

This product Your system Write or read Monitoring 60 sec. time Write or read Monitoring 60 sec. time Passage of 180 sec. Excess at no 60 sec. Broken communicatio wire n monitoring o r time. coming 60 sec. off AL19 Communication error is generated.

) CE (EMC directive: 2014/30/EU) CE (EMC directive: 2004/108/EC) CE (EMC directive: 2014/30/EU) *1: Based on ANSI/ESD-STM3.1-2006 standards AC Adapter (IZF10/10R-CG1, IZF10/10R-CG2) Input voltage 100 to 240 VAC, 50/60 Hz Output voltage 24 VDC Output current 1 A max Ambient temperature 0 to 40C, Stored: 20 to 65C Ambient humidity Operating, Stored: 10 to 90%RH (No condensation) Applicable

Installation Panel fitting 8 Fieldbus System Series EX600 RoHS How to Order S EX600 3 EN SI Unit Protocol Version Symbol Description PR PROFIBUS DP DN DeviceNet MJ CC-Link EN EtherNet/IP Note 1) EC EtherCAT Note 1) PN PROFINET Note 1) Symbol Condition Nil Select in the case of MJ, EN, EC or PN. A Select in the case of PR or DN.