ZR

(Manifold base only) ZR100-K15MZ-EC . 5 pcs. (Unit) ZR1-BM1 . 1 pc. (Blank plate) ZR1-R1-3 . 1 pc.

1

) Since it is normal, the number count is reset EC = 0.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Maximum Allowable Load MY3A, MY3B/m1 MY3A, MY3B/m2 MY3A, MY3B/m3 200 50 40 30 100 100 50 40 20 30 50 40 10 20 30 63 63 5 4 20 10 Load weight kg Load weight kg Load weight kg 63 3 40 10 40 5 4 2 3 25 5 4 1 25 40 2 3 25 0.5 0.4 16 2 1 16 0.3 16 1 0.2 0.5 0.1 0.5 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max. MY3A max. MY3B max.

MY1

Bore size Stroke L TT h h E F EA h EB W F Stroke adjusting unit S (Shock absorber stroke) T MY1W16, 20 F MY1W50, 63 Shock absorber EC EY h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 TT 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) S 40.8 40.8 46.7 67.3 67.3 73.2 73.2 E 14.6 20 24 29 35 40 52 EY 39.5 45.5 53.5 67 83 106 129 EC 5.8 5.8 6.5 8.5 10 14 14 EB 30 32

HRS100/150

Pump Capacity HRS100/150-Am-20/40-m HRS100/150-Wm-20/40-m 0.5 50 Circulating fluid pressure [MPa] HRS Circulating fluid outlet (60 Hz) Usable range (50 Hz) 0.4 40 HRS 090 Pump head [m] 0.3 30 Usable range (60 Hz) HRS 100/150 HRS 100/150 Circulating fluid outlet (50 Hz) 0.2 20 HRSH 090 Circulating fluid return port 0.1 10 HRSH 0 0 0 10 20 30 40 50 60 70 HRSE Circulating fluid flow rate [L

Thermo-chiller

Description Size 1 Valve Rc1/2 2 Valve Rc3/4 3 Y-strainer (#40) (Accessory) Rc3/4 4 Flow meter Prepare a ow meter with an appropriate ow range. 5 Valve (Part of thermo-chiller) Rc1/4 6 Y-strainer (#40) Rc1/2 7 Pressure gauge 0 to 145 psi (0 to 1 MPa) 8 Y-strainer (#40) or lter Rc3/4 Cable Specications Power supply and signal cable should be prepared by user.

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

Bore size Stroke L TT h h E F EA h EB W F Stroke adjusting unit S (Shock absorber stroke) T MY1W16, 20 F MY1W50, 63 Shock absorber EC EY h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 TT 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) S 40.8 40.8 46.7 67.3 67.3 73.2 73.2 E 14.6 20 24 29 35 40 52 EY 39.5 45.5 53.5 67 83 106 129 EB 30 32 38 50 57 66 77 EC 5.8 5.8 6.5

Rotary Actuator

d ng st ir ir in ec d Auto switch Not mountable ti g us ng ti on sc dj ti Refer to page 188 for other specifications.

Pneumatic Purification

675 2 5.32 25.81 2.56 11.02 E1702-EC 26.79 AFW954-N25-EC 954 2 1/2 7.88 27.46 2.56 25.35 E3127-EC 29.16 AFW1300-N30-EC 1300 3 7.88 27.46 2.56 34.17 E3783-EC 33.88 AFW675-AFW1530 AFW1530-N30-EC 1530 3 9.06 37.23 2.56 41.89 E3843-EC 38.81 Filter Performance (ISO8573.1) Particle Size CL.1 Oil Content CL.1 Flow @ 0.7MPa (100 PSI) & 20C Warning: Will not remove carbon monoxide nor carbon dioxide

CL

92 115 128 144 16 20 20 25 30 36 36 40 42 50 59 76 92 100 112 118 27 32 32 37 37 47 47 53 40 50 55 65 80 90 90 90 60 70 86 102 116 145 161 182 32 40 40 52 52 59 59 59 43 43 43 9.0 9.0 11.5 13.5 13.5 19 19 19 112.5 121 133 141.5 150 167 Bore (mm) W/o rod boot W/ rod boot KA N H1 K MM GA FV J W M S M1 P GC GB e 36 45 45 60 60 75 75 75 f 16.5 16.0 16.0 18.0 18.0 40 40 40 h 59 66 66 80 81 133

CM2

20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 0 0 1 6 6 6 7 12 3 3 4 9 0 0 0.5 5.5 5 5 6 11 3.5 3.5 4.5 9.5 1.5 1.5 2.5 7.5 D-B5 D-B6 D-B59W D-G5NTL D-B5 D-B6 D-C7 D-C8 D-C73C D-C80C D-C7/C8 D-H7l D-H7lW D-H7BAL D-H7lF D-C73C D-C80C D-H7C D-B59W D-A3lA D-G39A D-K39A D-A44A D-A3lA D-G39A D-K39A D-H7l D-H7C

CNA

50 MLU 50 40 30 50 40 30 40 ML1C 20 20 [Example] D10 10 5 4 3 5 4 3 -X 202 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 80 500 400 300 500 400 300 63 100 100 80 50 40 80 200 200 63 63 100 100 Load weight: m (kg) Load weight: m (kg) 50 50 50 40 30 50 40 30 40 40 20

CNA

0.5 MPa P 1000 1000 100 80 500 400 300 500 400 300 63 100 100 80 50 40 80 200 200 63 63 100 100 Load weight: m (kg) Load weight: m (kg) 50 50 50 40 30 50 40 30 40 40 20 20 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 9-7-7 8 Cylinder with Lock Double Acting, Single Rod Series CNA 40, 50, 63, 80, 100 How to

MXS

SMXS16A, #3 SMXS16A, #4(#4+#9) SMXS16B, #1 SMXS16B, #2 SMXS16B, #3(#3+#7) (mm) Model F 35 35 35 40 30 55 65 70 ZZ 87 87 87 97 112 162 210 260 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 K 29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68 NN 2 2 2 2 3 4 5 7 H 40 40 40 50 30 35 35 35 KA NA 2 2 2 2 2 4 4 4 G 16 16 16 16 21 26 39 19 HA 40 40 40 50

Table of Contents

AW10 to 40 AW10 to 40 AW30/40 AW20 AW30/40 AW10 to 40 AW10 to 40 AW30/40 AW10 to 40 Symbol 1 2 6 8 C J N R W Z VEX Body size (5) 10 20 30 40 AMR Thread type ITV Metric thread (M5) Rc NPT G Nil (6) N (1) IC F (2) Note 1) Drain guide is NPT 1/4 (applicable to AW30 and 40), and the exhaust port for autodrain comes with 3/8" Onetouch fitting (applicable to AW30 and AW40).

C95

Contents CK95-32 CK95-40 CK95-50 CK95-63 CK95-80 CK95-100 32 40 50 63 80 100 Kits include items 13 to 17 for 32, 12 to 18 for 40 to 100 from the table above.

CQS

X 45 l X 50 l X 55 l M5 X 30l X 35 l X 40 l X 45 l Model C Model C D 50 55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 D 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 Special long bolt for through hole mounting is available as an option.

Table of Contents

or less 30 or less 30 or less 30 or less 30 or less 50 or less 65 or less 30 or less 30 or less 30 or less 30 or less 40 or less 55 or less 40 or less 45 or less 40 or less 40 or less 40 or less ON OFF ON OFF AC Response time (ms) (at the pressure of 0.5 MPa) DC 55 or less 40 or less 45 or less 30 or less 30 or less Note) Based on dynamic performance test, JIS B 8375-1981.

RQ

50, 63 80, 100 15, 20, 25, 30, 40, 50 20, 25, 30, 40, 50, 75, 100 30, 40, 50, 75, 100 40, 50, 75, 100 RQ MU DManufacture of Intermediate Stroke -X Description Part no.

MTS

180 200 20 20 0 40 60 80 100 120 140 160 180 200 Overhang L (mm) Overhang L (mm) Graph (20) Stroke: Up to 150 stroke Graph (16) Stroke: Up to 150 stroke 10 20 10 20 2 3 4 5 2 3 4 5 Weight W (kg) Weight W (kg) 40 40 32 32 1 1 0.5 0.4 0.3 0.2 0.5 0.4 0.3 0.2 25 25 20 20 0.1 0 40 60 80 100 120 140 160 180 200 0.1 0 40 60 80 100 120 140 160 180 200 20 20 Overhang L (mm) Overhang L (mm) Graph