IDX-OM-V022

Option L . 10-1 10.1 SAFETY INSTRUCTIONS FOR USE . 10-1 10.2 SPECIFICATIONS . 10-1 10.3 MOUNT THE HEAVY DUTY AUTO DRAIN . 10-2 10.4 MAINTENANCE . 10-2 Chapter 11 Option R .11-1 11.1 SAFETY INSTRUCTIONS FOR USE . 11-1 11.2 EARTH LEAKAGE BREAKER SPECIFICATION . 11-1 11.3 CONNECTION OF POWER SUPPLY . 11-2 Chapter 12 Option T . 12-1 12.1 SAFETY INSTRUCTIONS FOR USE . 12-1 12.2 OPERATION / ERROR

76

RT -RRD-5M

MHS

10 15 N 1 45 130 204 335 524 g 530 770 1,330 2,300 4,000 1) 0.5MPa MHSH3-32DB MHSH3-40DB MHSH3-50 DB MHSH3-63 DB MHSH3-80 DB mm 5 5 10 10 15 N 6~10 11~15 20~25 29~34 49~59 g 500 740 1,290 2,250 4,000 g 32 40 50 63 80 MHSHJ3-D 430 600 1,020 1,710 3,040 MHSHJ3-DA 550 800 1,380 2,360 4,120 MHSHJ3-DB 520 770 1,340 2,310 4,120 5 3. 3-1. 1 2 3 3-2. 1 .

Mini Rotary Actuator

Specifications 05 1 Size Basic type With external stopper Basic type With external stopper Fluid Air(Non-lube) Maximum operating pressure 0.7 MPa Minimum operating pressure 0.15 MPa Ambient and fluid temperature 060No freezing 8 10 8 10 100 , 90 90,180 100 , 90 90,180 0 0 0 0 Rotation angle 8 10 8 10 190 , 180 190 , 180 0 0 0 0 Angle adjustment range Each rotation end 5 Each rotation end

Air Filter

Structural Drawing, Option and Replacement Parts 10 6. Bowl Assembly Specifications 11-18 7. Assembly of Optional Parts 19 8. Operation and Adjustment 20-21 9. Trouble Shooting 22 10. How to Replace the Components 23-28 10-1. Bowl Assembly Replacement 23-25 10-2. Element Replacement 26-28 11. Disassembly Drawing 29 12.

Serial Network

-00 Fax: 01-64-76-10-10 South America Argentina Phone: 011-4555-5762 Fax: 011-4555-5762 ?

AC Servo Motor Driver (CC-Link Type)

Approx. 5.6k Switch DICOM 24VDC 10% 150mA Approx. 5mA VCES 1.0V ICEO 100 A (2) Digital output interface DO-1 A maximum of 2.6V voltage drop occurs in the driver. If polarity of diode is reversed, servo amplifier will fail. Servo amplifier Driver driver ALM, etc. Load DOCOM (Note) 24VDC 10% 150mA Note.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min 1m = 3.28ft 1l/min = 0.035SCFM Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

MRQ

A80CN 1) Lead wire symbols 0.5m: 3m: L 5m: Z : N 2) This rotary cylinder is not an improved product in water resistant ability.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

Pneumatic Transfer System Series MF

H A G G RG RT RS B 296 305 C R310 R445 D 93 129 E 60 87 F 10 15 G 6 7 B 296 309 C R390 R495 D 93 129 E 60 87 F 10 15 G 6 7 B 299 307 C R350 R440 D 93 129 F 10 15 G 6 7 H 610 700 A 600 743 A 680 797 A 643 740 15 32 15 32 15 32 Y Note 2) Y Note 2) Y Note 2) X 558 to 573 685 to 708 X 518 to 533 558 to 581 X 541 to 556 595 to 618 15 32 15 32 15 32 558 to 573 685 to 708 518 to 533 558 to 581

CYV

Low leakage 1.3 x 10-Pam/sec Leakage:1.3 x 10-Pam/sec or less (at normal temperatures, excluding gas permeation) 10Standard value Note 1) The data indicates the leakage measured in a vacuum environment of 10-Pa. Leakage [Pam3/sec] 10Note 2) The leakage test result shown is based on a test conducted for 10 minutes after the cylinder was pressurized with helium at 0.1 MPa.

3 Position Cylinder Series RZQ

102.5 5 14 20 32 10 6 14 22 124 92 114 40 14 7 20 28 134.5 96.5 124.5 50 146 102 14 132 8 20 30 63 CU Bore size (mm) L B + Full stroke RR CW CX+0.2 +0.4 CX CZ RR CL + Full stroke CZ -0.3 -0.1 18 36 10 32 A + Full stroke 18 36 10 40 22 44 14 50 22 44 14 63 10 Series RZQ Auto Switches Proper Mounting Position(For Detection of Piston A Stop Position) and Mounting Height D-A7 D-A80 =U B + First-stage

AIR SLIDE TABLE

16.5 16.5 16.5 16.5 16.5 16.5 24.1 18.1 18.1 25.1 25.1 31.1 50.1 50.1 MXQ16B 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20.6 33 23 23 23 29 38 63 63 63 MXQ20B 32.2 21.2 21.2 21.2 21.2 21.2 21.2 21.2 21.2 30.9 31.9 31.9 31.9 44.9 44.9 46.9 69.9 69.9 Solid state auto switch: D-M9M9 A Stroke Stroke Model 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6(A) 18 7.4 7.4 7.4 7.4 2

IDX-OM-U010

Option R . 10-1 10.1 SAFETY INSTRUCTIONS FOR USE . 10-1 10.2 EARTH LEAKAGE BREAKER SPECIFICATION . 10-1 10.3 CONNECTION OF POWER SUPPLY. 10-2 Chapter 11 Option T . 11-1 11.1 SAFETY INSTRUCTIONS FOR USE . 11-1 11.2 OPERATION / ERROR SIGNAL OUTPUT . 11-1 11.3 REMOTE OPERATION . 11-2 11.4 CONNECT THE POWER CABLE AND SIGNAL CABLE . 11-3 11.5 ELECTRIC CIRCUIT . 11-4 Chapter 12 Option V . 12-1

EX500-GPR1A.eng

Connector specification ES M8 connector ( socket ) /10 pcs. TP M12 connector ( plug ) /1 pc. TS M12 connector ( socket ) /10 pcs. 40 41 Item No.

Microspeed Cylinder: Double Acting/Single Rod Series CUX ø 10, ø 16, ø 20, ø 25, ø 32 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Proper tightening torque (Nm) (cylinder body) 10 16 20, 25 32 Hexagon socket head cap screw size (mm) Bore sizes (mm) 16 20 25 32 Piston seal: 1 pc. Rod seal: 1 pc. Gasket: 1 pc. CUX16-PS CUX20-PS M3 0.54 10% CUX25-PS M4 1.23 10% Grease pack (10g): 1 pc. CUX32-PS M5 2.55 10% Due to cylinder structure, 10mm bore size seals cannot be replaced. M6 4.02 10% 2.

Slide Tables MX Series

MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 2.1{21.4} 2.1{21.4} 4.4{44.9} 7.4{75.5} 7.4{75.5} 18{180} 8 8 10 12 12 16 M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 2. Side through hole mounting These conditions could lead to malfunctions.

Guide Cylinder Series MGG

Ambient temperature range C 10 to 80C 4.22 6.86 8.34 8.83 Extended Spring force N Compressed 6.86 15.98 20.5 20.01 With the maximum energy absorption per cycle.

Electric Actuator with Integrated Guide Series LTF

20 10 20 10 20 10 20 6 10 20 10 20 10 20 10 20 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 P.2 Horizontal 10 10 P.10 Standard motor 6 6 P.18 Vertical 10 10 P.26 Frame-type linear guide LTF 6 6 P.34 Horizontal 10 10 P.42 Non-standard motor 6 6 P.50 Vertical 10 10 P.58 Options P.66 Construction P.67 Mounting P.68 Non-standard Motor Mounting P.69 Deflection Data P.71 Part Number Designations