VQ5000

R1 R2 R2 R1 P 27.5 27.5 41 41 Rc 1/8 PE port Rc 1/8 External pilot port Rc 1/8 PE port Rc 1/8 External pilot port 27.5 27.5 41 41 5-Rc 1/2 1(P), 4(A), 2(B), 5(R1), 3(R2) port 5-Rc 1/2 1(P), 4(A), 2(B), 5(R1), 3(R2) port Numbers inside ( ) are for metal seal 3 position type 2-6-7 8 Series VQ5000 Base Mounted Plug-in Unit How to Order Manifold VV5Q 5 1 08 03 F U1 Option Option None Exhaust

VCW

Valve For VCW20 OR-1860-120Nil: NBR F: FKM E: EPDM P: PTFE OR-2380-130For VCW30 Nil: NBR F: FKM E: EPDM P: PTFE OR-2600-180For VCW40 e Nil: NBR F: FKM E: EPDM P: PTFE Manifold For VCW20 r OR-1400-178Nil: NBR F: FKM E: EPDM P: PTFE OR-2670-178When the loosened clip is pulled out in direction e using pinchers, etc., the coil can be removed and replaced in direction r.

Modular Type Regulator Series AR

J K P E Bracket (option) AR50, 60 Port size Square embedded type pressure gauge (option) A D C L OUT IN G Pressure gauge (option) B Pressure gauge port M N Bracket (option) Q K P F E J Standard specification Accessory specification With pressure gauge Bracket mounting size Panel mount Model Port sizes A 25 40 53 53 70 75 90 95 J 25 30 30 41 50 50 70 70 B 58 94 101 116 128 129 169 176 K 28

Pneumatic Transfer System Series MF

Plate mounting support bracket Body mounting side support Auto switches mountable (both sides) Types of Units and Parts Type of units and parts Type of units Type of parts Single units P.1 to P.9 Combination units P.11 to P.18 Set parts P.11 to P.14 Parts P.16 Spare parts P.4 & 5 Optional parts P.2 Catalog pages Parts for combination units.

NVZseies

(Ms) | ieries I{VZ 3-port dirct operated I solenoidvahre I NVZ100 | -EEffi rfl|/h afirF I P F P F II I 3-pod pilot operated I solenoid valrre I NVZ300 I @ Internal dlot type I T di**t* | ,oli*,n,* oiJ I K4 q I l-f " " ' n * | {im#h I P F P F II I I tlffi;lI l&*;" 3-port pilotoperated I solenoad Yalve I NVZSOO I @ Inlerml dlol type I "t" ^"" I ilF a{Zl;lh I exrllar pirot ty"pi I l " i I w

3 Way,3 Port Solenoid Valve NVZ Series

(Ms) | ieries I{VZ 3-port dirct operated I solenoidvahre I NVZ100 | -EEffi rfl|/h afirF I P F P F II I 3-pod pilot operated I solenoid valrre I NVZ300 I @ Internal dlot type I T di**t* | ,oli*,n,* oiJ I K4 q I l-f " " ' n * | {im#h I P F P F II I I tlffi;lI l&*;" 3-port pilotoperated I solenoad Yalve I NVZSOO I @ Inlerml dlol type I "t" ^"" I ilF a{Zl;lh I exrllar pirot ty"pi I l " i I w

VCL

Grommet: G Conduit: C (Q) Approx. 300 Approx. 280 Approx. 300 D D F Q F Q Width across flats H Class H coil Broken line section C C R G1/2 R E E A H A B B 2 x P Port size 2 x P Port size 2 x M, thread depth N 2 x M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6 to 12 F S Q 27.5 34 F (Q) 25 R C U C (44) R E R G1/2 E G1/2 A H D (S) B B A H D 2 x P Port size 2 x P Port size

CS1

Eliminate the unnecessary parts. 1.10-13 Series CS1 Front Flange/CS1F Lube (CS1F), Non-lube (CS1FN), AIr-hydro (CS1FH) Long stroke With auto switch/CDS1F (mm) Stroke range (mm) W/o rod boot With rod boot Style Bore (mm) J FT FX FD S AL B E F FA KA M MM H A D EA FY FZ G K N P B C h ZZ e f l ZZ1 125 140 160 180 200 250 300 115 1/2 M30 X 1.5 145 75 40 145 190 100 230 M14 X 1.5 110 238 133 261

Guide Cylinder/Compact Type Series MGC

) (Slide bearing type) Deflection Y (mm) Deflection Y (mm) Deflection Y (mm) Deflection Y (mm) St: Stroke (mm) St: Stroke (mm) St: Stroke (mm) Allowable end load F (N) Allowable end load F (N) Allowable end load F (N) MGCM 40-R Stroke (Slide bearing type) St: Stroke (mm) Allowable end load F (N) MGCM 50-R Stroke (Slide bearing type) Deflection Y (mm) St: Stroke (mm) Allowable end load F (

Table of Contents

AS 0 0.1 0.15 0.2 0.25 0.3 Return stroke pressure (MPa) ASP ASN v v w w a a o o l l v v l l F F e e AQ ASV u u r r e e s s v v s s a a e e l l v v r r P P e e AK ASS ASR ASF Working stroke Working stroke Return stroke Return stroke Pressure valve Flow valve 15-16-1 2 Cuts air consumption by operating the return stroke at a reduced pressure.

LG1H

Refer to page 57 for mounting. 30 A B Stroke Model LG1H21NC500-F LG1H21NC600-F LG1H21NC700-F LG1H21NC800-F LG1H21NC900-F LG1H21NC-1000-F 360 460 560 660 760 860 500 600 700 800 900 380 480 580 680 780 880 95 B 95 100 8(4) x 6.2 (170) () () 1000 20 95 A 95 110 (150) () () Positioning Time Guide Positioning time Positioning time (sec.)

High Power Cylinder Series RHC

110 100 M12 x 1.75 thread depth 25 6 Series RHC Dimensions/Axial Foot Type 20 to 40 H GA Rc P Rc P GB F K F A WH NN Effective thread H2 I MM H1 NB ND D NE 4-LD LY LH LT NF E 10 E JD N 10 JC N NA S + Stroke X Y X Y LX LZ LS + Stroke ZZ + Stroke (mm) Bore size (mm) Stroke range (mm) Effective thread length A D E F GA GB H I JC JD K LD LH H1 H2 10 15.5 8 5 25 7 5 30.5 43 26 44 47.5 53.5 16

SZ3000

P-73 (JT)

Cylinder with Lock Series MNB

C Rc(PT)P Rear cylinder port Width across flats Rc(PT)P Front cylinder port Width across flats B1 MM W GR GR E D C GL1 GL W T 16 Effective thread length MB 4-J 16 GF 4-J V Q VA H1 N K F GE BN A H S + Stroke ZZ + Stroke With rod boot e 9 l 13 h f ZZ + Stroke (mm) Effective thread length (mm) Width across flats Stroke range (mm) Bore size (mm) D F B A B1 H1 BP GL B2 BN GC GL1 C GA GB GD Ee11

45

= 16 (Pitch) P = 16 DIN rail release button SV 2n-One-touch fittings 2-One-touch fittings 2-One-touch fittings 2n-One-touch fittings (A, B port) (P , R port) Applicable tubing O.D.: 10 (P , R port) Applicable tubing O.D.: 10 (A, B port) Applicable tubing O.D.: 4 6 8 4 6 8 Applicable tubing O.D.: SZ DIN rail holding screw DIN rail holding screw SY SYJ SX 300 (Lead wire length) (Rail mounting

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Floating Joint

45-150-X530 45 1.5 159 150 100 96 29 22 28 70 86 49 3 55000 9.2 Foot Type: JAL JAL180 200--X530 F R K M Center of sphere E 4 x J U U D T C 60 G P A H L B Dimensions (mm) Maximum operating tensile and compressive force (N) Center of Maximum screw-in depth P Allowable eccentricity U Applicable bore size Model M A B C D E F K L T J G H Weight (kg) Nominal size Pitch sphere R 180 JAL180-40-150

10

Cushion valve G 2 x Rc P W V Port G E Width across flats KA TX D E B C H1 AL MM MB MA N 2 x 4 x J N TY B C Width across flats B1 A H K F TT ZZ + Stroke S + Stroke With rod boot d e 10.2 10.2 f h l [mm] Bore size [mm] A AL B B1 C D E F G H H1 J K KA MA MB MM N P S TT TX TY V W ZZ 32 22 19.5 46 17 32.5 12 30 13 13 47 6 M6 x 1 6 10 16 4 M10 x 1.25 27 1/8 84 17 48 49 4 6.5 135 40 30 27 52 22

Modular Type Air Filter Series AF

Contact P/A regarding the bowl assembly supply for PSI and F unit specifications.

Integrated Controller

p. 44 Construction p. 46 Dimensions p. 47 Auto Switch Mounting p. 29, 53 Solid State Auto Switch, Normally Closed Solid State Auto Switch, 2-Color Indicator Solid State Auto Switch p. 30, 54 e-Actuator Electric Specifications p. 59 Wiring Examples p. 60 Operation Data Setting p. 61 Options p. 62 Slider Type Specific Product Precautions p. 33 Rod Type Specific Product Precautions