HRX-OM-W032

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-25 HRX-OM-W032 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly. Incorrect piping might cause leakage of supplied or drained fluid and wet surrounding area and facility.

ITV

Count Pressure Characteristics Flow Characteristics Supply pressure: 0.6 MPa Set pressure: 0.25 MPa 600 1 500 kPa 500 Output deviation factor (% F.S.) 0.5 Set pressure (kPa) 400 kPa 400 Out 300 kPa 300 0 Return 200 kPa 200 0.5 100 kPa 100 50 kPa 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 0 2 1 3 4 5 6 0 7 1.0 Supply pressure (MPa) Flow rate (l/min (ANR)) 14-8-6 7 Compact Electro-pneumatic Regulator

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

3 Port Solenoid Valve Rubber Seal Series SYJ300/500/700 SY SYJ Low power consumption: 0.5W (Without light) (Current draw: 21mA at 24V DC) VK VZ Completely interchangeable with the previous series VJ300/500/700 and VZ300/500. VT Pilot exhaust VT VP Mounts on the same subplates and manifolds as the VJ300/500/700 and the VZ300/500.

VXF

Flow rate Q (Nl) Flow rate Q (Nl) Tube 2,000 Tube 2,000 mm 500 mm 6 x 8 pcs. 6 x 8 pcs. 500 mm 500 mm mm 6 x 6 pcs. 6 x 6 pcs. 6 x 6 pcs. 6 x 6 pcs. Time T1, T2 (ms) Without tube (VXF2150) Without tube Without tube (VXF2150) PM: Raised up to 0.48 MPa PM: Raised up to 0.48 MPa PA=0.5 MPa 6 x 6 pcs. PA=0.5 MPa A=0.5 MPa 6 x 6 pcs.

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

30 37 47.3 d M6 x 1.0 M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 Part no.

Actuator Position Sensor

Parameter Initial value Initial value Selection range (value) 2 (mm) Value/Range Setpoint 1 (SP1) 250 12.5 mm D-MP025 0 to 500 Setpoint 2 (SP2) 230 11.5 mm Measuring range 0 to 500 25 mm Setpoint 1 (SP1) 500 25 mm D-MP050 0 to 1000 Setpoint 2 (SP2) 480 24 mm Measuring range 0 to 1000 50 mm Setpoint 1 (SP1) 1000 50 mm D-MP100 0 to 2000 Setpoint 2 (SP2) 980 49 mm Measuring range 0 to 2000 100

RSH/RS1H

Note 2) The figure shows an extended piston rod. 10-9-10 10 Heavy Duty Stopper Cylinder Series RSH/RS1H Proper Auto Switch Mounting Position Auto switch B A RE A B REC CX CY Proper Auto Switch Mounting Position D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W Auto switch models MQQ M D-Y69 D-Y7PV D-Y7WV D-Y7BAL RHC Bore size (mm) A B A B A B MK(2) 20 8(6.5) 18 18 9.5 18 2 32 10.5(9) 13.5 13.5 12 13.5 4.5 RS

RSH/RS1H

Note 2) The figure shows an extended piston rod. 10-9-10 10 Heavy Duty Stopper Cylinder Series RSH/RS1H Proper Auto Switch Mounting Position Auto switch B A RE A B REC CX CY Proper Auto Switch Mounting Position D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W Auto switch models MQQ M D-Y69 D-Y7PV D-Y7WV D-Y7BAL Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office:

VCA

Printed in Japan. 1st printing May, 2000 D-SMC.L.A. P-80 (D)

PSxx-OMM0006CN

D M5 M5X0.8 () E C4 4 C6 6 F + 1IS0228-1 P10/1 X NPN2() Y PNP2() 1 R NPN2 +/ T PNP2 +/ M SI2 P (psi)1 S NPN2 +/ 1 2kPaMPa V PNP2 +/ -9No.PS-OMM0006CN-E /1 1 01 N01 W1 WF1 M5 C4 C6 A A ZS-24-A X X X B B ZS-24-B X X X X X D D ZS-24-D X X X ZS-35-C X X X X X E ZS-35-D X X ZS-35-F X X X X X + F ZS-35-G X X 1/ 1 ZS-24-A A M35 L,M45 L 2 ZS-24-B B M45 L, 2 ZS-24-D D M35 L,M45

Digital Pressure Switch

(example: If the pressure switch with output impedance of 1k is connected to the A/D converter to detect the analog output of 5V, the detected voltage by the A/D converter becomes 5(V) x 1(M)/(1(k) + 1(M)) 4.995(V), and there is an error of approximate 0.005 V). Output impedance The operation principle of the switch output. Normal output and reverse output can be selected.

Electric Actuator / High Rigidity Slider Type 《 AC servo motor ・ Motorless 》

Product weight Model LEJS100 Stroke [mm] 200 300 400 500 600 800 1000 1200 1500 Product weight [kg] 20.4 22.5 24.6 26.7 28.8 33.0 37.1 41.3 47.6 1.0 Additional weight with lock [kg] -5- 1.2 Motorless 1.2.1 How to order L E J S 100 N B 500 T X400 Motor type Stroke [mm] Lead [mm] N Motorless 200 200 H 50 to to A 25 1500 1500 B 10 *Refer to the applicable stroke table.

125

Bore size System Average speed [mm/s] MB, CA2 series Pressure 0.5 MPa, Load ratio 50%, Stroke 500 mm 40 50 63 80 100 1000 900 800 700 600 500 400 300 200 100 0 Vertically upward Horizontal A 1000 900 800 700 600 500 400 300 200 100 0 B 1000 900 800 700 600 500 400 300 200 100 0 C Bore size System Average speed [mm/s] CS1/CS2 series Pressure 0.5 MPa, Load ratio 50%, Stroke 300 mm 125 140 160

Rotary Cylinder Series MRQ Size: 32, 40 1

Reed switch: D-A7/A8 Solid state switch: D-F7/J7 ( ) Series MRQ An air cushion is also available.

ML1

CE2 ML2B ML1C Mounting Position (Stroke End)/Reed Switch Mounting Position (Stroke End)/Solid State Switch D-E73A (L), D-E76A (L), D-E80A (L) D-M5B (L), D-M5N (L), D-M5P (L) D-M5BW (L), D-M5NW (L), D-M5PW (L) D-M5NTL, D-M5PTL REA REC RHC MTS CC Lead wire clamp/Lead wire cap (option) Series Lead wire clamp Lead wire cap ML1C LC-01 LP-01 Unit: mm Lead wire clamp/Lead wire cap (option) 25 32

Rubber seal 5 Port Solenoid Valve Series SYJ7000

DC specifications of type D and DO is only available with 12 and 24 VDC.

Compact Vacuum Unit

(n1) x 0.402 Ejector/Manifold ZZB-SM5 ZB0030-K1L(O)Vacuum pump system/Manifold ZZB-SM5 ZB31-Q1L(O)E F E F 1 Stations n D side U side 1 Stations n D side U side Vacuum pressure switch Vacuum pressure switch Vacuum pressure switch Vacuum pressure switch PV PD PV PD Port open to atmosphere PV PD PV PD Port open to atmosphere Port open to atmosphere Port open to atmosphere Supply valve Supply

Air Slide Table Series MXQ

D-A9V Solid state switches D-F9 D-F9V 2 color indication solid state D-F9W D-F9WV MXQ 6 MXQL 6 6 MXQ 8 MXQL 8 8 MXQ12 MXQL12 12 MXQ16 MXQL16 16 MXQ20 MXQL20 20 MXQ25 MXQL25 25 Function Options Adjuster Options With Buffer Mechanism With End lock Protects work pieces and tools, etc., by eliminating impact at the end of the extension stroke Buffer unit is auto switch capable Holds

Table of Contents

D-sub Connector. Series SV D-sub Connector. How to Order . Manifold Electrical Wiring. Dimensions . Series SV1000 for D-sub Connector. Series SV2000 for D-sub Connector. Series SV1000 for D-sub Connector. Series SV2000 for D-sub Connector. Series SV3000 for D-sub Connector. Series SV4000 for D-sub Connector. Flat Ribbon Cable Connector . Series SV Flat Ribbon Cable Connector.

Sensor Monitor

(example: If the Pressure switch with output impedance of 1 k is connected to the A/D converter to detect the analogue output of 5 V, the detected voltage by the A/D converter becomes 5 (V) x 1 (M)/(1 (k) + 1 (M)) 4.995 (V), and there is an error of approximate 0.005 V). Output impedance Operation mode Either hysteresis mode or window comparator mode can be selected.