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Micromist separator AMD900, 1000, 901 Model Connect (Flange) 2B 6B C 2B/3B/4B 400 A 280 B 760 D 150 E 270 F 1033 G 3 H 887 J 620 AMD801 AMD901 12B 445 795 300 520 1318 3 972 AMD800/900/1000 ORIENTATION Mounting Caution q Verify the direction of the flow of the compressed air and the "e" mark that indicates the inlet of the product before connecting.

Micromist separator AMD900, 1000, 901 Model Connect (Flange) 2B 2B/3B/4B 400 A 280 B 6B C 550 D 150 E 270 F 823 G 3 H 797 J 620 AMF801 AMF901 445 12B 570 300 520 1093 3 867 AMF800/900/1000 Mounting Caution q Verify the direction of the flow of the compressed air and the "e" mark that indicates the inlet of the product before connecting.

Heat exchanger Ventilation Circulating fluid Expansion E circuit valve A Expansion Inverter pump valve B Pump E Temp. sensor (Ref. discharge Ball tap Fluid level gauge TS Press. sensor Over flow port (Ref. low press.)

Inch size ARJ310F-N01 5/32" 1/4" 03 07 14-4-11 9 Series ARJ310 Flow Characteristics Inlet pressure: 0.7 MPa ARJ310-01 ARJ310F-01-04 ARJ310F-01-06 0.7 0.7 0.7 0.6 0.6 0.6 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0.0 0.0 0.0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Flow

80 MB 63 300 600 Stroke (mm) AS5000-02 AS420-02 AS3201F -03-10 200 400 200 100 0 0 SV400 AN300 -KM12 T1209 SV300 ANA1 -C12 T1075 800 400 MB 100 MB 80 600 300 Stroke (mm) AS5000-02 AS420-02 AS4000-03 400 200 200 100 0 0 400 800 CS1 125 MB 100 600 300 Stroke (mm) AS5000-02 AS420-02 200 400 AS4000-04 200 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed

, 175, 200, 250, 300, 350, 400 400 67 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 400 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 500 85 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 500 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 500 Precautions Theoretical Output Be sure to read this before handling the products

9 e r t q !3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.

, NPT, G) Width across flats KA J DL DL RF MO DL MM HR E D E HN Air-hydro CA2H Air-hydro CA2WH Auto switch Made to order Precautions H1 AL Width across flats B1 Width across flats of hexagon hole WB 2-cushion valve A N F K N B C M H S + Stroke ZZ + Stroke With rod boot e 9 l f h + l ZZ + l + Stroke (mm) HN Stroke range Bore size (mm) B C (MAX) P A AL B1 D DL E F G H H1 HR J K KA M MM MO N

This can be changed by the operation display panel. c) Function Command is assigned. d) Data Depending on the function, the address and the number of the register, the value of reading/writing are assigned. e) CRC CRC method.

Body materaial Code Brass 300 SS series B C Gauge port (Inlete, Outletr) Porting Configuration Ports Pressure gauge Ports Code 2 ports 4 ports 4 ports (Reverse port) Code psig/bar unit MPa unit r e 2P 4P No gauge port No pressure gauge (Connections: 1/4 inch NPT) No code w q w q 0 4PQ 400 psig/bar1) 600 psig/bar 1) 1000 psig/bar1) 2000 psig/bar1) 4000 psig/bar1) 6000 psig/bar1) 4 6 10 20

9 e r t q !3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

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Deionized water: Electric conductivity 1 mS/cm or higher (Electric resistivity 1 MWcm or lower) 3 q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid temperature: 20C, r Circulating uid ow rate: Rated ow, t Power supply: 200/400 VAC 4 q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid ow rate: Rated ow, r Power supply: 200/400 VAC 5 q Ambient

/www.smcpneumatics.ca (800) SMC.SMC1 (762-7621) e-mail: sales@smcusa.com For International inquires: www.smcworld.com 2012 SMC Corporation All Rights Reserved 11-E597 QT -RRD-5M Information AC Servo Motor Driver Series LECSm Power Supply Voltage 100 to 120 VAC 200 to 230 VAC Motor Capacity 100/200/400W Series LECSA (Pulse Input Type/Positioning Type) Incremental Type Absolute Type Up to 7

3 e w t !3 A A !0 !2 !7 !6 o !5 !1 i !4 Section A-A u Parts list Material Note No. Description No.

Bar length (mm) IZN10-G-100-X216 IZN10-G-200-X216 IZN10-G-300-X216 IZN10-G-400-X216 IZN10-G-500-X216 IZN10-G-600-X216 100 Part no. IZN10-G-X198 Part no.

(191) +l Up to 600 Up to 1200 179 (191) +l Up to 600 Up to 1200 C95 202 (216) +l Up to 750 Up to 1400 202 (219) +l Up to 750 Up to 1500 CA1 Note 1) ( ): Long stroke Note 2) End boss is machined on the flange for E.