Process Valve Series VNA

Proof pressure Ambient temperature Max. operating frequency Mounting position Port size Orifice diameter (mm) Flow characteristics Av x 10-6m2 5.5 MPa 10.5 MPa 5 to 50C Note 1) 20 times/min Vertical upwards 1 2 3 8 3 4 1 3 8 1 2 3 4 1 3 8 1 2 3 4 1 7.1 86 8.7 110 10.6 190 14.3 15 3.9 29 5.2 38 6.2 58 7.3 54 8 75 9.5 140 13 210 15.7 46 Pilot port size Mass (kg) Face-to-face dimension

SYJ300/500/700

N.O. 140 (80) 1/8 Base mounted (with sub-plate) 135 (75) 136 (76) 157 (97) V100 1/4 Note) Value for DC. Add 3 g for AC. ( ): Without sub-plate.

5 Port Solenoid Valve, Series VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

Booster Regulator/Air Tank

2 3/4 3/8 1/2 1/2 3/4 0 to 75 Horizontal (Floor mounting) 6.6 10 14 21 Carbon steel (SS400) Outside: Silver paint, Inside: Rustproof paint Note) Accessories are included in the same container.

Stability of suction position,

1 o !1 i Component Parts r r No.

Modular Type Regulators Series AR

Pressure gauge port size Port size Model AR425/435 AR625/635 AR825/835 AR925/935 80 98 126 160 145.5 155 216 241 3 7 5 10 1/4 1/4 1/4 1/4 1/4, 3/8, 1/2 3/4, 1 1 , 1 2 39.5 43 75 90 46.5 85 48 52 80 90 B24P B25P 67 78 110 140 73 78.5 94.5 4 1 2 1 109.5 464 SP093-001I Issued: Sep 2009 P.G.

Multi-channel Digital Sensor Monitor ( compatible)

Bit offset Item Notes 0 CH1: OUT1 output 0: OFF 1: ON 1 CH1: OUT2 output 0: OFF 1: ON 2 CH2: OUT1 output 0: OFF 1: ON 3 CH2: OUT2 output 0: OFF 1: ON 4 CH3: OUT1 output 0: OFF 1: ON 5 CH3: OUT2 output 0: OFF 1: ON 6 CH4: OUT1 output 0: OFF 1: ON 7 CH4: OUT2 output 0: OFF 1: ON 8 CH1: Diagnostics 0: OFF 1: ON Out of CH1 display range (When HHH and LLL are displayed). 9 CH2: Diagnostics 0:

Modular Type Air Filters Series AF

40 20 30 27 22 5.4 8.4 40 2.3 28 115 1/4, 3/8 53 129 14 26.5 30 50 26.5 41 40 23 6.5 8 53 2.3 30 170 AF 70 165 18 35 38 75 35 50 54 26 8.5 10.5 70 2.3 35 204 1/4, 3/8, 1/2 75 169 20 35 38 75 35 50 54 25 8.5 10.5 70 2.3 34 208 3/4 AR 90 245 24 45 20 45 70 66 35 11 13 90 3.2 47 284 3/4, 1 95 258 24 47.5 20 47.5 70 66 35 11 13 90 3.2 47 297 1 AL Semi-standard specifications AW With barb

SMC Basic Pneumatics

F 3 COMPRESSED AIR THEORY Units Pressur Prooerties of Gases lsothermic change (Boyle's Law) lsobaric change Charles Law Law of Gay Lussac lsochoric change Adiabatic (lsentropic) change Standard Volume Flow Bernoulli's Equation Air Humidity Relative humidity Pressur and Flow Use of the diagram: Formulae: 6 6 I 1 0 1 0 1 1 1 1 1 1 1 1 1 2 1 2 1 2 1 2 1 2 1 3 1 5 1 6 1 6 AE 36 36 5 AIR TBEATMENT

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F 3 COMPRESSED AIR THEORY Units Pressur Prooerties of Gases lsothermic change (Boyle's Law) lsobaric change Charles Law Law of Gay Lussac lsochoric change Adiabatic (lsentropic) change Standard Volume Flow Bernoulli's Equation Air Humidity Relative humidity Pressur and Flow Use of the diagram: Formulae: 6 6 I 1 0 1 0 1 1 1 1 1 1 1 1 1 2 1 2 1 2 1 2 1 2 1 3 1 5 1 6 1 6 AE 36 36 5 AIR TBEATMENT

SMC Electronic Switch Series Variations

102 1.0197 X 102 9.8692 X 103 1.0197 X 102 1 7.5006 1 X 106 1 X 103 1.0197 X 105 7.5006 X 103 1.4503 X 102 1 1 X 10 1.0197 X 10 9.8692 1 X 105 1 X 102 1 X 101 9.8692 X 101 1.0197 X 104 7.5006 X 102 1 1.0197 1.4503 X 10 9.8067 X 104 9.8067 X 102 9.8067 X 101 9.6784 X 101 1 X 104 7.3556 X 102 1 1.4217 X 10 9.8067 X 10 1.0133 X 105 1.0133 X 102 1.0133 X 101 1.0332 X 104 7.6000 X 102 1.0332 1.4706

Electric Actuator / Slider Type 《 AC Servo Motor 》

Table4-1.

Modular Type Regulator Series AR

Modular Type Regulator Series AR Regulator Series AR Port size Model Accessory AR10 M5 x 0.8 AR20 1/8, 1/4 AR25 1/4, 3/8 AR30 1/4, 3/8 AR40 1/4, 3/8, 1/2 AR40-06 Bracket 3/4 Square embedded type pressure gauge (except for AR10) AR50 3/4, 1 AR60 Pages 36 through 40 1 Round pressure gauge Regulator with back flow mechanism Series ARK AR20K 1/8, 1/4 Panel mount AR25K 1/4, 3/8 AR30K 1/4, 3/8

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Easily replaced filter element ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 " " " " " 7 7 12 16 19 22 22 30 40 62 20 20 30 75 100 3 16 1 4 1 4 3 8 1 2 Note 1) Flow rate is less than 0.003 MPa of the initial pressure drop. Note 2) Will be manufactured upon receipt of order. Note 3) Avoid use under pressurization.

IDX-OM-N030

Name and Function of Parts 1 . 1 Part number of product .1 1 1 . 2 Options of product.1 2 1. 2. 1 Anti-corrosive treated copper tube (option C) .1 2 1. 2. 2 Medium pressure type (option K) .1 2 1. 2. 3 Ground fault circuit interrupter (option R) .1 2 1. 2. 4 Timer type solenoid valve with auto drain (option V) .1 2 1 . 3 Name and function of parts .1 3 Chapter 2 Transportation and installation

SL5200

Connections Temperature range 1/4 inch face seal (Female) 40 to 140F (40 to 60C) (No freezing) 25% to 75% of the scale: 1%F.S.

Mini Free Mount Cylinder

1 1 1 3 7 3 7 Note 1) Solid state switch D-M9/M9W: with 1 pc.

Vacuum Ejector Series ZM

1 y u i o ZR ZM t t e e ZMA V V ZQ r r ZH !1 Left side Right side ZU ZL ZY ZF Clamp rod part no. (1) ZP Manifold part no.

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IN side, OUT side 4 10 22 20 22 30 30 50 30 75 39 75 39 Series ZFB Model ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 6 6 8 8 10 Metric size 3/16" 20 22 20 22 30 30 75 40 100 62 ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 1/4" 1/4" Inch size (2) 3/8" 1/2" Specifications Fluid Air/Nitrogen Negative pressure 0.5MPa 0 to 60C (Non-freezing) 30m 0.15MPa Nylon/Soft Nylon/Polyurethane