, Standards: CE marking, UL/CSA (UL508) compliance, PRESSURE SWITCH, DIGITAL, INSTRUMENTATION, ISE70/75 PRESSURE SWITCH, DA, ISE70/75 1/4 PT VERSION, .64151 lb

, Standards: CE marking, UL/CSA (UL508) compliance, 2 COLOR DISPLAY DIGITAL PRESSU, INSTRUMENTATION, ISE70/75 PRESSURE SWITCH, DA, ISE70/75 1/4" PT VERSION, 1.20173 lb

LEC-OM02704CN

RYnE RYnE 4 0 0 0 0 0 1 0 0 6 RY(n+2)3 7 RY(n+2)4 8 RY(n+2)5 254 1 1 1 1 1 1 1 0 255 1 1 1 1 1 1 1 1 1. 0OFF 1ON 2.

Fluoropolymer Piping Equipment

Port size 1 2 1 2 1 2 3 4 5 6 8 1 2 3 4 1 2 3 1 2 3 1 1 2 2 3 3 3 3 3 3 3 4 4 4 4 5 5 5 6 6 6 1 2 2 3 3 3 3 4 4 4 4 5 5 5 6 6 6 7 A A B A B C D A B C D A B C A B C A 1/8" 1/8" 1/8" 1/4" x 5/32" 1/8" 1/4" 1/4" 6 x 4 1/8" 10 x 8 8 x 6 10 x 8 8 x 6 10 x 8 1/4" 3/8" x 1/4" 1/8" 3/8" 1/2" 1/4" 1/4" 3/8" 1/2" x 3/8" 3/8" 1/2" 8 x 6 1/2" 1/4" 3/8" 1/2" 3/4" 3/8" 1/2" 3/4" 1/2" 3/4" 1" 3/4" 3/8"

New

1 10 102 1.

HRX-OM-W032

HRX-OM-W032 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before Using the Product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety instructions for use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.

4/5 Port Air Operated Valve Series SYJA3000

2.5 2.2 2.2 2.2 0.26 0.25 0.25 0.26 0.24 0.20 0.23 0.30 0.23 0.26 0.55 0.49 0.51 0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 SS5YJ7-20 Body ported SYJ72 for internal pilot SS5YJ7-21 SS5YJ7-40 SS5YJ7-41 SS5YJ7-42-C6 SS5YJ7-42-C8 Base mounted SYJ74 for internal pilot Note) Value at manifold base mounted, 2 position single operating

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

(P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) X X X X X 1.2-72

Series KV2 Fittings

(g) Bag/Box Quantity MB D2 D3 D4 D5 D6 L1 L2 L3 5/32** 5/32 5/32 5/32 1/4** 1/4 1/4 1/4 3/8** 3/8** 3/8 3/8 3/8 1/2** 1/2** 1/2** 1/2 1/2 1/2 5/8** 1/4 5/32 5/32 5/32 3/8 1/4 1/4 1/4 1/4 1/4 3/8 3/8 3/8 1/4 3/8 3/8 1/2 1/2 1/2 5/8 1/4-18 1/16-18 1/8-27 1/4-18 1/4-18 1/8-27 1/4-18 3/8-18 1/4-18 3/8-18 1/4-18 3/8-18 1/2-14 1/2-14 3/8-18 1/2-14 1/4-18 3/8-18 1/2-14 1/2-14 KV2Y03-07-35S KV2Y03

Tamper Proof and Flat Head Screw

Applicable cylinder bore size (mm) Metric sizes (mm) Inch sizes (inches) Cylinder side port size Elbow type Model AS121F AS221F AS321F AS421F 3/16 1/4 5/16 3.2 4 6 8 10 12 6 to 20 20 to 40 40 to 63 63 to 100 1/8 5/32 3/8 1/2 M5 1/8, 1/4 1/4, 3/8 1/2 Universal type AS131F AS231F AS331F AS431F 6 to 20 20 to 40 40 to 63 63 to 100 M5 1/8, 1/4 1/4, 3/8 1/2 Speed controller with One-touch fitting

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

2 5 1 2 3 4 5 1 2 3 4 5 1 2 3 4 5 5 2 1 3 4 32.4 32.6 15 18 M12 SPEEDCON w 4 3 5 1 2 Plug connector pin assignment A-coded (Normal key) 4.2 M12 SPEEDCON M12 SPEEDCON 17 3 4 Socket connector pin assignment A-coded (Normal key) Wiring #7 PCA-1557798 Y connector (2 x M8-M12) Socket connector pin assignment 40.7 9.9 15.8 8.3 14.8 1 q 1 3 3 4 1 2 3 4 1 2 1 4 21.8 21.7 13 12 M8 4 3 w 1 3 3 4 Plug

5 Port Air Operated Valve

EXH port EXH port VF 000 75 A 1 3 Series Thread type Nil F N T Rc Symbol 3 5 Series Port size VFA3000 1/8 G VFA5000 1/4 NPT NPTF 1514 5 Port Air Operated Valve Body Ported/Manifold VFA1000/3000/5000 Series Dimensions: VFA1000 Series Type 30: VV5FA1-30-1-: Common exhaust 1/8 [4 (A), 2 (B) port] 12 L2 L1 SYA M5 5 10 17.5 17.8 27.8 M5 x 0.8 [4 (A), 2 (B) port] 10 SYJA 20.3 20.3 4A 2B VZA P R

3 Port Air Operated Valve Series SYJA300 1

Rc 1/8 pilot port 2-Mounting hole Port size Rc (EXH port) Port size 2-Rc (IN, OUT port) IN, OUT EXH Port size Rc A Model Mounting hole C D E F G H K L B J 3 8 1 2 3 4 VPA3145 71 3 4 85 14 52 55 93 32 87.4 36 71 80 8.5 3 4 VPA3165 82.6 1 4 1 1 110 17 68 75 118 45 113 36 71 95 8.5 1 4 1 1 1 1 4 VPA3185 118 1 2 132 14 80 95 140 52 140 41 81 105 13 2 2 5-5-26

2/3 Port Valve

C.O. 4 220V AC 50/60Hz 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 10 5 24V DC 6 12V DC 7 240V AC 50/60Hz 15 2 9 Other 20 3 Option 25 4 1 1 1 2 Valve size 5 to 7 32 5 1 4 1 2 40 6 50 7 Note) Only air operated type.

70pvpump

N03 T03 NPTF 1/4 Threads Rc 1/4 Threads G 1/4 Threads NPT 1/4 Threads P11 P11F Compact, lightweight (Without foot) P11N P11T PAP331 (Assembled in clean room) NPTF 1/4 Threads Rc 1/4 Threads G 1/4 Threads NPT 1/4 Threads P13 P13F 140 mm 120 mm P13N P13T NPTF 1/4 Threads 110 mm Option Reset button Weight: 2.1 kg Air operated type is also standardized.

SFOD-OMT0005CN

0 () 1 2 () 3 () 4 5 6 1 7 8 9 ON 10 11 12 13 1 14 2 15 Word2/ Word Bit 0 OFF ON*1 1-7 () 2 8-9 1:ABS() 2:INC() *2 10-15 () Word3 Word Bit 3 0-15 1 1 mm/s Word4,5 Word Bit 4 0-15 () (-)(+)*3 0.01 mm 5 0-15 () Word6 Word Bit 6 0-15 1 *1 1 mm/s 2 *1 ON ONOFF PLC *2 1(ABS)2(INC) *3 20(P.83) -39- Word7 Word Bit 7 0-15 1 *1 1 mm/s 2 Word8 Word Bit 8 0-15 *1 1% Word9

ZR

Dimensions: ZR1-FX Circuit diagram Suction filter 1 1 1 1 1 1 (Mounting hole) Suction filter M5 PD port (Vacuum release pressure port) Remove tha plug from PD port at external release.

Vacuum Pad

Qmax 55.5 C = Qmax: Max. suction flow rate L/min (ANR) C: Conductance [dm3/(sbar)] Front matter 14 Model Selection 7 Vacuum Equipment Selection Example #Transfer of Semiconductor Chips Selection conditions: (1) Workpiece: Semiconductor chips Dimensions: 8 mm x 8 mm x 1 mm, Mass: 1 g (2) Vacuum piping length: 1 m (3) Adsorption response time: 300 msec or less 1.

EXxx-OMW0014CN

Diagnostics type 1 . 5-1 Diagnostics type 1 Byte 0 General diagnostics 1 1 General diagnostics 2 2 Valve diagnostics 1 3 Valve diagnostics 2 General diagnostics 1 . 5-2 General diagnostics 1 Bit 0 System fault 0Diagnostics type 1Diagnostics type 1 1 Valve-coil(s) short circuit 0() 1 1 2 Module error 0 1 1 3 Changed module layout 0 1 1 4 US1 Diagnostics 0US1 ON 1US1 (DC19.2 V )

4-channel Flow Monitor ( compatible)

Bit offset Item Notes 0 CH1: OUT1 output 0: OFF 1: ON 1 CH1: OUT2 output 0: OFF 1: ON 2 CH2: OUT1 output 0: OFF 1: ON 3 CH2: OUT2 output 0: OFF 1: ON 4 CH3: OUT1 output 0: OFF 1: ON 5 CH3: OUT2 output 0: OFF 1: ON 6 CH4: OUT1 output 0: OFF 1: ON 7 CH4: OUT2 output 0: OFF 1: ON 8 CH1: Diagnostics 0: OFF 1: ON Out of CH1 display range (When HHH and LLL are displayed). 9 CH2: Diagnostics 0: