Series VQ Metal Seal/Rubber Seal Body Ported

Plug for cylinder port Silencer for EXH port Double check block Individual SUP/EXH DIN rail mounting SY Built-in silencer SYJ Blank plate Name plate SX VK VZ VF Except for S kit Except for L kit Except for C kit Except for C kit Except for C kit Except for C kit VFR VP7 P.1.10-26 P.1.10-21 VP4 VQ Except for S kit Except for S kit Except for S kit Except for S kit VQ4 VQZ P.1.10-66 P.1.10-

CE

J F C X B + Stroke L Z M A + Stroke E T 2-P (port size) I Q Metal connector Made by TAJIMI R04-J8M7.3 15.5 M14 x 1 38 (mm) G A C D E F H J K B I Bore size (mm) 32 40 50 63 Standard stroke 64 131 27 16 45 49.5 M14 x 1.5 4.5 14 90 14 50, 75, 100, 125, 150, 175, 200, 250, 300 71.5 177 27 16 52 57 M14 x 1.5 5 14 136 24 100, 125, 150, 175, 200, 250, 300, 400, 500 85.5 200, 300, 500 193 32 20 64

PSxx-OMT0001CN

-2No.PS-OMT0001CN-E 1 / 1 1.5 *3) *3) 1 1 () -3No.PS-OMT0001CN-E 1 SMC 100 1 -4No.PS-OMT0001CN-E 1 / (5 m ) CE 50 N 30m DC(-)() () IP67IP65 -5No.PS-OMT0001CN-E 1 42 LCD VX2 (2 )AR20 () -6No.PS-OMT0001CN-E 2 (0.01mm0.03mm0.02 mm0.15 mm0.05 mm0.30 mm) ON()/OFF()() (A)() (B)() (C)(B)() -7No.PS-OMT0001CN-E 2 2 DIN 9 F 0.010.03mm 0.020.15mm 0.050.30mm G H 7 10 B Rc1/8 4

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

ZP

F 4-9.5 F 4-8 4-6 3-6.5 4-5 G 3-4 Y 3.5 Y 6 E E E Y 8 10 6 34 40 18 C C C A B D A A B D B D Dimensions Dimensions Dimensions (mm) (mm) (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41.4 28.4 43.2 20.5 30 13 63 65.1 45.5 67.6 31.5 50 4.5 21.5 100 103.1 68.6 106.7 47.5 80 35.5 ZP50HB ZP80HB ZP125HB 50 51.9 35.7 54 24 40.5 16.5 80 83 58.4 85.1 37

IZx-OMP0064

mA Residual voltage 1 V or less (Load current at 100 mA) Max. load current: 100 mA Residual voltage 1 V or less (Load current at 100 mA) Max. applied voltage: 26.4 VDC Max. load current: 100 mA Residual voltage 1 V or less (Load current at 100 mA) Max. load current: 100 mA Residual voltage 1 V or less (Load current at 100 mA) Max. applied voltage: 26.4 VDC Maintenance detection signal Output

LECA6_C

LE ,, () EMG 1000 1 54 - /Best Pneumatics No UL ,UL1310 Class2 142 55 - 143. 90~100 DC24VSVON a) b) c) d) e) D 100 56 - 144. 1. 2. 3. 4. 5. 6. 7. 8. -10603585% 57 - 145. 5 146. SVRE OFF [BK RLS]DC24V [BK RLS] [BK RLS]DC24V [BK RLS] EMG /LEC 58 - 15. 15.1. / 15.2 ON 59 - 5 () 60 - 15.3 50mm 15.4 ( ) 61 - 15.5 15.6 D 100 15.7 62 - 16. , , (), 16.1 /P.16 4.

2-Color Display Digital Flow Switch Series PFM

Analog Voltage Output (1 to 5 V) Analog Current Output (4 to 20 mA) 5 20 Analog output [mA] Analog output [V] Model Max. rated flow value [l/min] Model Max. rated flow value [l/min] PFM710--C/E PFM725--C/E PFM750--C/E PFM711--C/E PFM710--D/F PFM725--D/F PFM750--D/F PFM711--D/F 10 10 (5) 1 4 25 25 (12.5) 50 50 (25) 00 0 0 100 100 (50) Max. rated flow value Max. rated flow value ( ): Fluid

7

d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) CKQ D-M9ANote 2) BMA3-040S (A set of a, b, c, e) BMA3-050S (A set of a, b, c, e) BMA3-063S (A set of a, b, c, e) Auto switch Switch bracket (Resin) Transparent (Nylon)Note 1) d e White (PBT) c Switch holder b Auto switch mounting screw a * Band (a) is mounted so that the projected part is on the internal side (contact side

Rotary Cylinder Series MRQ

F: Angle adjustment range 5 E: Angle adjustment range 5 E: Angle adjustment range 5 B port Angle adjustment screw A port Clockwise rotation 0 8 0 e gl 10 n Allowable Lateral Load to the Piston Rod End a e nt gl e an m st t en u dj m a m st u ju m i in ad M F: Angle adjustment range 5 m u im Using friction fittings makes it easier to mount the load to the piston rod end. ax 0 M 7 M 1 in e

Compact and Lightweight

ZA A B t 2 x D ZX C ZM ZL ZH ZH ZH ZH -X267 ZH13 to 20DA 2 x D B ZHP A F E C ZU VQD-V Long clamping screw set for 1 station required for assembly needs to be ordered separately.

CP95

63 30 16 190 16 20 210 50 100 12 110 90 16 12 126 153 100 60 100 120 75 35 16 205 14 20 140 25 230 110 60 20 75 16 6.5 230 220 71 14.5 150 178 120 6-13-10 10 Series CP95 ISO/VDMA Cylinder: Standard Type Double Acting w/ End of Stroke Cushioning Dimensions: Cylinder Mounting Accessory C, D, E and CR [First angle projection] Mounting style (C) Mounting style (D) CJ1 CJP CJ2 CM2 CG1 Bore size

CP95

CS95-50 63 CS95-63 80 CS95-80 100 CS95-100 Seal kits consist of items !3 to !

Compact Cylinder Series CQS

Basic style (Through-hole/Both ends tapped common): CQSKW/CDQSKW 12 16 Auto switch Minimum lead wire bending radius 10 2 x 2 x OB counterbore H thread effective depth C F Q Width across flats K1 2 x M5 x 0.8 2 x 2 x OA effective depth RA Width across flats K2 I SMC T D M E SMC 2 x N through M E RB RB 5 Flat washer 2 pcs.

LECP6_C

(1) D 51 - 1-149 RESET SVON (1) D 1-150 D RESET SVON (1) 1-192 E ON(SVON ON) 1-193 E ONSVON ON 1-194 E 1-195 E 1-196 E EEPROM 1-197 E EEPROM 10 CPU CPU CPU 1-198 CPU E 1 SV1.00 RESETSVONSETUP 52 - 13. / A 50mm () () 5m 5m 10% 15m 20% 53 - 14 / 14.1 LE () EMG 1000 1 54 - /Best Pneumatics No UL UL1310 Class2 14.2 55 - 14.3 90~100 DC24VSVON a) b) c) d) e) 56 -

Lubrication Equipment

A B 63 63 80 85 90 100 C Port size Rc(PT) INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 Model No. 1/4 15 15 15 20 22 22 141 164.5 170 180 230 251 3/8 1/4 , 3/8 , 1/2 3/4 B C D E F Port size Rc(PT) 3/4 , 1 1 Model No. A 1 2 150 165 42.7 76.3 45 65 40 60 35 40 80 80 ALBA90-10 ALBA90-20 1.17-24

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

A A B C D E F A B C D A B C D A B C D A B C D Tubing O.D. PA 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" 1/8" PAX 1/8" 1/8" PB 1/4" 1/4" 1/4" 1/4" 3/8" 3/8" 3/8" 3/8" 1/2" 1/2" 1/2" 1/2" 3/4" 3/4" 3/4" 3/4" 1" 1" Note) For each body class, the second and later numbers or symbols indicate reducing.

Power Clamp Cylinder

90 CKZT80-A015B 30 to 90 80 CKZ80-42 3680N-R A B C 30 to 105 CKZ80-42 3680N-R D E F 30 to 105 For mounting bolt, a hexagon socket head cap screw and a spring washer No. 2 are recommended.

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil G R Y Brake 50W 100W 200W 1 2 3 None With brake Nil K Power supply voltage Stroke 100/110VAC 50/60Hz 100/115VAC 50/60Hz 200/220VAC 50/60Hz 200/230VAC 50/60Hz Without motor Lead screw lead 1 H B C F A D E 8mm 12mm 20mm 5mm 10mm 25mm 40mm 2 0 Lead screw type The tables above show the definition for each symbol only and cannot