ZR

Example) ZR100-K15MZ-E . 1 ZR1-RV3 . 1 13-3-37 37 Series ZR Valve Unit: ZR1-V Specifications ZR1-V Valve unit part no.

Cylinder

~I ~--~~ K ~~ P~ ' ~k I -TFunnion Pin' . , nue ' :e In . L L 1===:: . e ~l Nut ftO'a E . d Nilt ;1 ' , 0 , d d u {} B I I H B ILH ~ I Model j Bore,size(rnm} . d , I .Ji'.. ..I ~. e ~:C _ ~1IlIO

CRQ2

2 @1 e u o t @3 !8 @0 @0 @2 !4 !7 !1 !9 !2 @1 @4 e u o t @3 !8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !

CG5-S

X165US inch rod option dimensional changes R V Integral clevis type (E)/CG5ENS Dim.

Guide Table Series MGF ø40, ø63, ø100 1

Bore size/ Standard stroke (mm) 40 30, 50, 75, 100 63 30, 50, 75, 100 100 30, 50, 75, 100 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

Vacuum Pad: Ball Joint Type

Q 8 3 5 Y Applicable tubing O.D.Q R R F F Hexagon width across flats 12 Hexagon width across flats 10 Hexagon width across flats 2 E Hexagon width across flats 3 E D C D C 2 2 A A B B Dimensions A Dimensions A (mm) B (mm) B C D E F Y C D E F N Model Model ZPR10F-0-B5 ZPR20F-0-B5 10 12 10 12.5 23.4 39.5 1.5 M5 x 0.8 20 22 ZPR13F-0-B5 ZPR20F-0-B8 13 15 M8 x 1.25 23.9 12.5 15.5 29.3 46.5 10.5

Lightweight and Compact

Description w q DI filter vessel (resin) w Mounting bracket Circulating fluid return port e DI filter inlet tube !0q r DI filter outlet tube t Tapping screw (4 pcs.) u y Mounting screw (4 pcs.) Circulating fluid outlet To circulating fluid outlet u DI control piping assembly e i DI sensor assembly o Nipple (2 pcs.) o !

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) D Model B d H C SNJ-015A Y M10 x 1 3 14 16.2 E SN-015A M14 x 1 5 19 21.9 SNJ-010A M8 x 1 3 12 13.9 C A B Ball joint type: 40, 50 D E Y C A B (mm) D E Y ZP10F Model B A C 1.5 6.5 10 12 ZP13F 13 15 3 8.2 2 7 ZP16F 16 18 ZP20F 20 22 8.5 ZP25F 3 25 28 4 10.2 ZP32F 9 32 35 ZP40F 5 13 40 43 10 28 ZP50F 6 14 50 53 8 13-11-101 6 Vacuum Pad: Ball Joint Type Vertical Vacuum Entry Without Buffer

Soft Start-up Valve

description of the soft start-up valve The valve e holds the fully open condition.

Electro-Pneumatic Positioner Series IP8000/8100

122 25% 22.5 MPa 1 E ELECTORO PNEUMATIC IP8100 P O S I T I O N E R DA 50% 75% G1/2 Electric conduit 35 100% 4 x M8 x 1.25 depth12 Female for rear mounting View A 125 2 x M8 x 1.25 depth12 Female for side mounting 194 With optional resin cable clamp Applicable cable O.

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad diameters: 10, 13, 16, 20 25, 32, 40, 50 rp ti on so ad on r sl fo a nt al e e d id w e or p ty k t s in u rf o j a ll c a e B s Series ZPT: Vertical vacuum entry type Series ZPR: Lateral vacuum entry type One-Touch fitting Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad diameters: 10, 13, 16, 20, 25, 32, 40, 50 Pad materials: NBR, Silicon rubber

Magnet: Built-in, Mounting: Axial Foot, Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 100mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A53--Reed, DC Volt >5<24, LED, Lead Wire or Prewied Connector: -, Number: -

Magnet: Built-in, Mounting: Axial Foot, Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 100mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A54--Reed, DC Volt >5<24, AC Volt <200, LED, Lead Wire or Prewied Connector: 3m, Number: -

Magnet: Built-in, Mounting: Axial Foot, Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 100mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: B54--Reed, DC Volt >5 <24, AC Volt <200, LED, Lead Wire or Prewied Connector: 3m, Number: -

Magnet: Built-in, Mounting: Axial Foot, Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 1100mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A59W--Reed, DC Volt >5<24, 2-color Indication, 2 Wire, Lead Wire or Prewied Connector: 3m, Number: -

Magnet: Built-in, Mounting: Axial Foot, Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 125mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: F59--Solid State, Gen. Purpose, 3 Wire NPN, Lead Wire or Prewied Connector: 3m, Number: -

Magnet: Built-in, Mounting: Axial Foot, Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 125mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: J59--Solid State, Gen. Purpose, 2 Wire, Lead Wire or Prewied Connector: -, Number: -

Magnet: Built-in, Mounting: Axial Foot, Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 150mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A54--Reed, DC Volt >5<24, AC Volt <200, LED, Lead Wire or Prewied Connector: 3m, Number: -

Magnet: Built-in, Mounting: Axial Foot, Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 200mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: J59--Solid State, Gen. Purpose, 2 Wire, Lead Wire or Prewied Connector: 3m, Number: -

Magnet: Built-in, Mounting: Axial Foot, Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 250mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A54--Reed, DC Volt >5<24, AC Volt <200, LED, Lead Wire or Prewied Connector: 3m, Number: -