Intrinsically Safe Valve MPa) Operating pressure range 15 to 100 psi (100 kPa to 0.7 MPa) External pilot operating pressure range 2-position single 35 to 100 psi (0.25 to 0.7 MPa) Pilot pressure range 2-position double 35 to 100 psi (0.25 to 0.7 MPa) 3-position Based on IEC 60529 Note)Impact resistance: No malfunction occurred when tested in the axial direction and at the right angles to the main valve and armature
Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300
Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300
/115 VAC) p. 12 Applicable to DI Water Piping p. 32 Water-cooled Refrigeration (Single-phase 100/115 VAC) p. 12 Inverter Pump Mounted p. 33 Specifications High-Pressure Pump Mounted p. 34 Air-cooled Refrigeration (Single-phase 100/115 VAC) p. 13 With Feet/Without Rack Mounting Brackets p. 35 Water-cooled Refrigeration (Single-phase 100/115 VAC) p. 13 Removed Parts p. 35 HRR012/
Bearing Type: L (Ball bushing bearing), Bore Size: 12mm, Port Type: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 25mm, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: SDPC (0.5m Cord Length, M12-4 Pin Connector)
Bearing Type: L (Ball bushing bearing), Bore Size: 12mm, Port Type: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 50mm, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal
Bearing Type: L (Ball bushing bearing), Bore Size: 12mm, Port Type: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 40mm, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal
Bearing Type: L (Ball Bushing), Bore Size: Ø16 mm, Port Thread Type: Bore 16: M5 x 0.8; Bore 20-100: Rc, Stroke: 125 mm, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 0.5m [Or None in the Case of No Switch], Number: S (1 pc.]
Bearing Type: L (Ball bushing bearing), Bore Size: 16mm, Port Type: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 10mm, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal
Bearing Type: L (Ball bushing bearing), Bore Size: 16mm, Port Type: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 20mm, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal
Bearing Type: M (Slide bearing), Bore Size: 20mm, Port Type: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 200mm, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: S (1 pc.)
Bearing Type: L (Ball bushing bearing), Bore Size: 32mm, Port Type: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 25mm, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)
Bearing Type: M (Slide bearing), Bore Size: 12mm, Port Type: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 10mm, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: L (3m)
Bearing Type: M (Slide bearing), Bore Size: 12mm, Port Type: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 50mm, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: L (3m)
Bearing Type: M (Slide bearing), Bore Size: 12mm, Port Type: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 40mm, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)
Bearing Type: M (Slide bearing), Bore Size: 16mm, Port Type: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 150mm, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: SBPC (0.5m Cord Length, M8-4 Pin Connector)
Bearing Type: M (Slide bearing), Bore Size: 16mm, Port Type: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 150mm, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: SBPC (0.5m Cord Length, M8-4 Pin Connector), Number: S (1 pc.)
Bearing Type: L (Ball bushing bearing), Bore Size: 40mm, Port Type: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 50mm, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: Z (5m)
Bearing Type: M (Slide bearing), Bore Size: 12mm, Port Type: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 20mm, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: L (3m)
Bearing Type: M (Slide bearing), Bore Size: 12mm, Port Type: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 75mm, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: Z (5m)