XM, XY

9 9 486 Stainless steel High Vacuum Angle/In-line Valve XMC, XYC Series Dimensions XYC-25, 40/In-line type C D G C B J H 45 E A Fn (KF flange) (mm) Model A 85 115 B 48 66 C 1 2 D 23.5 38 E 40 55 Fn G 64 84 H J XYC-25 XYC-40 100.2 130 26 41 28 36 XYC-50 to 80/In-line type C D G Fd XLA C XL (K flange) XLQ XM XY XM XY B DH J XSA K XVD 45 XGT CYV A Fn (KF flange) E M (mm) Model A 121 148 177

MHZ

B 5.7 7 9 12 C 2 2.5 4 5 MM M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 A 3 4 5 6 B 5.7 7 9 12 A 3 4 5 6 Model MHZL2-101 MHZL2-161 MHZL2-201 MHZL2-251 Model MHZL2-102 MHZL2-162 MHZL2-202 MHZL2-252 MHY MHW MRHQ Flat Type Fingers [3] Misc.

MHZ

B 5.7 7 9 12 C 2 2.5 4 5 MM M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 A 3 4 5 6 B 5.7 7 9 12 A 3 4 5 6 Model MHZL2-101 MHZL2-161 MHZL2-201 MHZL2-251 Model MHZL2-102 MHZL2-162 MHZL2-202 MHZL2-252 MHY MHW MRHQ Flat Type Fingers [3] Misc.

Tie-rod Type Hydraulic Cylinder

Hs Auto switch 12 D-B5/B6 15 22.5 A B 33 410 Auto Switch Mounting CHA Series Auto Switch Proper Mounting Positions (mm) D-G5/K59 D-G5W/K59W D-G59F/G5BA D-G5NT D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-F5/J59 D-F5W/J59W D-F59F/F5BA D-F5NT D-G39/K39D-A9/A9V D-A5/A6 D-A59W D-B5/B64 D-B59W D-A3/A44 Bore size (mm) CHQ A B A B A B A B A B A B A B A B A B A B A B CHK 40 20.5 21.5 17 18 22 23 12.5 13.5 10.5

Speed Controller: Standard Type Series AS In-line Type

Description Material AS800 AS900 y u i JIS B 2401 P-7 JIS B 2401 P-7 AQ O-ring NBR u O-ring O-ring Spring NBR NBR Stainless steel JIS B 2401 P-12 JIS B 2401 G-50 14115 JIS B 2401 P-16 JIS B 2401 G-65 14124 JIS B 2401 P-48 JIS B 2401 P-38 O-ring NBR ASV i AK ASS Dimensions: AS420/500/600 Dimensions: AS800/900 ASR ASF 2-Port size 2-Port size Dimensions Dimensions L1 L2 L4 Min.

1

Proper Mounting Auto Switch Position (Detection at stroke end) 16 to 25 Auto switch (Sensor section) 22 Indicator light B A 21.6 11 22 U Bore size (mm) U B A 16 23.5 5.5 8 64.5 4 20 25.5 7 8 Auto switch (Amplifier section) 25 28.5 7.5 8 Lead wire length D-F7NJL: 3 m D-F7NJZ: 5 m Lead wire length: 3 m 32 to 63 U A 21.6 B Lead wire length: 3 m Auto switch (Amplifier section) Indicator light

0.01

T U U U U E L E E E E L S L L L S S S S L L L L L 6 9 6 9 6 9 6 9 6 9 IN IN IN MPa MPa MPa MPa MPa Right Left Right Bracket DIN rail mounting bracket DIN rail mounting bracket Stations 1 Stations 1 Stations 1 2 3 IISA2NSR-1B1 set (1 station manifold part number) ISA2-GE41P1 set (Air catch sensor part number) IISA2NSR-3D1 set (3 stations manifold part number) ISA2-HE41P 3 sets (Air catch sensor

IR1000/2000/3000

x 1.5 NBR O-ring JIS B 2401 P3 JIS B 2401 P4 JIS B 2401 P5 NBR O-ring (1) (1) (1) P36203015 NBR Seal (A) P36203016 NBR Seal (B) KT-IRV1000 KT-IRV2000 KT-IRV3000 Repair kit no.

S070

B01 M3 female screw M5 female screw Stations Station 3 2 1 D side U side 02 03 2 stations 3 stations 20 20 stations Note) Maximum of 20 stations Electrical entry 3 1 Grommet/Plug lead C 2 How to Order Valves S070 B 5 B G Body type Electrical entry G C Grommet Plug lead with light/surge voltage suppressor Body type Base mounted with screws Symbol B Power consumption Pressure specification

Rotary Clamp Cylinders

+0.05 B L U C O L I thread effective depth J (3.3) T S 5.5 D C 4 x G through R + Clamp stroke Z X 2 x 4 x H counterbore K Q + 2 x Clamp stroke A P Both ends tapped: MKA (mm) A B Model MKA MKA50 MKA63 32 40 10 M6 x 1.0 14 M8 x 1.25 18 M10 x 1.5 R + Clamp stroke (Basic) (mm) A B C D M N G H I J K L O P Q R S T U V TN TF X Yh9 Z Model 0.1 0.2 0 0.062 MKB32 MKB40 MKB50 MKB63 14 30 0.15 20 34

High Purity Fluoropolymer

4 4 5 5 6 6 Applicable tubing size (inch) Class Symbol E T P U F Type Union elbow Union tee Panel mount union Union Union flange 1 2 1 2 1 2 3 1 2 1 2 1 2 A A B C A B A B A B A B 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" Note 1) For each piping diameter for each body size, the second

Serial Transmission System Series EX250 Series EX500

For 3 stations For remote I/O A1W DeviceNet PROFIBUS-DP CC-Link 16 For 16 stations A2W 0 Without SI unit Stations Ports 1, 3, 5 position Symbol 02 Stations 2 stations Note U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 16 stations) Note 1) Double wiring specifications 08 02 8 stations 2 stations Note 2) Supply/Exhaust block assembly specification Specified

VCW

6 to 12 LVA 27.5 F Q S F (Q) 34 LVH LVD LVQ 25 U LQ R C R C LVN (44) G1/2 TI/ TIL E B A H D E (S) G1/2 2-P Port size PA B A H D 2-M Thread depth N 2-P Port size PAX 2-M Thread depth N L PB L K K N.C.

R

T A U T O S W I T C H D O U B L E R O D E N D NCRA1BW30 D I M E N S I O N S W I T H O U T A U T O S W I T C H D O U B L E R O D E N D NCRA1BW50~100 L G H J K L M N S* U UU W P A B C D DD F Model (NPTF) -0.000236 -0.000669 -0.000236 -0.000669 -0.000276 -0.000787 -0.000276 -0.000787 0 -0.00205 0 -0.00244 0 -0.00244 0 -0.00244 7/16 1.42 5/16-18UNC Depth0.31 0.2 9/16 0.79 0.59 5.67 (6.97) 3.86

HEC_001W-E

B a u d R a t e M O D E < 1 2 0 0 b / s 3. Parity Bit Setting range : Without (no parity), Odd, Even Indicated content : Parity bit (Ex. : Without) Function : Sets parity bit for communication. P a r i t y B i t M O D E < W i t h o u t 4. Data Length Setting range : 7Bits, 8Bits Indicated content : Data length(Ex. : 8Bits) Function : Sets data length for communication.

Compact Rotary Actuator Series CRQ2

2 @1 @3 e u o t @2 !8 @0 @0 !2 !9 e @0 @1 o t u !8 @0 @2 !1 !4 @3 w i !5 y q r q w r y !5 !

CLA

Operation , A B ~ Sol.

A_HEC-OM-I009

This item is U n i t N u m b e r M O D E < 0 applicable only when multiple units are used. 2. Baud Rate B a u d R a t e M O D E < 1 2 0 0 b / s Setting range : 600, 1200, 2400, 4800, 9600, 19200b/s Indicated content : Baud rate (Ex. : 1200b/s) Function : Sets baud rate for communication. 3.

Air cylinder

(The tightening torque should be about 2 to 3 Nm.) (5) Modification of the detecting position should be made in the condition of 3. 16 Table 3 Table 4 17 Table 5 Auto switch model D-Y59 D-Z7 D-Z80 D-Y69 D-Y7P D-Y7H D-Y7W D-A3 D-A44 D-G39 D-K39 D-M9 D-M9V D-M9A D-F5 D-J5 D-J51 D-Y7BA D-P4DW D-A5 D-A6 D-A9 D-A9V Bore size A B A B A B A B A B A B A B A B A B 32 10 6.5 14 10.5 7.5 4 7.5 4 7 3.5

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

M4 mounting hole A B 1 0 A B 1 0 A B 1 0 A B 1 0 9 61.5 A A A A R4.5 26 62.5 97 = 4.5 (5.5) (35) (L3) (5.2) 52 (L4) Stations D side U side 1 2 3 4 5 6 7 8 n 2-C6 P(SUP) port P A P A A A A A A A 24.5 (11) 13.5 R B R B B B B B B B (7.5) 7 2-C6 R(EXH) port 19.2 P = 11 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken