Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

D B 16.5 3.5 18 14 13 20 6 +0.030 0 depth 2.5 2.5 6 E 5 2 x M4 x 0.7 Piping port F QL 6 13.5 Prepared hole diameter 3.3 2 x M3 x 0.5 (Plug: M-3P) 170.05 6 (fitting seat surface dimension) M3 x 0.5 Vacuum suction port Stroke: S M 1 Mounting base side B D Piping port A 2 x M3 x 0.5 A 5 5.5 3.2 J 2.4 Z Section AA 3.5 depth 2 2.5 +0.030 0 7 +0.030 0 depth 2 2.5 Q QL 11-/22-MXPJ6-10 4 x M3 x 0.5

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

D B 16.5 3.5 18 14 13 20 6 +0.030 0 Depth 2.5 2.5 6 E 5 2-M4 x 0.7 Piping port F QL 6 13.5 Prepared hole diameter 3.3 2-M3 x 0.5 (Plug: M-3P) 6 (fitting seat surface dimension) 170.05 M3 x 0.5 Vacuum suction port Stroke: S M 1 Mounting base side B D Piping port 2-M3 x 0.5 A 5 5.5 A 3.2 J 2.4 Z Section AA 3.5 Depth 2 2.5 +0.030 0 7 +0.030 0 Depth 2 2.5 Q QL 11-/22-MXPJ6-10 4M3 x 0.5 depth

VXP21/22/23

-8/ 2 0 # 7 -. ,. 8/ 2 0 ( 7 8 7 # 7 # 7 2 0 -8 73 2 0 # ./ Material VXP227 VXP238 VXP239 2 0 ,,. 8/ 8/ ./ ./ 2 0 ! "#! &*)! '$()! $%&' 2 0 17-3-43 2 The VX series will be revised shortly. Series VXP21/22/23 Normally Closed (N.C.)

3

S. (0 to 50C) 2% F .S.

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

and speed of 500mm/s.

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

adjusting bolt RB 2015 with adjusting bolt RB 0806 with adjusting bolt RB 1412 with adjusting bolt With adjusting bolt With adjusting bolt With adjusting bolt With adjusting bolt With adjusting bolt With adjusting bolt With adjusting bolt Configuration and shock absorber Fine stroke adjustment range (mm) 0 to 5.6 0 to 6 0 to 11.5 0 to 12 0 to 16 0 to 20 0 to 25 Stroke adjustment range When

High Vacuum Angle Valve

Temperature distribution of the 120C specification Comparison with a KF25 flange 140 e, r, t 120 eBody 1 Temperature [C] 100 rBody 2 tBody 3 80 q, w 60 40 Heater wBellows 20 qValve 0 0 30 60 90 Time [Minute] Lightweight, Compact Large conductance, small body, excellent resistance against fluorine corrosion (body) XLA series Model A1 [mm] B [mm] Weight [kg] Conductance1 [L/s] XLA-16-2 40 108

Booster Regulator Series VBA1110 to 4200 1

T1 [s]: Charge time by P2 and P1 in charge characteristics table T2 [s]: Charge time by P3 and P1 in charge characteristics table Z [pc.]: Number of booster regulators 100 100 200 Provide requisite conditions for selection. 1 29 0. 5 0. 8 Tank capacity (l) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area:

TABLE OF CONTENTS

Body Brass Body S. S.

CJP

Symbol A A' Bore size (mm) NN MM K J H GB GA E D C CD B CK Q R 6 10 15 +0.040 0 3 M3 x 0.5 8 6 17 11 6 10.5 3 16.5 14 4 9 7 7 M10 x 1.0 0 0.5 17 +0.065 0 5 M4 x 0.7 8 7 20 17 6 13 5 20 15 6.5 12 8 10 M12 x 1.0 0 0.5 22 +0.065 0 6 M5 x 0.8 8 9 24 18.5 6 15.5 6 24.5 20 8 14 10 12 M14 x 1.0 Symbol Z S 5 st 10 st 15 st 20 st 30 st ZZ Bore size (mm) 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15

CJP

Symbol A A' Bore size (mm) NN MM K J H GB GA E D C CD B CK Q R 6 10 15 +0.040 0 3 M3 x 0.5 8 6 17 11 6 10.5 3 16.5 14 4 9 7 M10 x 1.0 7 0 0.5 17 +0.065 0 5 M4 x 0.7 8 7 20 17 6 13 5 20 15 6.5 12 8 M12 x 1.0 10 0 0.5 22 +0.065 0 6 M5 x 0.8 8 9 24 18.5 6 15.5 6 24.5 20 8 14 10 M14 x 1.0 12 Symbol Z S 5 st 10 st 15 st 20 st 30 st ZZ Bore size (mm) 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15

Process Pump

With nut PAF341 S S 13 0 1 X68 Fitting type Fitting type Products using stainless steel parts (Body tightening bolts, switching valves, etc.)

Ejector Valve Unit, Series ZYY/ZYX

0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 10 20 0 0 0 5 10 15 20 25 Supply pressure MPa Suction flow rate l/min (ANR) Supply pressure MPa Suction flow rate l/min (ANR) ZY -10S Max. vacuum pressure: 84KPa {630mmHg} Y3 X3 ZY -10L Max. vacuum pressure: 53KPa{400mmHg} Y3 X3 Exhaust characteristics Flow rate characteristics Exhaust characteristics Flow rate characteristics

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Load mass kg Load mass kg m s m s Type of impact s m 1 m 2 Kinetic energy E1 Thrust energy E2 Fs Fs + mgs Fs mgs Absorbed energy E E + E Symbols : Speed of impacting object (m/s) m: Mass of impacting object (kg) F: Cylinder thrust (N) g: Gravitational acceleration (9.8m/s) s: Shock absorber stroke (m) Note) The speed of the impacting object is measured at the time of impact with the

Air Cylinder NCY2 Series Magnetically Coupled Rodless Cylinder

14 ' 140"F {-10-+60'C} 2 16 inlsec {50-400mn/s} Urethane cushion at both sides [lax. operating pressure Min. operating pressure Ambient and fluid temperature Operating piston speed Cushion Lubrication Stroke tolerance 0-9.gstlb6s, 10-39.4st: tbs, 39.sst-:13?

NCY2 series

14 ' 140"F {-10-+60'C} 2 16 inlsec {50-400mn/s} Urethane cushion at both sides [lax. operating pressure Min. operating pressure Ambient and fluid temperature Operating piston speed Cushion Lubrication Stroke tolerance 0-9.gstlb6s, 10-39.4st: tbs, 39.sst-:13?

PSE100

Input set point value for OUT2 (4) "OUT2(4) mode" is entered by pressing the button "S". By pressing the button "S" the calibration is completed.

PSxx-OMV0008CN

OFF 0.01 s 0x0x0BB8 (03000) 0.01 s 1030 0x0406 0 R/W FiL () U16 0 Y 5R.D. 0.1 1060 0x0424 0 R/W FSC () S16 0 Y -5050 -72No.PS-OMV0008CN-E () 1 3 dec hex 2 0Std 1dUAL(2 ) 2o1Lv(OUT1 ) 3o2Lv(OUT2 ) 4LinE(Line ) 5oFF() 1100 0x044C 0 R/W U8 0 Y 1101 0x044D 0 R/W Std U8 0 Y std 2 1102 0x044E 0 R/W U8 0 Y 2 2 1103 0x044F 0 R/W U8 1 Y 1820 0x071C 0 R/W Line 1 U8 0 Y Line 1 (

e-Rodless Actuator

0 Air cylinder Electric actuator Price Shock-free Machine difference Machine difference Processby-process setting Speed reproducibility Speed reproducibility 3 3 3 3 Both end position accuracy Both end position accuracy High speed operation Pushing applications 2 2 2 2 Speed control Speed control Operationability Operationability 1 1 1 1 0 0 0 0 What does e mean?

MXF

0 CX o D-X 20Data !9 !8 i !5 u !7 q !