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Output setting value at communication idling (Analogue) Analogue output, I/O UINT 2 bytes AD value Refer to "Parameter Setting" for details. 88h 0: None 1: 2 value average 2: 4 value average 3: 8 value average 89h Analogue average filter Analogue input, I/O USINT 0: -10+10 V (Analogue input unit only) 1: -5+5 V (Analogue input unit only) 2: -20+20 mA (Analogue input unit only) 3: 010 V 4: 05

64h to 83h BOOL 0=Off (Clear) 1=On (Force ON) 87h 2 Output setting value at the time of communication idling (Analogue) Analogue output, I/O UINT 88h 0=None 1=2 value average 2=4 value average 3=8 value average 89h Analogue average filter Analogue input, I/O USINT 0=-10+10 V (Analogue input unit only) 1=-5+5 V (Analogue input unit only) 2=-20+20 mA (Analogue input unit only) 3=010 V 4=05

colour Signal Cable O.D. 4.0 to 8.0 mm Electric wire cross section (Twist line) AWG26 to 22 YE=Yellow or OGWH=Orange/ White 1 Orange/ White TD+ WH=White or GNWH=Green/ White 2 Green/ White RD+ 3 Orange OG=Orange TD4 Green BU=Blue or GN=Green RD-28No.EX-OMN0011-F (3) Cable with communication connector Part number: EX9-AC 01 0EN-PSRJ Cable length (L) 01 1000 [mm] 02 2000 [mm] 03 3000 [mm] 05

colour Signal Cable O.D. 4.0 to 8.0 mm Electric wire cross section (Twist line) AWG26 to 22 YE=Yellow or OGWH=Orange/ White 1 Orange/ White TD+ WH=White or GNWH=Green/ White 2 Green/ White RD+ 3 Orange OG=Orange TD4 Green BU=Blue or GN=Green RD-34No.EX-OMO0030-E (3) Cable with communication connector Part number: EX9-AC 01 0EN-PSRJ Cable length (L) 01 1000 [mm] 02 2000 [mm] 03 3000 [mm] 05

ZB-OM00201-B Model Indication and How to Order Model Indication of the Single Unit Vacuum pump system Ejector system (1) Nozzle size Applicable supply valve and Nominal standard supply pressure Symbol nozzle Latching Large flow size (N.C.) 00 Note 1) 03 0.3 (0.35MPa) (0.4MPa) 04 0.4 (0.35MPa) (0.4MPa) 05 0.5 (0.35MPa) 06 0.6 (0.5MPa) Note1) Vacuum pump system only (2) Body type Symbol

O PERATI O N M AN U AL M i n. 0. 05 M Pa M ax. 1. 0 M Pa Fol l ow i ng envi ronm ent s l ead t o cause breakage. Envi ronm ent Low er t han 5 D o not use under f ol l ow i ng envi ronm ent . D o not use under f ol l ow i ng condi t i ons. W ARN I N G /H I N TS O N CO RRECT U SE Vi brat i on, I m pact Envi ronm ent H i gher t han /M ERI TS 60

M i n. 0. 05 M Pa O PERATI O N M AN U AL M ax. 1. 0 M Pa Fol l ow i ng envi ronm ent s l ead t o cause breakage. Envi ronm ent Low er t han 5 D o not use under f ol l ow i ng envi ronm ent . D o not use under f ol l ow i ng condi t i ons. W ARN I N G /H I N TS O N CO RRECT U SE Vi brat i on, Ai r onl y ! I m pact Envi ronm ent H i gher t han /M ERI TS 60

O . auto drai n: M i n. 0. 1 M Pa O PERATI O N M AN U AL M i n. 0. 05 M Pa M ax. 1. 0 M Pa Fol l ow i ng envi ronm ent s l ead t o cause breakage. Envi ronm ent Low er t han 5 D o not use under f ol l ow i ng envi ronm ent . D o not use under f ol l ow i ng condi t i ons. W ARN I N G /H I N TS O N CO RRECT U SE Vi brat i on, Ai r onl y !

adjustment unit 25 MY-A25L 25 MY-S25A MY-S25B 32 MY-A32L 32 MY-S25A MY-S25B 40 MY-A40L 40 MY-S32A MY-S32B 7-2 Controller Output method None NPN open collector output P PNP open collector output 3 points preset counter Counter operating power supply None AC80120V D DC24V5% Output method None NPN open collector P PNP open collector 23 7-3 Extension cable Length of cable Additional symbol 05

O . auto drai n: M i n. 0. 1 M Pa O PERATI O N M AN U AL M i n. 0. 05 M Pa M ax. 1. 0 M Pa Keep f ol l ow i ng t o operat e M i st separat or properl y. Fol l ow i ng envi ronm ent s l ead t o cause breakage. Envi ronm ent Low er t han 5 D o not use under f ol l ow i ng envi ronm ent . D o not use under f ol l ow i ng condi t i ons.

O . auto drai n: M i n. 0. 1 M Pa O PERATI O N M AN U AL M i n. 0. 05 M Pa M ax. 1. 0 M Pa Fol l ow i ng envi ronm ent s l ead t o cause breakage. Envi ronm ent Low er t han 5 D o not use under f ol l ow i ng envi ronm ent . D o not use under f ol l ow i ng condi t i ons. W ARN I N G /H I N TS O N CO RRECT U SE Vi brat i on, Ai r onl y !

(A set of band (A set of band (A set of band (A set of band and screw) and screw) and screw) and screw) and screw) BMA2-020AS BMA2-025AS BMA2-032AS BMA2-040AS BMA2-050AS D-H7BA (A set of band (A set of band (A set of band (A set of band (A set of band and screw) and screw) and screw) and screw) and screw) D-B5/B64 D-B59W D-G5/K59 D-G5W/K59W D-G5BA/G59F D-G5NT BA-01 BA-02 BA-32 BA-04 BA-05

Specifications 6 10 16 20 25 32 Bore size Air Fluid M5x0. 8 Rc1/8 Port size 0. 7Mpa Max. operating pressure 1. 05MPa Without switch: -10 to +70 (No freezing) With switch: -10 to +60 (No freezing) 50 to 500mm/s Proof pressure Ambient and operating fluid temperature Piston speed Double acting D type 0. 0125 Single acting T type 0. 0062 0. 025 0. 05 0. 1 0. 2 0. 3 Allowable kinetic energy

Terminal no. 2 24 VDC 24V SY100-61-3-05 12 VDC 12V SY100-61-3-06 100 VAC 100V SY100-61-2-01 200 VAC 200V SY100-61-2-02 With light/surge voltage suppressor (Z) 110 VAC 110V SY100-61-2-03 Terminal no. 1 220 VAC 220V SY100-61-2-04 Terminal no. 2 10 VEX-OMT0003 VEX3 Series Specific Product Precautions (3) Be sure to read before handling.

M9PAV D-M9PAV Solid State M9BAV D-M9BAV Auto Switch F7BA D-F7BA F7BAV D-F7BAV 2-color Indication Type With Diagnostic F79F D-F79F Output Solid State Auto-Switch Solid State Auto-Switch with Timer F7NT D-F7NT See separate catalog for the details of Auto-switch. 2-2-3 Options Multi Counter Extension Cable Supply voltage Nil 100 to 240 VAC Base part Number D 24VDC *1 Cable Length Connector 05

Replacement Parts for Manifold/How to Order (3) Tension bolt assembly (2 pcs. per set) ZK2 TB1 05 A Applicable stations 01 For 1 station manifold 10 For 10 stations manifold -38No. ZK2-OM00201 (4) Port plug assembly (5) Port plug assembly (Purchasing order is available in units of 1 piece.) (Purchasing order is available in units of 1 piece.)

Example: VEX1300-03 240 VAC 240V VK300-82-2-07 G36-4-01 6 VDC 6V VK300-82-4-51 12 VDC 12V VK300-82-4-06 Sub-plate and gasket part no. 24 VDC 24VDC VK300-82-3-05 48 VDC 48VDC VK300-82-3-53 Body size 2 Circuit with indicator light 12 VDC or less 24 VDC or more AC circuit Sub-plate circuit diagram circuit diagram diagram Base gasket VEX1-11-2 How to Wire DIN Terminal (VEX1101, 1201, 1301) D

colour Signal Cable O.D. 4.0 to 8.0 mm Electric wire cross section (Twist line) AWG26 to 22 YE=Yellow or OGWH=Orange/ White 1 Orange/ White TD+ WH=White or GNWH=Green/ White 2 Green/ White RD+ 3 Orange OG=Orange TD4 Green BU=Blue or GN=Green RD-40No.EX-OMP0013-E (3) Cable with communication connector Part number: EX9-AC 01 0EN-PSRJ Cable length (L) 01 1000 [mm] 02 2000 [mm] 03 3000 [mm] 05

(Drill through) Note) Dd9 L l d m H B C CJ1 D Cotter pin 3 x 18l 4 x 25l 4 x 35l 0.040 0.076 0.050 0.093 0.065 0.117 NT-03 NT-04 NT-05 NT-08 NT-10 CD-M03 CD-M05 CD-M08 10 14 22 32 40 50, 63 80 100 32, 40 50, 63 80, 100 3 4 4 44 60 82 36 51 72 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 4 4.5 5 6 8 11 13 16 17 22 27 32 41 19.6 25.4 31.2 37.0 47.3 16.5 21 26 31 39 CJP CJ2 Note) When

Part no. 25 32 40 50, 63 0.040 0.076 0.040 0.076 0.040 0.076 0.050 0.093 CD-MU02 CD-MU03 CD-MU04 CD-MU05 25 32 40 50, 63 8 10 10 14 18.2 22.2 26.2 32.2 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 17 19 22 27 6 7 8 11 19.6 21.9 25.4 31.2 23 27 31 38 16.5 18 21 26 7.6 9.6 9.6 13.4 NT-03 NT-MU03 NT-04 NT-05 A nut is attached with rod end male thread as standard. (Double rod type: 2 pcs.)