Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

P (Port size) Operation P (Port size) Model CYV15 CYV32 Caution 5/16-24 UNF 7/16-20 UNF 1. The maximum operating pressure for the vacuum rodless cylinder is 0.3 MPa.

EXxx-OMW0014CN

) Shared device (PROFIenergy) System redundancy S2 Web FW 1 Net load Vendor ID 0083h Device ID 0011h GSD GSDML-V2.3*-SMC-EX245-SPN-*.xml 38 No.EX-OMW0014CN-A 6.3.

EX600-AX_AY_AM_eng

URL http://www.smcworld.com -10 V to 10 V -20 mA to 20 mA for 2 hours each in direction X, Y and Z respectively (De-energized) 24 VDC Class2, 2 A 10 to 57 Hz: constant amplitude 0.75 mm p-p 57 to 150 Hz: constant acceleration 49 m/s2 0 V to 10 V 0 mA to 20 mA Content Content Content 0 V to 10 V 0 mA to 20 mA 0 V to 10 V 0 mA to 20 mA

JXCx-OMT0032CN

6.1 . 20 6.2 . 20 6.3 . 21 1 - . 22 7.CN3 . 23 8.CN1IF(CONT) . 24 8.1 . 24 8.2 . 26 9.CN2TB/PC . 27 9.1 . 27 10.LED . 28 10.1 LED . 28 10.2IFLED . 28 11. . 29 11.1 . 29 11.2 . 29 11.3 . 29 11.4 . 31 12. . 32 12.1 . 32 12.2 IF(IN Data) . 38 12.3 (IN Data) . 38 12.4(OUT Data) . 40 13.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

Shock absorber model Applicable bore (mm) CLS ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 101 90 25 20 11 72 67.3 12 31 39.5 Max. 16.5 4.5 3 RB1412 120 107 30 25 16 93 73.2 15 38 49 Max. 20 5.5 6 CLQ RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 Max. 25 5.5 6 MLGP Side Support RLQ Side support A MLU ML1C D-X 20Data Side support B A B C D E F G H J Part no.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Shock absorber model Applicable bore (mm) CLS ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 101 90 25 20 11 72 67.3 12 31 39.5 Max. 16.5 4.5 3 RB1412 120 107 30 25 16 93 73.2 15 38 49 Max. 20 5.5 6 CLQ RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 Max. 25 5.5 6 MLGP Side Support RLQ Side support A MLU ML1C D-X 20Data Side support B A B C D E F G H J Part no.

ML1

Cylinder EA Absorber model EB EC ED EF EY S T EH EI h i TT REA ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 101 90 25 20 11 72 67.3 12 31 39.5 4.5 3 MAX. 16.5 RB1412 120 107 30 25 16 93 73.2 15 38 49 5.5 6 MAX. 20 REC RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 5.5 6 MAX. 25 RHC Side Support MTS CC Side support A Side support B (mm) H G F J E Cylinder D Part No.

PSE200

Refer to pages 17 through 19 for general safety instructions and common precautions, and to pages 20 through 22 for specific product precautions. Controller Pressure Sensor Handling Handling Warning Warning 1. Do not drop, bump, or apply excessive impacts (980m/s2) while handling.

VS7-6

Model Effective area (With sub-plate) (mm 2) (Nl/min) Response time (2) (sec) Weight (3) (kg) 0.025 or less 0.015 or less 0.045 or less 0.045 or less 0.05 or less Max. operating rate (1) No. of positions Model 1 4 (cycle/sec.) 20 20 10 10 10 VS7-6-FG-S--Q VS7-6-FG-D--Q VS7-6-FHG-D--Q VS7-6-FJG-D--Q VS7-6-FPG-D--Q 2 (Single) 2 (Double) 3 (Closed centre) 3 (Exhaust centre) 3 (Pilot check) 27

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted

Cap AXT103-4 XT021-12 XT103-5 XT010-20 XT010-21 XT041-1 Resin Resin Bushing Spring Rubber plug for wire Round head combination screw Plug for cover r t y u i o Gasket XT013-31-2 NBR NXT030-8 !

Dedicated Controller Series LC1 Uniaxial Type

BIT 4 Stp-No.bit3 (7) 20 Step designation BIT 5 Stp-No.bit4 (20) 8 BIT 6 Stp-No.bit5 (8) 21 BIT 7 Stp-No.bit6 (21) 9 Stp-No.bit7 (9) 22 SET-ON 10 Temporarily stops the program run by means of the ON input. (3) Temporary stop HOLD READY 23 BUSY < 2 > 11 (16) Emergency stop (nonlogical input) Performs an emergency stop when ON input stops.

IZx-OMV0005

(Only the output where the overcurrent occurs) 20 Doc. no.IZ-OMV0005 4. Function 4-1. Name of Parts 5 4 3 6 1 7 2 8 No. Description Symbol Type Description 1 Nozzle Discharges ionized air Terminal Reference point for neutralization.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Shock absorber model Applicable bore (mm) CLS ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 RB1412 101 90 25 20 11 72 67.3 12 31 39.5 Max. 16.5 4.5 3 120 107 30 25 16 93 73.2 15 38 49 Max. 20 5.5 6 CLQ RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 Max. 25 5.5 6 MLGP Side Support RLQ Side support A MLU ML1C D-X 20Data Side support B A B C D E F G H J Part no.

ZSP1

From the above 2. position, turn the adjustment needle 1/4 to 1 turn clockwise. 1 kPa = 7.5 mmHg 1 kPa = 7.5 mmHg 101 101 Supply pressure (kPa) Supply pressure (kPa) Applicable adsorption nozzle range Applicable adsorption nozzle range 50 50 3. 2. 1. 20 20 ZSE ISE Right 0.2 0.3 0.4 0.5 0.6 0.7 0.3 0.5 0.7 0.9 1.1 1/4 to 1 turn Right Left PSE Adsorption nozzle diameter (mm) Adsorption nozzle

3 Port Solenoid Valve/

Refer to Piping for External Pilot Type on page 20 for selection of the check valve. Made to Order Series Compatible with Secondary Batteries 1 For details about 25A-, refer to the WEB catalog Series Compatible with Secondary Batteries/Series 25A-. How to Order 25AVG342 5DZ M X87 Fill in according to How to Order above. Note) Electrical entry can be selected only for D type.

VDW30/40-XF

Temperature: 10 to 50C Relative humidity: 20% to 85%RH (No condensation) Liquid rings may not be used. 2. Storage When not using for a long time (more than approx. one month) after use with liquid, thoroughly remove all moisture to prevent rust and deterioration of rubber materials, etc. 503

Clean Room Rodless Cylinder Series CYP ø15, ø32

Clean Room Rodless Cylinder Series CYP 15, 32 MX MTS MY CY MG CX D-X 20Data Magnetically coupled rodless cylinder for transfer in clean environments. 8-17-1 Low particle generation: 1/20 Long stroke (Max. 700 mm) (compared to previous series) High cleanliness is achieved with non-contact construction of the cylinder tube exterior and a stainless steel linear guide (specially treated).

20 to 40 C: FluorinertTM20 to 90 C: FluorinertTMFC-3283/GALDEN? HT135FC-40/GALDEN? HT200?20 to 9010(at 20 C)5.0 (at 20 C)?

20 to 40 C: FluorinertTM20 to 90 C: FluorinertTMFC-3283/GALDEN? HT135FC-40/GALDEN? HT200?20 to 9010(at 20 C)5.0 (at 20 C)?

20 to 40 C: FluorinertTM20 to 90 C: FluorinertTMFC-3283/GALDEN? HT135FC-40/GALDEN? HT200?20 to 9010(at 20 C)5.0 (at 20 C)?