High Purity Fluoropolymer

A B C A B A B A B A B 15A 20A 25A Note 1) For each piping diameter for each body size, the second and later numbers or symbols indicate reducing.

Environment

Nil Without cable 2 2 5 5 A 10 !

Speed Controller with Indicator

Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Caution: Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Warning: Danger : Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

D-H7NF D-H7BAL D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C D-C7/C8 D-C73C D-C80C D-C73C D-C80C D-B5/B6 D-G59F D-B59W A B B B B B B A A A A A Hs Hs Hs Hs 20 25 32 40 50 63 80 100 35 Series MGG Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height/End Lock Type: With Rod End Lock A B 8.5 Hs 11.5 16 Auto switch D-C7/C8 D-H7 A B 12 Hs 14.5 Courtesy of Steven Engineering

CM2

B 5(3) 5(3) 6(4) 11 A 6(4) 6(4) 7(5) 12 B 0(0) 0(0) 0.5(0) 5.5 A 0.5(0) 0.5(0) 1.5(0) 6.5 B 3(1) 3(1) 4(2) 9 A 4(2) 4(2) 5(3) 10 Hs 69.5 72 75.5 79.5 B 6(4) 6(4) 7(5) 12 Hs 60 62.5 66 70 A 7(5) 7(5) 8(6) 13 Hs 25 27.5 31 35 B 0(0) 0(0) 1(0) 6 Hs 22.5 25 28.5 32.5 A 1(0) 1(0) 2(0) 7 B A B 1.5(0) 1.5(0) 4.5(2.5) 3.5(1.5) 2.5(0.5) 4.5(2.5) 3.5(1.5) 2.5(0.5) 5.5(3.5) 10.5 4.5(2.5) 9.5 3.5(1.5

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-16 XMC-25 XMC-40 XMC-50 XMC-63 XMC-80 40 50 65 70 88 90 26 28 36 38 45 56 P.C.D 27 P.C.D 58.7 P.C.D 92.1 XYC/In-line type C D G Fd C (K flange) B J H 45 E A Fn (KF flange) (mm) Model A 85 115 129 158 189 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 64 84 95 118 142 H J XYC-25 XYC-40 XYC-50 XYC-63 XYC-80 100.2 130 178 209 268 28 36 38

KS/KX

Connection thread Applicable tubing Connection thread (With seal) 15-4-38 Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage. These instructions indicate the level of potential hazard by labels of "Caution", "Warning" or "Danger".

44

vacuum holding application such as a leak tester, since there is leakage.

HEC-OM-S008

is a communication protocol developed by Modicon.

A_HEC-OM-J017

Problem Cause Solution Connect the host and the thermocon with the following cables: A wrong connecting cable is used. A cross cable for RS-232C A straight cable for RS-485 Make the following settings of the host and the thermo-con consistent: The settings of the host and thermo-con are not consistent with each others.

Series SV

A A A A A 98.2 5.5 A B A B 58.9 17.5 29.6 56.3 12.2 Manual override Press and turn for the locking type.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Molded-case circuit breaker (Note 1, 3) Fuse Frame, rated current Magnetic contactor Driver Voltage Voltage AC [V] Class Current Power factor Power factor (Note 2) [A] AC [V] Improving reactor is Improving reactor is not used used LECSS2-T5 30 A frame 5 A S-N10 10 LECSS2-T7 LECSS2-T8 30 A frame 10 A 30 A frame 5 A 15 Mitsubishi 240 T 300 Electric Corporation LECSS2-T9 30 A frame 15 A 30 A

Base Mounted Metal Seal/Rubber Seal Series VQ

5.5 9 (4(A), 2(B) port) 9 9 9 SMC 5 3-C4, M5(1(P), 4(A), 2(B) port) M5(5(R1) , 3(R2) port) 8.7 8.7 C4: One-touch fitting for 4 M5: M5 thread < >: AC 2 position double: VQ025 0 1 15.2 15.8 12.3 5 5 Manual override A B A B (For C4) 31.5 10.5 25 18 A A B B ~ = ~ = EB P EA EB EB P EA EA 23.4 mounting holes 38 31 Lead wire length = 300 121<131> M plug connector 108<118.5> L plug connector 51 (

TABLE OF CONTENTS

X .22 (5.6) MFT 2 PLACESAS SHOWN . 2.14 (54.4) 2.14 .71 (18.0) .71 (54.4) (18.0) 1.19 (30.2) 1.19 .80 (20.3) DIA. .80 (20.3) (30.2) .60 DIA. .96 .96 (24.4) .60 (15.2) (24.4) (15.2) B A A B .94 (23.7) .38 (9.5) TYP . .38 (9.5) TYP . 1/8-27 NPT (2) PLACES 7/16-24 UNS-2A (2) PLACES .94 (23.7) 1.88 (47.6) 2.43 (61.7) . . . .

Proposals for Energy Saving

It cannot be mounted at a later time or used as a separate unit.

JXCx-OMY0008

A B-1 Brown 2 A A-1 Red 1 Cable length (L) B B-2 Orange 6 B A-2 Yellow 5 8 8m COM-A/COM B-3 Green 3 COM-B/ A-3 A 10m Blue 4 (3) Shield B 15m Cable color Terminal No. Vcc B-4 Brown 12 C 20m GND A-4 Black 13 Produced upon receipt of order A B-5 Red 7 A A-5 Black 6 Only "Robotic type cable" can be selected. B B-6 Orange 9 B A-6 Black 8 (4) 3 Signal name Terminal No.

Electric Grippers

B-1 A-1 B-2 A-2 B-3 A-3 Connector C terminal no. Signal Cable color S Standard cable Brown Red Orange Yellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer Chamfer Chamfer R R A port B port B port A port A port B port A port B port A port B port For size 40 actuators, a parallel key will be used instead of

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

B A B A B A B A B A B A B A B A B A B A B 40 10 8 6 4 4 1 5.5 3.5 3.5 0.5 0.5 0 1 0 7 4 2.5 0 4.5 1.5 12 9 50 10 8 6 4 3.5 1.5 5.5 3.5 3 1 0 0 0.5 0 6.5 4.5 2 0 4 2 11.5 9.5 63 12.5 11.5 8.5 7.5 6 5 8 7 5.5 4.5 2.5 1.5 3 2 9 8 4.5 3.5 6.5 5.5 14 13 80 16 14 12 10 9.5 7.5 11.5 9.5 9 7 6 4 6.5 4.5 12.5 10.5 8 6 10 8 17.5 15.5 100 17.5 16.5 13.5 12.5 11 10 13 12 10.5 9.5 7.5 6.5 8 7 14 13 9.5