Power Valve Precision Regulator

(MPa) (Relief exhaust) L/min(ANR) L/min(ANR) L/min(ANR) Flow (Pressure reducing supply) 1(P)2(A) 3(R)2(A) 1(P)2(A) 3(R)2(A) 1(P)2(A) 3(R)2(A) (Relief exhaust) Flow (Pressure reducing supply) (Relief exhaust) Flow (Pressure reducing supply) VEX1530 3-06 VEX1730 3-12 VEX1930 3-20 Port 2(A) pressure (MPa) Port 2(A) pressure (MPa) Port 2(A) pressure (MPa) L/min(ANR) L/min(ANR) L/min(ANR) 1(P

VCA

AXT632-69-1 AXT632-69-2 VVCA30-3A-04-2 VVCA30-3A-04-1 OR-2200-200-H VCA35--VVCA30-6-n VVCA30-4A-04-2 VVCA30-4A-04-1 Material Part no.

CE2

Cover Rod cover Unit holding tie-rod A (2 depth 1 mm hole is on the side of tie-rod for attaching unit A.)

CE2

Cover Rod cover Unit holding tie-rod A (2 depth 1 mm hole is on the side of tie-rod for attaching unit A.)

AKH/AKB Series

Port size NPT Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" From one-touch fitting to male thread B Bushing Type AKB 01 A 01 S With sealant (standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction

Speed Controller with

AS2052F-A AS1002F-A AS2002F-A 500 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 01, 23, 03, 04, 06, 07 100 08, 09 06, 07 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 400 200 06, 07 03, 04 300 50 200 100 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations AS3002F-A AS4002F-A 1500

Multi-Connector with One-Touch Fittings Series DMK

Nil P S Multi-connector Plug side only Socket side only 23 04 3.2mm 4mm (1) Loosen clamp ring A and disassemble the connector into the plug case and socket case. A Clamp ring Dimensions DMK6 44 37 36 36 Connection (1) Turn the cases while pressing them against each other until the plug case slides into the socket case at a proper position.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

2 !

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type 1

(mm) 4 6 8 10 12 (1) AS221FE-01 AS231FE-01 20, 25, 32 R 1/8 AS221FE-02 AS231FE-02 20, 25, 32, 40 R 1/4 AS321FE-03 AS331FE-03 40, 50, 63 R 3/8 AS421FE-04 AS431FE-04 63, 80, 100 R 1/2 Note 1) Elbow type only Note 2) Distinction between meter-out/meter-in types by appearance Those are distinguished by the lock nut.

Silencer 40 dB (A): High Noise Reduction Type Series ANA1

1 1 ANB1-12 280 1 4 ANB1-14 450 1 2 610 Construction/Parts/Dimensions Sound absorbing material ANB1-01 to 04 Case (PVF ) End plate JIS Symbol VEX AN Hexagonal flats ANB1-04: PP AMC Cover ANB1-06 to 14 How to Order Sound absorbing material Body Tension bolt End plate B1 03 AN Port size Symbol Connection Port size 1 8 01 1 4 3 8 1 2 3 4 02 03 04 06 10 12 14 Screw-in Hexagonal flats 1 4 1 1

AKH/AKB Series Check Valve with One-touch Fitting

Port size NPT Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" From one-touch fitting to male thread B Bushing Type AKB 01 A 01 S With sealant (standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction

Speed Controller with Uni One-touch Fitting AS Series

Reference dimensions of Uni thread after installation. 1 2 28.6 24 54.6 47.1 44.5 37.0 633 AS Series Elbow Type/Inch Size H Applicable tubing O.D. d (Hexagon width across flats) A L4 D1 L3 M D2 L1 Connecting thread T L2 H D1 D2 L1 L2 L3 L4 (1) A (2) Max.

5 Port Air Operated Valve Series VFA3000 1

1 4 3 VFA5420-02-X1 5 Body ported VFA5120-03 2 3 8 3 VFA5420-03-X1 5 VFA5144-02 2 1 8 1 4 3 VFA5444-02-X1 5 Base mounted (1) VFA5144-03 2 3 8 3 VFA5444-03-X1 5 VFA5144-04 2 1 2 3 VFA5444-04-X1 5 Note 1) With sub-plate Note 2) { }: Normal position 5-3-15 8 Series VFA5000 Dimensions: Body Ported 2 position single: VFA5120-02 03 2 position double: VFA5220-02 03 (Pilot port) (Mounting hole for

99

0.005 0.005 0.005 0.001 10 30 50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100-04 {Rc1/2} FGH200-04 {Rc1/2} FGH300-04 {Rc1/2} 0.05 0.05 0.05 Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) 0.01 0.01 0.01 0.005 0.005 0.005 0.001 10 30 50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

Outlet pressure (MPa) Outlet pressure (MPa) Set point Set point Flow rate (L/min (ANR)) Inlet pressure (MPa) 688 Regulator with Mist Separator AMR3000 to 6000 Series Dimensions AMR4000/5000/6000 M N H ARJ E AR425 to 935 G D ARX F 2 x V 2 x V AMR AMR AMR3000 R A Compact pressure switch ARM (Option) S Bracket ARP Adapter assembly (Option) T IR-A B J B L P C K PT elbow IR 2 x U IRV VEX SRH SRP

VFA3000

Dimensions: Base Mounted 2 position single: VFA514402 03 04 2 x 5.3 (6.5) M5 x 0.8 (Pilot port) (Mounting hole) (Breathing port) Max. 2 5 x , , 38 14 12 (Piping port) ( ): Value for Rc 1/2 2 position double: VFA524402 03 04 2 x 5.3 (6.5) 2 x M5 x 0.8 (Mounting hole) (Breathing port) 2 x 18 (Pilot port) Max. 2 Max. 2 5 x , , 38 14 12 (Piping port) ( ): Value for Rc 1/2 1770 Series VFA5000

Quick Exhaust Valve Series AQ

Quick Exhaust Valve Series AQ Model Excellent exhaust characteristics Large flow capacity Compact and lightweight A wide selection of models Port size Effective area (mm2) Mass (g) Model IN OUT OUT EXH AQ1500-M5 AQ1510-01 AQ2000-01 AQ2000-02 AQ3000-02 AQ3000-03 AQ5000-04 AQ5000-06 M5 x 0.8 2 2.8 25 1 8 4 5.8 45 1 8 25 25 110 1 4 35 40 105 1 4 40 42 215 8 3 60 70 205 1 2 105 115 690 3 4

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

Description Material Note q Zinc alloy Body A w Brass Handle Electroless nickel plated e Brass Body B Electroless nickel plated r Brass Needle Electroless nickel plated t Brass Needle guide Electroless nickel plated y Brass Seat ring (1) Electroless nickel plated(3) u Brass(2) Lock nut i U seal NBR o O-ring NBR !0 O-ring NBR !1 O-ring NBR 01 to 04 type !2 Bushing PBT 01 to 04 type !

Speed Controller: Standard Type Elbow Type (Metal Body) AS Series

(N specifications) AS4200-04 How to Order 01 S AS 2 2 0 0 AS3200-03 Body size AS2200-02 1 2 3 4 M3, M5 standard AS2200-01 AS1200-M5 Made to Order Refer to page 647 for details. 1 8 1 4 , standard standard standard 8 3 2 1 Lock nut option Type J Hexagon lock nut Round lock nut Nil AS1200-M3 Direct cylinder elbow type 2 Option AS1400-M3 Direct cylinder flat elbow type 4 Nil None With seal S

AMR3000 to 6000

Applicable model 02 03 04 06 10 1/4 3/8 1/2 3/4 1 8 3 Pressure gauge 3 4 5 6 1 AMR300-02/03 AMR400-02 to 04 AMR500-04 to 06 AMR600-10 3 4 5 6 1 2 Nil E2 E3 E4 E6 E10 None None With pressure switch S Nil 4 3 1/4 3/8 1/2 3/4 1 Port size Adapter assembly Thread type Symbol Port size Nil N F Rc NPT G Thread type 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the