CE2

Cover Rod cover Unit holding tie-rod A (2 depth 1 mm hole is on the side of tie-rod for attaching unit A.)

REC

cable O.D.: 6.8 to 11.5) CE1 CE2 Proper Auto Switch Mounting Position D-H7 D-H7C D-H7NF D-H7W D-H7BAL D-C7 D-C80 D-C73C D-C80C ML2B D-G39 D-K39 D-A33/A34 D-A44 D-B5 D-B64 D-B59W D-G5NTL Bore size (mm) C J G5-S A B A B A B A B A B A B CV 20 56.0 31.5 50.0 25.5 55.0 30.5 51.5 27.0 53.0 28.5 49.5 25.0 25 MVGQ 56.0 31.5 50.0 25.5 55.0 30.5 51.5 27.0 53.0 28.5 49.5 25.0 32 59.5 36.5 53.5 30.5

Self-seal Fittings Series KC

Bulkhead female union P. 77 KCE Use for transit connection of a tube and a male screw for installation of panel. 74 Series KC Self-seal Fittings M5 Half union: KCH M5 Applicable tube O.D. (mm) Effective orifice(mm 2) Weight (g) A Thread R(PT) Part No. H (Hex.)

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

bracket) are included with the above parts. 3 Series VCB Direct Operated 2 Port for Heated Water Dimensions (mm) 1in = 25.4mm Grommet: G Conduit: C Q Approx. 300 F D Approx. 280 D Q F C G1/2 C R R E E B A H 2-P Port size 2-P A 2-M Thread depth N B H Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G1/2 E B A H D 2-P Port size (S) 2-M Thread depth N L K (mm) Electrical

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Example) For 10-CQSXB25-47D, a 3mm spacer is installed inside a standard stroke 10-CQSXB25-50D cylinder.

Rotary One-touch Fittings Manifold Series KM

Series KM Rotary One-touch Fittings Manifold Construction KM11 KM12 Port A: One-touch fitting Port B: One-touch fitting Port A: One-touch fitting Port B: NPT or Rc (PT) female thread KM14 KM13 Port A: One-touch fitting Port B: One-touch fitting Port A: One-touch fitting Port B: One-touch fitting, R(PT) male thread KM16 KM15 Port A: One-touch fitting Port B: One-touch fitting stud Port A:

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

B (+) COM C(+) C (-) Reset Single solenoid type (AC) Latching solenoid type (AC) A (-) Set A (-) SOL. B (+) COM SOL. C (-) Reset C(+) Note3) The solenoid valve channel is, A-(set):P A B-(reset):A R Note4) Applicable to negative COM specification model. Note1) Single type : non-polar ON : light (orange) illuminates.

HRX-OM-Z015

Remote modeOpen A The time of FLT alarmClose FLT Operation stop FLT alarm status signal B The time of FLT alarmOpen A The time of WRN alarmClose WRN Continuing operation WRN alarm status signal B The time of WRN alarmOpen ALM Alarm status signal A The time of alarmClose B The time of alarmOpen RDY TEMP READY signal A TEMP READY statusClose B TEMP READY statusOpen A EnabledClose FREZ Anti-freezing

ZB-OM00301

FA 3m 27 (M230) 2 O 1 No.ZB-OM00301 Assy ZB1ZS A M G A E 0.0~-101.0KPa G (2m) F -100.0~100KPa ZS-39-5G A NPN2 B PNP2 1) M SI2) P (psi)1) 1) (M230) 2 2)kPa O 1 V Assy 45 2 V Assy 45 (V Assy ) A ) 28 - No.ZB-OM00301 A R R Nm 0.0540.08 R R ON OFF R 29 - No.ZB-OM00301 3 P911 Nm 0.075~0.096 M2 / 3 Assy Assy / / O (/) O 30 - No.ZB-OM00301 [L/min(ANR)] V

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

double P, R ports 0.25 to 0.7 Port size 3 position A, B ports Ambient and fluid temperature C Maximum 50 10 3 5 3 C4 (4 One-touch fitting)/C6 (6 One-touch fitting) C8 (8 One-touch fitting) C6: PA/B4.68 (0.26) A/BR 4.68 (0.26) C8: PA/B12.6 (0.7) A/BR 12.6 (0.7) SX5000 2 position single, double 3 position Max. operating frequency Hz Manual override Pilot exhaust SX3000 SX5000 Note 2) Valve

Filter Regulator IW Series

Min. 207 Panel 54 72.5 10 69.5 2 R1/8 74 40 7 30 OUT OUT IN 2 x M6 depth 10 2 x Rc1/4 Pressure gauge port Rc1/8 78 70 A 160

Digital Pressure Sensor

M5, R(PT) 1/8, R(PT) 1/4 Mounting bracket .M5 style only 3.6-1 Digital Pressure Sensor GS40 How to Order GS40 X202 Digital Pressure Sensor PSE ZSE4 ISE4 Port size Optional M5 (Female) R(PT)1/8 R(PT)1/4 5m-long lead wire X202 M5 01 02 ZSE5 ISE5 ZSE6 ISE6 Accessories B None Bracket (M5 style only) ZSE3 ISE3 GS PS Specifications ISA Model GS40-M5 GS40-01 GS40-02 ZSE1 ISE1 Air or inert gas Fluid

Lock-Up Valve IL201/211/220 Series

0 Exhaust portr Adjusting springe Upper diaphragmw Upper diaphragm chamberq SIG Lower diaphragmy Lower diaphragm chambert OUT IN1 Springo Valvei Pistonu IN2 171 A IL201/211/220 Series Construction 2 12 IL211 IL201 1 r r e t e !2 !2 u t u w w i !9 i !9 q q !7 !7 IN OUT IN1 OUT1 !0 !6 !3 o !3 q !8 !6 IN2 OUT2 !8 !7 !6 o IL220 !3 r e !2 w u y i !9 !5 @1 OUT IN1 !1 q @2 @0 IN2 !

1

Auto switch model Bore size [mm] 20 25 32 40 D-M9m(V) D-M9mW(V) BM8-020 (A set of a, b, c, d) BM8-025 (A set of a, b, c, d) BM8-032 (A set of a, b, c, d) BM8-040 (A set of a, b, c, d) BM8-025S (A set of a, b, c, d) * S: Stainless steel set screw BM8-032S (A set of a, b, c, d) * S: Stainless steel set screw BM8-040S (A set of a, b, c, d) * S: Stainless steel set screw D-M9mA(V) BM8-020S (A

CG1

Because pipe fittings are press-fit, they must be replaced together with the cover assembly. r Those with a bore of 50 or more cannot be disassembled.

5 Port Air Operated Valve Series VFA3000 1

Port size (A, B port) Body type 01 02 1 8 1 4 For 60, 61 type manifold 6 R port of VFA370 is 1/4. For 70, 71 type manifold 7 How to Order Manifold Base Use the same manifold bases as the VF3000. VV5FA3 Specify the same manifold part number as VV5F3.

PSxx-OMU0008CN

(A-B)/4 n_1=B+(A-B)/4 A= H_1=(A-B)/2 H_1=(A-B)/2 B= OUT2P_1n_1H_1P_2n_2H_2 1 -40No.PS-OMU0008CN-D [F 5] FUNC /FUNC 0 58[F97] <> [F 5] FUNC FUNC FUNC [ASin]( ) [AoUt]( ) [CoPY]( ) -41No.PS-OMU0008CN-D OUT1 OUT2 OUT1 OUT2 [F 5] FUNC 5ms ASin ooo1 C_5 5ms ASin o.r1 ( ) C_5(45 ) C_5 -105.0105.0 kPa -210210.0 kPa 1 MPa -0.1051.050 MPa -1.1551.155 MPa 2 MPa -0.1052.100 MPa -2.202.205

,

): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil

,

(3-position): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B)

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil