JXCx-OMT0023

1) (Note 1) A.52 Error excessive A.8E USB communication error 888 Watchdog 8 2 8.

VZA2000

3 position exhaust center: VZA4441--01 02 Pilot port (B side) Body side 2-4.5 Mounting hole Pilot port (A side) 2-M5 x 0.8 body side Pilot port (A side) 2-M5 x 0.8 sub-plate side (R1, R2 port) (P , A, B port) Pilot port (B side) Sub-plate side 5-3-8

LEC-OM07605CN

A b . A b . A 1 2 3 1 b012 Ab. 0 1 b b . A b .

JXCx-OMT0061CN

) (2 ) 2 1 ( (14) (1 ) 5.5) B1 A1 5 6 (17.7) (3 ) 2 1 (18) B6 A6 ( 6.3) 16 15 (11) (30.7) 66 - 15.3 [5m ] (1) (2 ) ---A B-1 2 L A A-1 1 B (B-2) 6 B (A-2) 5 1 1.5m COM-A/COM B-3 3 3 3m COM-B/ A-3 4 (3) 5 5m Shiel d Vcc (B-4) 12 GND (A-4) 13 A (B-5) 7 A (A-5) 6 B (B-6) 9 B (A-6) 8 3 (4) S 4 (+) B-1 5 (-) A-1 1 (+) B-3 2 A-3 (8) (1) (2 ) (B 1) (14.2) A1 2 1 (17.7) (14

AZ1000

2 3 4 5 6 7 8 9 10 Flow rate (slpm, N2) 4.34 (110.2) Hastelloy is a registered trademark of Haynes International.

Speed Controller with

Series Proper tightening torque (Nm) AS1002F-02 AS1002F AS2002F AS2052F AS3002F AS4002F 0.07 0.2 0.3 1 2 4 3 Series AS Speed Controller with One-touch Fittings In-line Type L-bracket DIN rail mounting bracket Bracket on a single side Bracket on a single side AS1002F AS2002F L22 L24 L23 L11 t1 t2 2 x D6 2 x D5 L19 L20 L10 L21 L9 L18 L25 L16 L17 L14 L15 L12 L13 AS2052F AS3002F AS4002F L24 L22

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted

32 50 50 7 60 120 96 118 1 2, 3 4 82 68 88 92 1 181 53 12 81 70 35 36 66 52 9 66 140 96 133 DC C Model VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 A B Port size Rc 1 4, 3 8, 1 2 163 64 50.8 196 68 60.5 1 2, 3 4 4-16-7

3 Port Solenoid Valve Metal Seal Series VZ200 1

BG-VZ402 BG-VZ403 VQ VKF BG-VZ405 VQZ How to Order Manifold Base VZ 1 06 30 VV3Z4 VS VFN A port size on base side Series VZ400 Manifold Model Symbol VV3Z4-S50 VV3Z4-50 Symbol Stations Symbol Porting specifications 2(A) Passage Specifications Without 2(A) port (Body ported type 20, 30) Nil Applicable base 02 2 stations 3(R) 1(P) 01 02 Rc 1/8 1 Common Common Top, Side Type 20, 30 and 50

Nozzle Type Ionizer

Before machinery/equipment is restarted, take measures to prevent unexpected operation and malfunction. 2) Vacuum pads are excluded from this 1 year warranty. A vacuum pad is a consumable part, so it is warranted for a year after it is delivered.

AC Servo Motor Driver (Network card type ）

0 70 _ _ 4 0 17.6 _ _ 0 1 2250 _ _ 2 1 66 _ _ 4 1 16.5 _ _ 0 2 1125 _ _ 2 2 62 _ _ 4 2 15.6 _ _ 0 3 750 _ _ 2 3 59 _ _ 4 3 14.8 _ _ 0 4 562 _ _ 2 4 56 _ _ 4 4 14.1 _ _ 0 5 450 _ _ 2 5 53 _ _ 4 5 13.4 _ _ 0 6 375 _ _ 2 6 51 _ _ 4 6 12.8 _ _ 0 7 321 _ _ 2 7 48 _ _ 4 7 12.2 _ _ 0 8 281 _ _ 2 8 46 _ _ 4 8 11.7 _ _ 0 9 250 _ _ 2 9 45 _ _ 4 9 11.3 _ _ 0 A 225 _ _ 2 A 43 _ _ 4 A 10.8 _ _ 0 B 204

AC Servo Motor Driver (CC-Link Type ）

RY(n 2)E RY(n 2)D RY(n 2)C 0 0 0 1 0 0 1 2 0 1 0 3 0 1 1 4 1 0 0 5 1 0 1 6 1 1 0 7 1 1 1 8 Note. 0: OFF 1: ON RY(n 1)A RY(n 3)A Reset Keeping RY(n 1)A or RY(n 3)A ON for 50ms or longer allows an alarm to be deactivated. Some alarms cannot be deactivated by Reset RY(n 1)A or RY(n 3)A.

AC Servo Motor Driver (CC-Link Type ）

RY(n 2)E RY(n 2)D RY(n 2)C 0 0 0 1 0 0 1 2 0 1 0 3 0 1 1 4 1 0 0 5 1 0 1 6 1 1 0 7 1 1 1 8 Note. 0: OFF 1: ON RY(n 1)A RY(n 3)A Reset Keeping RY(n 1)A or RY(n 3)A ON for 50ms or longer allows an alarm to be deactivated. Some alarms cannot be deactivated by Reset RY(n 1)A or RY(n 3)A.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

A b . A b . A PLCetc Axis Axis Axis No. 1 No. 2 No. 3 "b01" is displayed on axis No. 1, "Ab." is displayed on axis No. 2 and later. PC or PLCetc Controller After PC or PLCetc reset 0 1 b b . A b . A One axis is connected per reset.

JXCx-OMX0009

A B-1 Brown 2 Cable length (L) A A-1 Red 1 B B-2 Orange 6 1 1.5m B A-2 Yellow 5 COM-A/COM B-3 Green 3 3 3m COM-B/ A-3 Blue 4 5 5m Shield (3) Cable color Terminal No.

NCG/CG1

CG1BA Basic style mm Standard stroke range (mm) Long stroke range (mm) Bore size (mm) B1 A C D E F GA GB H H1 I J K KA MM NA P S TA TB TC ZZ WA WB WH W AL 69(77) M5 x 0.8 12 14 18 25 30 32 40 50 24 18 22 22 30 35 35 40 40 15.5 13 17 17 19 27 27 32 41 14 8 10 12 16 20 20 25 30 2 2 2 2 2 2 3 3 12 12 12 13 14 14 20 20 10(12) 35 5 6 6 8 11 11 13 16 26 M4 x 0.7 depth 7 5 6 8 10 14 18 18 22 26

JXCx-OMT0062

Brown 2 A B-1 Red 1 A A-1 Cable length (L) Orange 6 B B-2 Yellow 5 B A-2 1.5m 1 Green 3 COM-A/COM B-3 3m 3 Blue 4 COM-B/ A-3 Shield 5m 5 Cable color Terminal no.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

0 (B) (A) 2 4 (B) (A) 2 4 4(A) 3 5 1 3 5 1 (EB) (P) (EA) (EB) (P) (EA) 2(B) i 5(EA)/3(EB) 1(P) 2 position double with back pressure check valve 2 position double 2 position double o t r e w y q !1 u !

Compact Manifold Regulator Series ARM5

Bonnet Common IN Individual IN Common IN Individual IN Polyacetal 2 Regulator Regulator ARM2500-A-02 ARM2500-B-02 ARM3000-A-03 ARM3000-B-03 9 1 Replacement Parts End plate R 10 1 Description Material Part no. End plate L 11 1 No.

With Factory Installed

Example) 1NR 20 1/8 25 1/4 Port size 30 3/8 01 1/8 1/2 40 Accessory (optional) 1/4 02 03 3/8 Symbol Description Applicable model 04 1/2 B With bracket AR2001-AR4001 Optional Specifications Combination Table Optional specifications Applicable regulator model Optional specifications Symbol AR3001 1 N R AR 2001 AR2501 AR4001 O.02 ~ O.2MPa [O.2 ~ 2.0kgflcm 21 -1 Non relieving -N IN-OUT reversal

VZ3000

How to Order Type 40 1(P) port Stations VV5Z3 05 40 2 M5 Rc 1/8 4(A), 2(B) port size 1(P), 3/5(R) port thread type 02 2 stations 3, 5(R) port M5 M5 x 0.8 Nil Rc 4(A), 2(B) port Rc 1/8 F G 20 20 stations M5 x 0.8 N NPT Z NPTE How to Order Type 41 VV5Z3 05 41 1 M5 Applicable solenoid valve Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations G L M D G L M