High Vacuum Angle Valve, XL Series

Orifice mm Differential pressure MPa Port A Pa Internal Fitting External XSA1-12 XSA1-22 XSA2-22 XSA2-32 XSA3-32 XSA3-43 2 3 0.8 VCR 0.3 3 6 Direct solenoid operation (N.C.) 10-11 1.0 1/4 10 -6 10 -9 10 -11 P.32 to P.34 2 0.3 SWJ 4.5 11 10 -10 0.8 0.3 6 3/8 19 Differential Pressure: Indicates the maximum operable pressure difference between port P and port A.

CLQ

6@3 !2!1 u @5r @6 @6 !5 A B CL A CL1 MLGC B Extension locking Without magnet !0o#1 @8 t CNG MNB Section A-A' Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CNA !

Auto Switch Guide

When tightening an auto switch mounting screw, use a watchmakers screwdriver with a grip diameter of 5 to 6 mm.

MXH Series Compact Slide

78 40 4 30 30 78 40 30 4 40 88 50 20 20 6 50 98 60 25 6 25 60 108 60 6 30 30 35 MXH Series Compact Slide Dimensions 20 LT (mm) 31 20 J-M5 x 0.8 Depth 9.5 LA LB 14 Plug for port (hexagon socket head set screw) 4-M5 x 0.8 x 4l 3-M6 x 1.0 through Bottom hole dia. 5.1 6-9.3 counter bore depth 8 4-M5 x 0.8 Depth 11 4-M5 x 0.8 depth 8 Guide rail width 12 2-M5 x 0.8 9.5 34 6 24.5 63.5 64.5 34

3 Port Solenoid Valve Rubber Seal Series SY100

Flow Characteristics Manifold Port size Effective area (mm2) 2(A) port 1(P), 3(R) port SY13 SY13(A) SY13 SY13(A) SY14 SY14(A) SY14 SY14(A) 0.14 0.21 0.14 0.21 0.14 0.21 0.14 0.21 M3 x 0.5 M5 x 0.8 SS3Y1-30 M5 x 0.8 M3 x 0.5 SS3Y1-31 M3 x 0.5 M5 x 0.8 SS3Y1-S41 M5 x 0.8 M5 x 0.8 Note) Value at manifold base mounted How to Order Valve Manifold Assembly Example Stations3 2 1 Valve (N.C.)

MXF

M5 x 0.8 thread depth 12 Data 5.5 NN-M5 x 0.8 NN 2 ( 1) x H 13 G Section AA A M 12 Operating port 2-M5 x 0.8 0.5 25 (Table length) N 2 ( 1): The number of pitches 27 7 12 J 3 Z Max. 9.5 ZZ H G 33.5 (mm) 6 Z M J NN H G N ZZ Model 5H9 +0.030 0 depth 5 MXF20-30 91 91 57 4 30 29 4 104 MXF20-50 113 113 77 4 45 36 4 126 MXF20-75 162 162 125 6 45 40 6 175 MXF20-100 211 211 175 6 60 59 6 224 8

4/5 Port Air Operated Valve Series SYJA3000 1

Note 3) 5 port base mounted without sub-plate: SYJA540 5-2-23 6 Series SYJA5000 Dimesions: Body Ported Dimensions: Base Mounted 2 position single: SYJA5140-01 2 position single: SYJA5120-M5(-F) 41.5 (For mounting) 2-4.3 M5 x 0.8 (Pilot port) 1 Manual override 15 5 11 A B A B 1 M5 x 0.8 (Pilot port) 10 24 A B 19 R P 2-2.6 2-3.5 4 37.5 (For mounting) (For manifold mounting) (Bracket) 47 42

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

S) (mm) Dimensions PB S Model LVD2-T LVD3-T LVD4-T LVD5-T PA 13 26 A B 26 29.5 Dimensions (mm) A B C D E F G H J K L M N P Q T U Model LVD2-T LVD3-T LVD4-T LVD5-T 30 30 61 56 14.5 104 35 13 4 20 44 7 30 6 31.5 17 M5 to 0.8 35 35 79.5 62 17.5 136 42.5 17.5 6 22 50 7 37 6 36 21 M5 to 0.8 35 35 82 62 20 137 45 17.5 6 22 50 7 39 6 36 21 M5 to 0.8 45 45 105.5 76 25 169.5 65 17.5 8 32 64 7 52 6

SMC Pneumatic Clean Series

(mm) 26 20 16.5 14 C 16 12 10 8 D 25 18 14 12 E 2 2 2 2 F 13<10> 20<18> 20 20 GA 50 40 40 35 H 8 6 6 5 H1 19 17 17 13 B1 47 38 31 26 I 187 175 173 163 ZZ M6 x 1 depth 12 M5 x 0.8 depth 8 M5 x 0.8 depth 7.5 M4 x 0.7 depth 7 J 27 19.5 19.5 15.5 AL Bore size A M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 MM 44 35.5 29 24 NA 1/8 1/8 1/8<M5 x 0.8> 1/8<M5 x 0.8> P 9 7 7 7 RA 87 95 93 93 S 6 5.5 5.5

Magnetically Coupled Rodless Cylinder

M5 6 47 8 61 26 70 9.5 6.0 28.5 41 92 40 M6 x 1.0 M5 6 55 8 71 Note 1) Dimension F provides a clearance of 1mm between the body and the floating joint, but does not consider dead weight deflection of the cylinder tube, etc.

3 Port Solenoid Valve Rubber Seal Series SY100 1

Type S41 How to Order Applicable solenoid valve Note) SY114SY114ASY124SY124AApplicable blanking plate assembly SY100-77-1A SS3Y1 S41 05 M3 Stations A port side 02 M3 M5 M3 x 0.5 M5 x 0.8 2 stations 20 20 stations P R R port M5 x 0.8 P port M5 x 0.8 A port M3 x 0.5 M5 x 0.8 Note) SY114(A) and SY124(A) cannot be mounted on the same manifold.

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

4.5 Note) 30 4 x M4 x 0.7 thread depth 5 (Opposite side: Same) (Opposite side: Same) 4 x M5 x 0.8 thread depth 4.5 (Piping port) (Opposite side: Same) 5 10 10 8 46 2 x M4 x 0.7 thread depth 6 (30) (Z) 2 x M5 x 0.8 thread depth 8 5 450.2 8 Note) 11-, 22-: Vacuum suction port Vacuum air from 2 ports on both sides. 10-/12-, 21-: Relief port Exhaust air from a port on one side.

ARJ1020F

M5 x 0.8 6 3.5 15.5 50 17.2 ARJ1020F-M5-06 22 12.8 6 VY1 Manifold Base (Option)/Dimensions G PPA 2-3.5 (Mounting hole) 31 (ARJ1020F-M5-04) 32 (ARJ1020F-M5-06) AL Applicable tubing O.D. 4, 6 (Mounting hole) IN (Common) Stations Manifold base part no. 4 6 10 B dimension A dimension 90 130 210 82 122 202 ARJM10-4 ARJM10-6 ARJM10-10 14-4-5 3 Miniature Regulator Series ARJ210 Lightweight body

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

D2 D3 L1 L2 L3 L4 L5 A M1 Model D1 Model AS121F-M5-23D AS121F-U10/32-01D 1/8" 8.4 17.3 22.1 12.3 3.2 8.4 22.1 5/32" 9.3 12.7 17.3 12.3 12.7 AS121F-M5-04D AS121F-U10/32-03D M5 x 0.8 9.6 4.7 0.7 27.4 8 4 9.3 31 31 0.7 27.4 10-32 UNF 8 9.6 4.7 AS121F-U10/32-05D AS121F-M5-06D 22.9 3/16" 11.4 21.3 26.1 16.5 6 18.1 11.7 13.5 11.6 18.3 23.1 11.7 AS221F-01-23SD AS121F-U10/32-07D 13.5 1/4" 12 3.2

Rotary Gripper Series MRHQ

10 3-3H9 long groove depth 3 + 0.025 0 M5 x 0.8 37h9 0 0.062 Port A M5 x 0.8 (one each on three sides) Port B 4-M4 x 0.7 Depth 6 N I J E A D P A A M N R R SMC E O P T P A I R R 6 G Y R A I 18 2 6 21 9 5 23 5 Side A Side B Scale: 60% 9 Series MRHQ Rotary Gripper Dimensions (mm) 1in = 25.4mm Scale: 60% MRHQ16 A B 41 50 66.5 30 4-M5 x 0.8 Depth 6 47h9 0 0.062 20.6 opened 5 0 0.1 8 4-M3

Microspeed Cylinder

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" 38 (1.33) 7 (0.25) Flow rate l/min (ANR) (CFM) 12 (0.42) Controlled flow 0.6 (0.03) 0.2 (0.01) 0.1 (0.006) Effective area

3 Port Solenoid Valve

wire AWG#26) 3.5 27 6 26 23.5 20.5 3 9.5 28.5 3.5 4 Series S070 Dimensions Base mounted with screws S070B-G-M5 Grommet type 16.5 3 7 15 21 2-3.4 Mounting hole 150 (lead wire AWG#26) 22 5 6 22 20.5 3 2 1 11 7 6 5 12 12.3 12 25 M5 0.8 3 (EXH) port M5 0.8 2 (OUT) port M5 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1 W with power saving circuit 6 150 (lead wire AWG#26) 3.5 27 27.5 25 22

Pressure Gauge Guide

This will cause a malfunction. 14-11-6 6 Pressure Gauge Guide How to Order G M C 46 10 01 X2 Option Specifications Symbol Pressure gauge F.R.L.

AC Servo Motor Driver (Pulse input type/Positioning type ）

OUTLINE DRAWINGS (2) LECSB2-T8 [Unit: mm] 6 mounting hole 40 Approx. 80 170 6 Lock knob 6 161 156 168 6 LECWith MR-BAT6V1SET Approx. 21 Approx. 69.3 6 Approx. 38.5 5 Mass: 1.0 [kg] Mounting screw Terminal Screw size: M5 Tightening torque: 3.24 [N m] CNP1 L1 L2 Approx. 40 Approx. 6 Approx. 6 2-M5 screw L3 6 NP3 P4 CNP2 P+ Approx. 168 C D 156 0.5 L11 L21 CNP3 U V W PE Screw size: M4 Tightening

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

type: Stainless steel 615 Series AS20-T Dimensions L4 D3 H (Hexagon width across flats) T2 L3 A L2 D1 D2 T1 L1 Dimensions A AS120-U10/32-T 10-32 UNF 10-32 UNF AS120-M5-T M5 x 0.8 8 9 M5 x 0.8 Model T2 H D1 T1 D2 D3 L1 L2 L3 L4 Weight (g) 13 9 4.5 10 31 10.3 0.7 27.4 AS220-N01-ST NPT 1/8 12.7 NPT 1/8 AS220-F01-ST G 1/8 AS220-01-ST Rc 1/8 12 14.3 R 1/8 33 14.6 7 18 34.7 13.2 1.5 31.6 AS220