Fieldbus System

P 25 1 1 A A A A A A A A 18.5 9.5 7.5 (12) (7.5) C3, C4, C6, M5 [4(A), 2(B) port] C8: 8 One-touch fitting C8 [1(P) SUP port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread 20.5 P = 10.5 34 L2 = L1 10.5 L3 = 10.5 x n1 + 65.5 L4 = L3 + 97.5 + 47 x n2 L5 = (L1 L4)/2 L6 = 10.5 x n1 + 45 L7 = 47 x n2 + 89.8 n1: Valve stations n2: I/O Unit stations L1:

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

M5 thread 1 (P) N.C.

Modular/F.R.L. Units Series AC

X251 X201-P Note) X251-P Note) X215 X253 X215-P Note) X253-P Note) 0.1 to 0.4 MPa 0.1 to 0.4 MPa 0.1 to 0.4 MPa 0.1 to 0.4 MPa 0.1 to 0.6 MPa 0.1 to 0.6 MPa 0.1 to 0.6 MPa 0.1 to 0.6 MPa 0.1 to 0.4 MPa 0.1 to 0.4 MPa 0.1 to 0.4 MPa 0.1 to 0.4 MPa 0.1 to 0.6 MPa 0.1 to 0.6 MPa 0.1 to 0.6 MPa 0.1 to 0.6 MPa 0.5 m 0.5 m 0.5 m 0.5 m 0.5 m 0.5 m 0.5 m 0.5 m 3 m 3 m 3 m 3 m 3 m 3 m 3 m 3 m MPa

o

(M5) M5T103rN"'(M5 .03) 10-32Nom. {M5) P Port 1O-32Nom.(M5) @ NVJ100 Dimensions inch (mm) L Type Plug Connec,tor : tWJl14O-OLOO.M3 : tWJ114O-OLOO-M3 M Type Plug Connector: NvJl14O-OMOO-M3 : NVJ114O-O OO-M3 .E 0.10(2.6) Dia 1.03i26.2) [d, [ 8 ; I F l j { i 1L l o t : ffi0r 9 A l ; l { .?

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(M5) M5T103rN"'(M5 .03) 10-32Nom. {M5) P Port 1O-32Nom.(M5) @ NVJ100 Dimensions inch (mm) L Type Plug Connec,tor : tWJl14O-OLOO.M3 : tWJ114O-OLOO-M3 M Type Plug Connector: NvJl14O-OMOO-M3 : NVJ114O-O OO-M3 .E 0.10(2.6) Dia 1.03i26.2) [d, [ 8 ; I F l j { i 1L l o t : ffi0r 9 A l ; l { .?

SMC Electronic Switch Series Variations

0 to 100kPa R(PT) 1/8, M5 X 0.8 L NPTF 1/8, M5 X 0.8 Note) M5 X 0.8 (female) thread.

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

(M5) M5T103rN"'(M5 .03) 10-32Nom. {M5) P Port 1O-32Nom.(M5) @ NVJ100 Dimensions inch (mm) L Type Plug Connec,tor : tWJl14O-OLOO.M3 : tWJ114O-OLOO-M3 M Type Plug Connector: NvJl14O-OMOO-M3 : NVJ114O-O OO-M3 .E 0.10(2.6) Dia 1.03i26.2) [d, [ 8 ; I F l j { i 1L l o t : ffi0r 9 A l ; l { .?

CG5-S

R V Basic type (B)/CG5BAS : With air cushion WA WB GA GB 2-P W 10 H1 Width across flats B1 M BM Max.

CL

MLU E D P ML1C CLJ2D16D19 16 8 Silencer -X 12 2 20Head cover port in axial direction (R) 25.5 Data M5 x 0.8 pressurized locking port Pneumatic locking and spring and pneumatic locking Lock nut Manual unlocking cam M5 x 0.8 unlocking port Unlocked when pressurized 5H9 +0.030 0 71 46 6 Clevis pin (5d9 ) 0.030 0.060 M5 x 0.8 Rod side cylinder port 31 M14 x 1.0 28 23 5 M5 x 0.8 Head side cylinder

High Purity Chemical Valve

E (H1) (H2) 2 x P B C SMC A B E L J B 2 x P 2 x F K Body material: PFA N G A D L K 4 x M Non-locking type Locking type 60 (H1) (H2) C A B SMC E J B 2 x P (mm) Dimensions A B C D E F H1 G H2 J K L M N P Model Body material LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m M5 x 0.8 30 33 54.5 10 10 75 76.5 22 22 27 Rc 1/8, 1/4, NPT 1/8, 1/4 (SUS) Stainless steel 36 47 81 13

LJ1H

of gravity (mm) m a = 2000 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 2000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 2 3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

CG1

Refer to p.1.7-12 and 1.713.1.

Prevents Micro-Bubbles

Single type Suck back P P P VN A B A B Unit Single type Unit LVC Manifold (5 stations max.) LVA LVH A R P 3 port N.C. PA LVD N.C.

SMC Pneumatic Clean Series

style (G) / CBM2G, CBM2G Relief port M5 x 0.8 24 H2 DL Width across flats B1 2-P (Rc, NPT, G) Standard port Width across flats B2 H1 C2 NN HC Eh8 D I B G N F 1.5 Relief port M5 x 0.8 MM G N A K AL Width across flats NA 2-FD (This drawing shows the cases of 20 and 25.)

SZ3000

4 (A), 2 (B) port C4, C6, M5 Weight W (g) (2) n1: Stations n2: Number of SUP/EXH blocks m: Weight of DIN rail W = 3.2n1 + 53n2 + m + 126.5 Note 1) In cases such as those where many valves are operated simultaneously, use type B (double side SUP/EXH), applying pressure to the 1(P) ports on both sides and exhausting from the 3(R) ports on both sides.

SZ3000

4 (A), 2 (B) port C4, C6, M5 Weight W (g) (2) n1: Stations n2: Number of SUP/EXH blocks m: Weight of DIN rail W = 3.2n1 + 53n2 + m + 126.5 Note 1) In cases such as those where many valves are operated simultaneously, use type B (double side SUP/EXH), applying pressure to the 1(P) ports on both sides and exhausting from the 3(R) ports on both sides.

Table of Contents

How to Order 2 2 0 0 01 M AS Option Body size None With seal Nil S 1 2 2 Meter-out Meter-in M5 standard 1/8, 1/4 standard Type Direct cylinder elbow type Control type M5 and U10/32 are not available with seal.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

L plug connector (L) VQ 2.0 3.0 M plug connector (M) (A) 2 VKF 1 (P) 3 (R) M plug connector (M) VQZ N.O.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

(P .1190) (P .1190) (P .1190) S0700 Note) (P .1212) (P .1214) (P .1209) (P .1209) (P .1209) (P .1209) (P .1209) (P .1209) (P .1209) (P .1209) VQ (P .1148) (P .1148) (P .1148) (P .1148) (P .1148) (P .1148) (P .1148) (P .1148) (P .1148) (P .1148) VQ4 (P .1153) (P .1170) (P .1170) (P .1170) (P .1170) (P .1170) (P .1170) (P .1170) (P .1170) (P .1173) (P .1175) VQ5 (P .1190) (P .1190) (P .1190

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Bore size (mm) MM TC W NA P S TA ZZ WA WH 30 30 25 20 20 20 20 20 147 157 159 187 218 218 264 264 16 16 16 16 18 18 22 22 23 25 28.5 33 40.5 47.5 60.5 71 M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 24 29 35.5 44 55 69 80 100 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 3/8 Rc 1/2 77 77 79 87 102 102 122 122 11 11 11 12 13 13 M5 x 0.8 M6 x 0.75