Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Metric sizes Type 4 6 8 10 12 04 06 08 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 x 0.8 1/8 1/4 3/8 1/2 M5 01 02 03 04 With One-touch fitting Clean specification Metal part material Q G Brass (electoless nickel plated) Stainless steel (SUS304) Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

Description Material Note q Zinc alloy Body A w Brass Handle Electroless nickel plated e Brass Body B Electroless nickel plated r Brass Needle Electroless nickel plated t Brass Needle guide Electroless nickel plated y Brass Seat ring (1) Electroless nickel plated(3) u Brass(2) Lock nut i U seal NBR o O-ring NBR !0 O-ring NBR !1 O-ring NBR 01 to 04 type !2 Bushing PBT 01 to 04 type !

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

Description Material Note q w e r t y u i o !0 !1 !2 !3 !4 !

VFM300

NPTF NPT Push button (Mushroom) Push button (Extended) Push button (Flash) Twist selector (2 position) Key selector (2 position) SA Body option VA Internal pilot style 1 0 External pilot style Construction VM/VR VH Non-actuated Actuated Component Parts q Description No.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Example: In case of 6 stations of air suction filter ZFA (single) ZFA100-01 6 pcs. (Brackets for 6 stations) ZZFA1-06 1 pc.

VFM300

Note 3) The handle of the selector (2 position) cannot be removed or replaced alone. 5-6-48 5 Port Mechanical Valve Rubber Seal Series VFM300 How to Order S 01 02 0 VFM35 Option Suffix for actuator F Foot bracket (Only internal pilot) Actuator type R S G B Red Hard steel roller Port size Basic 00 Color of push button selector Rc 02 1 4 Roller lever 01 Black NPT N02 1 4 One way roller lever

C95Series

lOre mentioned above 8'8 1 00 same as standard port locatIon C95 Standard part number l-xC3 j B f@] Location 01 pons and cushion val\les On rod cover and head CO\lfH.

AK1000

Refer to gauge guide (P.94,95). t t r w w w q q q Sample Order Number Port t r q 4 4 4 4 4 w 4 4 4 4 4 AK1002S e 2P 3P 4P 4PL 5PC 2P 3P 4P Pressure gauge unit 2) MPA MPA MPA MPA V3 V3 V3 V3 t r t 1 Unit psig/bar MPa Code 0 0 No code MPA w w q q 1 2) Pressure gauge unit MPa or psig/bar selectable.

Series: 1 (VQZ1000), Composite Symbol: 1 (2 Position Single), Seal Type: 1 (Rubber Seal), Function: B (High Speed Response 0.9W - DC Only), Coil Voltage: 5 (24VDC), Lead Wire: MO (M Plug w/o Connector), Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: w/o Sub-plate, Q: Q (CE Marked)

Type: Solenoid Valves, Application: Unit for Manifold Mounting, Mounting Orientation: Rail, Voltage: DC24V, Specification: -, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Exhaust, Applicable Cylinder Diameter(Ø): -, Pipe Port Type: -, Port Size: -, Pressure Rating(MPa): 0.15 to 0.7, Driving Type: Pilot Type Spool, Pilot Air Supply

LEC-OM02904

C 1. ##0016 ## 00 01 1 02 2 03 3 04 4 05 5 06 6 07 7 08 8 09 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 2. **No. 3.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Motion controller Q series Programming Manual (COMMON) (Q173D(S)CPU/Q172D(S)CPU) (IB-0300134) "4.11.1 Connect/disconnect function of SSCNET communication" MELSEC-Q QD77MS Simple Motion Module User's Manual (IB-0300185) "14.12 Connect/disconnect function of SSCNET communication" MELSEC-L LD77MH Simple Motion Module User's Manual (IB-0300172) "14.13 Connect/disconnect function of SSCNET communication

LEC-OM07605CN

. ## ## 01 1 64 64 2. *** 3.

AZ1000

Pressure gauge unit 2) w q w q w q Unit psig/bar MPa Code No code MPA Sample Order Number Port r q FV4 FV4 FV4 AZ1001S e w FV4 FV4 FV4 2PW 3PW 4PW 2PW 3PW 4PW 2) Pressure gauge unit MPa or psig/bar selectable. However under Japanese regulation, only MPa is available in Japan.

LX Series Compact Electric Actuators

Power Connector Molex lnc. part numbr 39-01-2180 (receptacle), 39-00-0039 (pins).

IS1000

0 IS1000 No. q w e r t y u i o !

AS-FPQ/AS-FPG

Metric sizes Type 04 06 08 10 12 4 6 8 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 01 02 03 04 M5 x 0.8 1/8 1/4 3/8 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06 15

Quick Exhaust Valve Series AQ 1

Description Material Note q No.

AMR3000 to 6000

Orange mark Maintenance Inspection Warning q Replace the filter element within 2 years of operation or before the pressure drop reaches 0.1MPa.

BP1000

Welded Connection Series Back Pressure Regulator for Ultra High Purity Series BP1000 For UHP gas delivery Operating pressure: 0.5 to 300 psig (0.0034 to 2.1 MPa) Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance How to Order Port Number q w e BP10 01 2PW FV4 FV4 S Bonnet option Operating pressure Bonnet Standard Panel Installation 3) Code Pressure