SMC Corporation of America
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Power supply is AC200V single phase (Note 4) Controller Forced Alarm forced stop stop ON OFF RA1 RA2 MC MC SK Driver Servo amplifier Servo motor NFB MC CNP1 L1 1-phase 200 to 230VAC CNP3 (Note 6) U 2 L2 U Motor [1] V 3 L3 V M N W 4 W 1 P1 (Note 1) P2 PE CNP2 P (Note 2) C [3] [2] D (Note 3) Encoder CN2 Encoder cable L11 L21 CN3 CN3 24VDC Forced stop EM1 DOCOM (Note 5) DOCOM DICOM (Note 5)

F: Angle adjustable range 5 E: Angle adjustable range 5 E: Angle adjustable range 5 Angle adjusting screw 0 0 8 0 1 e l g e n Allowable lateral load to the piston rod end gl a n ng a ti g us in j d st a Using friction fittings makes it easier to mount the load to the piston rod end. u m dj u m a ni Mi m F: Angle adjustable range 5 u m xi Ma 0 Mi 17 nim e um gl an ad g ju in st 0 M 19

i 0 5 r s 0 0 8 I a9 d 0 0 7 I ooo E o o E 0 0 : fr I 0 0 5 o 3 o 0 4 I 4 0 0 3 E oo, o !

7 A*8 201 2~200L/min 8 2 (11) S () C8 8(5/16") *6 02*1 Rc1/4 M SI*7 N02*1 NPT1/4 6 F02*1 G1/4*2 SI 1 2ISO1179-1 7:L/min :L 1 (11) L*3 3 OUT1 OU2 A NPN NPN B PNP PNP C NPN (1~5V) D NPN (4~20mA) E*4 PNP (1~5V) F*4 PNP (4~20mA) G*4 NPN *5 H*4 PNP *5 4 5 -10No.PF-OMO0004CN-E 1 W N (2 m) (2 m) + () 2 R S () () T V () () -11No.PF-OMO0004CN-E / ZS-33-D 2m ZS-33-F ZS-33-J (

Series/Port Size Type of Actuation 2 position 2 position single double @ ]zNPTF w %NPTF titvF30(X) NVF3q)O 3 Dosition 3 po6ition 3 pogition closed cnter exhaust center pressue center . t : ' . " i : , : stlfm'JNfils #Nll;117.h ainnMh HlfFinlh NVF5000 NVF5000 2 pBition 2 position 3 position single double closed center M 3 position 3 posilion exhaLrst center Plessule centl %NPTF ffi^ 4il7h

Front flange type 0.5 m 3m 20mm Nil L Rear flange type 32mm Double clevis type Connector 40mm Number of auto switches With connector Without connector 2pcs. Nil Z 50mm 63mm Nil Standard cylinder stroke (mm) Refer to the standard stroke table on page 10. Cushion (applicable bore size 40 to 63) 1pc. S 3pcs. 3 "n" pcs.

M12 connector pin number Wiring specication w r q e w w q e e r q r VG342(R)-X87 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) w r w r w r q e q e q e 3(R) 3(R) 3(R) w r w r w r q e q e q e 3(R) 3(R) 3(R) 1(P) X X Safety limit switch terminal [N.C.]

Rated voltage For DC 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC B: Locking slotted type Electrical entry 24 VDC, 12 VDC, 6 VDC, 5 VDC, 3 VDC Grommet L plug connector M plug connector G: 300 mm lead wire L: 300 mm lead wire M: 300 mm lead wire MN: Without lead wire Light/Surge voltage suppressor Nil S Z R U Without light/surge voltage suppressor With surge voltage suppressor With light/surge

ZZ Z Z S S Z S S ZZ ZZ ZZ ZZ Z 20 6 21.5 25 20 158 112 143 183 133 137 87 168 193 6 24.5 32 25 162 112 147 187 137 137 87 172 197 6 27 40 32 164 114 149 189 139 139 89 174 199 164 214 224 8 32.5 40 138 179 168.5 163 113 204 229 188 243.5 254 193.5 218.5 213 268.5 279 6-4-49 50 Series CM2 Clevis Integrated Style (E) CM2E Bore size Stroke S T Spring return S + Stroke Z + Stroke ZZ + Stroke

Please contact SMC regarding the connection thread NPT and pressure gauge supply for psi unit specifications. 1080 A 1021-AW-B Filter Regulator Dimensions J J D M N T AW20-B 1021Bracket (Option) S U Panel fitting dimension F Y R Applicable tubing 6/4 W C Q V BB IN OUT OUT K H IN Z P2 Plate thickness 10-/21-AW20-B: Max. 3.5 Pressure gauge (Option) (Pressure gauge port size) B 2 x P1 (Port

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 MTS CC Component Parts Component Parts Description Material Note Description Material No. No.

(M5)) (ln ca8e of % NPTF) M Vpe plug connector(M) L typ plug connector(L) 133S (340) ',3.A3 (3&) lo-32Nom. (Ms) Tgpe 40 Manifold,/ Bottom Ported(External Pilot) inch (mm) Grommet (c), (H) (ln case ol lo-3zNorn, (M5)) L type plug connector(L) 13.78 (s50) 13.,13 (s41) r3.19 (35) Symbol (internal pilot tpe) N.C. N.O. slJrb s-zrJh P R P R w (external pilot type) N.C. N.O.

s2 acceleration, whichever is smaller. 4.9 m/s2 Vibration resistance 490 m/s2 in X, Y, Z directions 3 times each Impact resistance Noise resistance 1000 Vp-p, Pulse width 1 s, Rise time 1 ns Weight Note 3) 410 g 470 g 650 g 1,100 g Port size (Rc, NPT, G) 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 Note 1) The system accuracy when combined with PF2W2/3.

W (kg) 2 3 4 5 40 32 0.04 0.05 1 0.03 0.5 0.4 0.3 0.2 25 20 8 0.02 16 12 0.1 0.01 5 10 20 30 5 10 20 30 40 50 100 200 Overhang L (mm) Overhang L (mm) Graph (3) Graph (6) Maximum Speed: Up to 500 (mm/s) Maximum Speed: Up to 600 (mm/s) 0.3 20 30 40 50 0.2 10 0.1 Weight W (kg) Weight W (kg) 2 3 4 5 40 32 0.04 0.05 1 0.03 0.5 0.4 0.3 0.2 25 8 20 0.02 16 12 0.01 5 10 20 30 0.1 5 10 20 30 50 100

Max. 3.5 T N S M U D J Bracket (Option) AR20(K)-B to AR40(K)-06-B 2 x P1 Panel fitting dimensions A (Port size) Y W C B Q V K OUT OUT IN IN Z Plate thickness AR20(K)-B to AR30(K)-B: Max. 3.5 AR40(K)-B : Max. 5 R F P2 S (Pressure gauge port size) Bracket (Option) U M J D T N AR50(K)-B/AR60(K)-B 2 x P1 A (Port size) B Q C K OUT IN R F P2 S (Pressure gauge port size) Bracket (Option) T N J

L D d m t d H B C C type 10 for shaft 41.6 50.6 9.6 13.4 36.2 44.2 1.55 2.05 1.15 1.15 M14 x 1.5 M18 x 1.5 8 11 22 27 25.4 31.2 IY-G04 IY-G05 C type 14 for shaft 10 14 -0.040 -0.076 -0.050 -0.093 14 Series RLQ Simple Joint/32 to 63 A type mounting bracket 2-D T1 T2 M W V U F B E (mm) Joint and mounting bracket (A type, B type) part no.

Note q Dustproof filter set HEF-FL001 Front panel, Filter: 1 piece each w Dustproof filter HEF-FL002 Filter: 1 piece w 11 HEF Series Specific Product Precautions Be sure to read this before handling the products. Refer to the back cover for safety instructions.

tubing 6/4 P2 (Pressure gauge port size) R F J M D J U Bracket (Option) T N S Optional specifications Standard specifications Model Round type pressure gauge Bracket mounting size Panel mount Q R S T U V W Y Z F J K AA BB H J M N P1 P2 A B Note 1) C D 10-/21-AR20K-B 2 Note 2) 1/8, 1/4 20.5 30 1/8 11 34 40 43.9 44 67.4 5.4 65.5 26.5 15.4 28.5 55 M28 x 1 2.3 28.5 24.7 28.5 14 6 10-/21-AR25K-B

YU-03 RS M W T2 V J E T1 B 2-D through K ( across flats) 2-O counter bore Joint H (with locking) d2 d1 mm Bore size (mm) B D E J M O Part no. L UT C UA 12 7 25 9 34 11.5, depth 7.5 YB-03 32, 40 12 9 32 11 42 14.5, depth 8.5 YB-05 50 mm Part no. Applicable bore size (mm) UA C d1 d2 H K L UT Weight (g) Weight (g) Bore size (mm) T1 T2 V W RS Part no.