4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% Conditions Base mounted Tubing bore x Length Speed controller Silencer Series CJ2 Series CM2 6 x 1 m AS2301F-06 AN120-M5 AS2001F-06 Series CJ2 Series CM2 4 x 1 m AS1301F-04 AN120-M5 Body ported Tubing bore x Length Speed controller Silencer SYJ3140-M5 SYJ3120-M3 1-5-5 Series SYJ3000 How to Order Light/Surge voltage suppressor Bracket

Rotary Table/

Load mass m (kg) . Rotation angle . Rotation time t (s) . Load configuration = m x (a2 + b2) / 12 + m x H2 Effective torque 10 Ta Effective torque (3 to 5) Tf Effective torque Ts 0.2 to 1.0s / 90 Effective torque Inertial moment Allowable load Note) I substitutes for t the value for inertial moment.

Series SV

block (m) No.

VFR

Cable length VVFS2000-30A-1 VVFS2000-30A-2 VVFS2000-30A-3 VVFS2000-30A-4 VVFS2000-30A-5 VVFS2000-30A-6 VVFS2000-30A-7 1.5 m 3 m 5 m 7 m 10 m 15 m 20 m 1.5 m 3 m 5 m 8 m 10 m 15 m 30 m VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 VVZS3000-21A-5 VVZS3000-21A-6 VVZS3000-21A-7 Plug 206837-1 1 pc. Cable clamp 206138-1 1 pc. Socket 66101-2 24 pcs.

Table of Contents

Tubing size (O.D. x I.D.) mm: 12 x 9 IDG30 IDG50 0 m 20 1 m 19 3 m 17 5 m 16 Note) In cases other than above model numbers, if the tube length is 5 m or less, an increase of the outlet air at the atmospheric pressure dew point will be 1C or less. Refer to pages 14-19-28 to 29. Construction Refer to pages 14-19-30 to 31.

CL

3 m 5 m None Solid state switches marked with are produced upon receipt of order.

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: Female Thread, Lead Wire: -, Bracket: -, Operation Manual: -

Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: Female Thread, Lead Wire: -, Bracket: -, Operation Manual: -

Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread)

Rated Pressure Range: 0.00 to -14.69 psi, Piping: M5 x 0.8, Female Thread, Output Specification: PNP Open Collector 2 Outputs+Analog Voltage/Auto-shift Switching, Unit Specification: Fixed SI Unit; for Vacuum/Compound Pressure: kPa; for Positive Pressure: MPa, Option: -, Calibration Certificate: -, Lead Wire: -

Rated Pressure Range: -14.50 to 14.50 psi, Piping: M5 x 0.8, Female Thread, Output Specification: PNP Open Collector 2 Outputs+Analog Voltage/Auto-shift Switching, Unit Specification: Fixed SI Unit; for Vacuum/Compound Pressure: kPa; for Positive Pressure: MPa, Option: -, Calibration Certificate: -, Lead Wire: -

Piping: M5 x 0.8, Female Thread, Output Specification: PNP Open Collector 2 Outputs+Analog Voltage/Auto-shift Switching, Unit Specification: Fixed SI Unit; for Vacuum/Compound Pressure: kPa; for Positive Pressure: MPa, Option: -, Calibration Certificate: -, Lead Wire: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread)

High Vacuum Angle Valve, XL Series

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

MQQ

H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10 10.5 M5 x 0.8 M3 x 0.5 16 11.5 M6 x 1.0 M4 x 0.7 20 13.5 M8 x 1.25 M5 x 0.8 25 16.5 M10 x 1.25 M6 x 1.0 28 22.5 M14 x 1.5 M8 x 1.25 Clevis pin d Dd9 m m l t L t Applicable bore (mm) Applicable snap ring Part no.

CL

3 m 5 m None Solid state switches marked with are produced upon receipt of order.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

M5 x 0.8 (A, B port) 10 5 10 2-3.2 (For mounting) 22 2.5 Manual override B A 11 A B 34.4 G: Approx. 300 H: Approx. 600 (Lead wire length) 78.8 [83.2] (Light/surge voltage suppressor) 41.5 [48.5] + 35.6 26.1 R1 P R2 13 5 10 10 10 M5 x 0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): SYJ3240-L-M5 M8 connector (W0): SYJ3240-W0-M5 M plug connector (M): SYJ3240-M-M5 Approx. 300 (Lead wire

MRHQ

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

MQQ

H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10 10.5 M5 x 0.8 M3 x 0.5 16 11.5 M6 x 1.0 M4 x 0.7 20 13.5 M8 x 1.25 M5 x 0.8 25 16.5 M10 x 1.25 M6 x 1.0 28 22.5 M14 x 1.5 M8 x 1.25 Clevis pin d Dd9 m m l t L t Applicable bore (mm) Applicable snap ring Part no.