IDX-OM-W017

. 6-3 6-4 . 6-4 6-5 . 6-5 7 A 7-1 . 7-1 7-2 . 7-1 7-3 . 7-1 7-4 . 7-1 8 C 8-1 . 8-1 8-2 . 8-1 8-3 . 8-1 9 K 9-1 . 9-1 9-2 . 9-1 10 L 10-1 . 10-1 10-2 . 10-1 10-3 (ADH4000-04) . 10-2 10-4 . 10-2 10-5 . 10-2 11 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-2 12 T 12-1 . 12-1 12-2 . 12-1 12-3 . 12-2 12-4 . 12-2 12-5 . 12-3 13 V 13-1 . 13-1 13-2 . 13-2

High Vacuum Angle Valve

Heater: Indicator: 5 Aluminum High Vacuum Angle Valve XLA/XLAV Series Dimensions XLA: Air operated (b) E C E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) [mm] Model A B C D E*1 Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95

HRX-OM-W058

Display and setting of various functions . 5-1 5.1 List of function . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.2.2 List of parameters . 5-4 5.3 Main screen . 5-7 5.3.1 Main screen . 5-7 5.3.2 Display on the main screen . 5-7 5.4 Alarm display menu . 5-8 5.4.1 Alarm display menu . 5-8 5.4.2 Content of display of alarm display menu . 5-8 5.5 Inspection monitor menu . 5-9 5.5.1 Inspection

HRX-OM-X027

Display and setting of various functions . 5-1 5.1 List of function . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.2.2 List of parameters . 5-4 5.3 Main screen . 5-7 5.3.1 Main screen . 5-7 5.3.2 Display on the main screen . 5-7 5.4 Alarm display menu . 5-8 5.4.1 Alarm display menu . 5-8 5.4.2 Content of display of alarm display menu . 5-8 5.5 Inspection monitor menu . 5-9 5.5.1 Inspection

NCM

Graph (5) Max.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

14 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 20 12 12 10,11 10, 11, 12 08, 09 1000 10 15 8 500 06, 07 10 6 500 4 5 2 0 0 5 10 0 5 10 0 Number of needle rotations Number of needle rotations 15-9-53 12 Series ASD-FG Construction ASD230FG ASD330FG/430FG ASD530FG/630FG ASD530FG-02 @1 !

30

Plug: KQB2P Applicable fitting size d A Weight (g) D L L Model A KQB2P-01 KQB2P-03 KQB2P-07 KQB2P-09 KQB2P-11 KQB2P-13 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 2.8 4.3 9.4 16.3 22.2 40.7 5 6 8 10 11 14 28.9 29.6 30.3 33.7 34.1 36.4 16.9 17 16.8 17.6 17.5 17.9 D d Applicable fitting size d 14 Metal One-touch Fittings Applicable Tube: Metric Size, Connection Thread: G Series KQB2 RoHS Applicable Tube

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

-0.053 -0.020 -0.053 -0.025 -0.064 -0.025 -0.064 20 5 8 31 23f8 5 M8 x 1.25 17 15 M22 x 1.5 1/8 81 9.5 4.5 6.5 138 10 41 25 6 8 34 25f8 5.5 M10 x 1.25 17 15 M24 x 1.5 1/8 81 11 3.5 5.5 143 10 46 32 8 9 40 31f8 7.5 M14 x 1.5 18 15 M30 x 1.5 1/8 87 13 3 4 159 10 53 40 10 11 48 34f8 7.5 M16 x 1.5 22 21 M33 x 2 1/4 108 16 5 0 183 16 54 7 Hydraulic Cylinder: 7MPa Series CHN Rear flange type:

Series 11-MXJ Air Slide Table

Reed Auto Switch: D-A93 (mm) Stroke B A Stroke C Auto switch operating range Stroke Model 5 10 15 20 5 10 15 20 5 10 15 20 11-MXJ4 11-MXJ6 11-MXJ8 14 14 0.5 0.5 9 4 4 3 14 14 18 0.5 0.5 0.5 9 4 10 5 25 14 14 25 0.5 0.5 0.5 0.5 9 4 Solid State Auto Switch (Lead Wire, In-line Entry): D-M9 (mm) Stroke B A Stroke C Stroke Auto switch operating range Model 5 10 15 20 5 10 15 20 5 10 15 20

Solid State Auto Switches

Weight (g) D-Y7NW(V) D-Y7PW(V) D-Y7BW(V) Auto switch model 0.5 m (Nil) 11 3 m (L) Lead wire length 54 5 m (Z) 88 Dimensions (mm) D-Y7W D-Y7WV M2.5 x 4 L Slotted set screw M2.5 x 4 L Slotted set screw Indicator light Indicator light 2.5 3.4 2.5 SMC SMC 6.2 5 6.2 5 29 27.3 3.4 Most sensitive position 12.5 8.5 Most sensitive position 12.5 1592 2-Color Indication Type Solid State Auto Switch

Series KV2 Fittings

(g) Bag/Box Quantity MC D2 D3 D4 L1 L2 Q 5/32 1/4 1/4** 3/8 3/8** 3/8** 3/8** 1/2 1/2** 5/8 5/32 1/4 1/4 3/8 3/8 3/8 3/8 1/2 1/2 5/8 5/32 1/4 3/8 3/8 5/32 1/4 1/2 1/2 3/8 5/8 KV2T03-00 KV2T07-00 KV2T07-11 KV2T11-00 KV2T11-03 KV2T11-07 KV2T11-13 KV2T13-00 KV2T13-11 KV2T15-00 10.4 13.2 17.9 17.9 17.9 17.9 21.7 21.7 21.7 26.5 10.6 13.3 18.1 18.1 18.1 18.1 22.1 22.1 22.1 27.0 10.4 13.2 17.9 17.9

VDW

M5 10 42.5 4 11 15.5 30 15 22 20 8 13.5 M3 M5, 1/8 11 5 15 17 36.5 11 Series VDW Glossary of Terms Pressure Terminology Others 1.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

to 30 5 to 30 5 to 50 5 to 50 6 8 7 12 6 8 10 12 25 29 36 40 5 5 5.5 5.5 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 32 38 47 52 5 6 8 10 3.5 3.5 4.5 5 15.5 20 25.5 28 3.5 3.5 5.4 5.4 M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 Note 1) Threaded through hole is used for the standard of 20 with 5 to 10 mm strokes and 25 with a 5 mm stroke.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

to 30 5 to 30 5 to 50 5 to 50 6 8 7 12 6 8 10 12 25 29 36 40 5 5 5.5 5.5 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 32 38 47 52 5 6 8 10 3.5 3.5 4.5 5 15.5 20 25.5 28 3.5 3.5 5.4 5.4 M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 Note 1) Threaded through hole is used for the standard of 20 with 5 to 10 mm strokes and 25 with a 5 mm stroke.

IDX-OM-W011

6-3 6-4 . 6-4 6-5 . 6-7 7 A 7-1 . 7-1 7-2 . 7-1 7-3 . 7-1 7-4 . 7-1 7-5 . 7-2 8 C 8-1 . 8-1 8-2 . 8-1 9 K 9-1 . 9-1 9-2 . 9-1 10 L 10-1 . 10-1 10-2 . 10-1 10-3 . 10-2 10-4 . 10-2 11 M 11-1 . 11-1 11-2 . 11-1 11-3 . 11-2 11-4 . 11-2 12 R 12-1 . 12-1 12-2 . 12-1 12-3 . 12-1 12-4 . 12-2 12-5 . 12-2 2 13 S 13-1 . 13-1 13-2 . 13-2 13-3 . 13-2 14 T 14

Modular F.R.L. Unit

Note 5) Separate interfaces are required for modular unit. Note 6) When N is specified in the end of part number of auto drain, applicable tube O.D should be 3/8". 11 F.R.L.

Booster Regulator/Air Tank

Rc 3/8 EXH: Rc 1/4 60 OUT (328) Tank OUT port Rc 1/2 278 180 170 4 x 11 32 32 Drain port Rc 1/4 120 180 312 460 Connected to VBA20A Connected to VBA22A Tank IN port Rc 3/8 Booster regulator IN port Rc 3/8 Booster regulator IN port Rc 3/8 EXH: Rc 3/8 EXH: Rc 3/8 (454) 442 (417) Tank OUT port Rc 1/2 (367) (367) OUT OUT 278 180 180 170 4 x 11 4 x 11 32 32 120 180 180 120 Drain port Rc 1/4 312

IDX-OM-W013

for Option R 11 1 Safety instructions . 11 1 11 2 Specifications . 11 1 11 3 Power supply connection procedure . 11 2 11 4 Cautions for handling the GFCI . 11 3 11 5 Electric circuit . 11 3 Chapter 12 Specification for Option S 12 1 Safety instructions . 12 1 12 2 Specifications . 12 1 12 3 Electric circuit . 12 1 Chapter 13 Specification for Option T 13 1 Safety instructions . 13 1 13 2

10

If there is something you do not know, please contact SMC. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side.

IDX-OM-W010

Specification for Option M 11 1 Safety instructions . 11 1 11 2 Specifications . 11 2 11 3 Installation of motor type auto drain . 11 3 11 4 Electric circuit . 11 3 Chapter 12 Specification for Option R 12 1 Safety instructions . 12 1 12 2 Specifications . 12 1 12 3 Power supply connection procedure . 12 2 12 4 Cautions for handling the GFCI . 12 3 12 5 Electric circuit . 12 3 Chapter 13