Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

(No condensation) Withstand voltage 500 VAC for 1 minute between external terminals and F.E. Insulation resistance 500 VDC, 10 M min. between external terminals and F.E.

Compact Cylinder

Standard CE marking Lead wires Oilproof heavy-duty vinyl cable: 2.7 x 3.2 ellipse D-M9B(V) 0.15 mm2 x 2 cores D-M9N(V), D-M9P(V) 0.15 mm2 x 3 cores Note 1) Refer to page 11 for solid state switch common specifications. Note 2) Refer to page 11 for lead wire lengths. Weights Unit: g D-M9N(V) D-M9P(V) D-M9B(V) Auto switch part no.

Vacuum Manifold for fieldbus system

Supply valve chatters Deformation of the check valve Refer to (11) -34No. ZKJ-OM00201-D Countermeasure No.

Digital Flow Switch

Return to measurement mode. : The above example is for the 500 L/min type. : For models with switch outputs for both OUT1 and OUT2, [P_2] or [n_2] will be displayed too.

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

up to 500 up to 600 up to 600 up to 750 up to 750 50 55 70 80 100 120 C95 FT FX ZZ + Stroke FZ CA1 CS1 Single clevis/(C) Port Cushion valve Single clevis CDH10 (mm) Bore size (mm) Stroke range H10 CX 0.1 ZZ Z U RR L CD 0.3 32 40 50 63 80 100 164.5 169 197 197 251 251 154 158 182 182 228 228 13 13 17 17 26 26 14 14 20 20 30 30 10.5 11 15 15 23 23 up to 500 up to 500 up to 600 up to 600 up

CLS

4000 4000 3000 3000 200 180 2000 2000 160 250 140 Load weight: m (kg) Load weight: m (kg) 125 200 1000 1000 700 800 900 700 800 900 180 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 9-9-7 8 Cylinder with Lock Double Acting, Single Rod Series CLS 125, 140, 160, 180, 200, 250 How to Order

MQQ

16 15 8 21 4.5 11 66 + Stroke 27.5 93.5 + Stroke 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 MM A F S + Stroke F H ZZ + Stroke (mm) Bore size (mm) A D NN F G1 P G2 MM S I ZZ H J N1 N2 NA M5 x 0.8 16 15 4 8 15 6 M12 x 1 M4 x 0.7 65 18.5 101 28 11 20 16 10 M5 x 0.8 22 15 5 10 15 6 M14 x 1 M5 x 0.8 74 22 114 30 12 21 19.5 16 Rc 1/8 28.5 18 8 13 25 8.5 M20 x 1.5 M8 x

Pin Cylinders Series CJP2/CJP

When using the below fittings be sure to provide a speed controller after adjusting it to 500 mm/s or less.

Thermo-chiller

mA AC/DC (resistance load) Minimum load current 5 VDC 10 mA Output voltage 24 VDC 10% 500 mA MAX (No inductive load) Contact output signal To the thermo-chiller Users equipment side 7 24 VDC 6 24 VDC output (500 mA MAX) 5 15 14 24 VCOM output 13 24 VCOM Signal description Default setting 12 4.7 k Contact input signal 2 Circuit diagram 4 1 k 11 Run/stop signal input Contact input signal

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

30 27 60 22 44 16 13 32 10 15 51 8 42.3 56 M8 x 1.25 6 14 11 M14 x 1.5 19 27 17 84 2.5 25 146 1/4 up to 600 35 32 70 27 52 20 13 40 12 17 58 11 47.3 61 M8 x 1.25 7 18 11 M18 x 1.5 19 30 17 90 2.5 25 159 3/8 up to 600 35 32 85 27 64 20 15.5 40 10 17 58 11 54.8 68.5 M10 x 1.25 7 18 14 M18 x 1.5 19 31 17 98 4 25 170 3/8 up to 750 40 37 32 78 25 52 14 21 71 13 65.8 M12 x 1.75 11 22 17 M22 x

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Standard stroke Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) Suffix for stroke adjusting unit 25 32 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 2000 2000 2000 Nil S 2 pcs. 1 pc.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Standard stroke Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) Suffix for stroke adjusting unit 25 32 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 2000 2000 2000 Nil S 2 pcs. 1 pc.

MLGP

Bore size (mm) a b c d e b a 6.5 8.5 11 10.5 13.5 17.8 5.5 7.5 10 4 4.5 7 11 13.5 18.5 40 50 63 Note 2) For intermediate strokes, dimensions A, B, C, E, WA, and WB will be the same as the longer of the standard strokes. c d e MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA Extension locking Retraction locking ID IE IH J K L IB 100

MLGP

Bore size (mm) a b c d e b a 6.5 8.5 11 10.5 13.5 17.8 5.5 7.5 10 4 4.5 7 11 13.5 18.5 40 50 63 Note 2) For intermediate strokes, dimensions A, B, C, E, WA, and WB will be the same as the longer of the standard strokes. c d e MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA Extension locking Retraction locking ID IE IH J K L IB 100

Digital Pressure Switch

ZSE40A ZSE40AF ISE40A (vacuum) (compound) (positive pressure) Rated pressure range 0 to -101.3 kPa -100.0 to 100.0 kPa -0.100 to 1.000 MPa Set pressure range 10.0 to -105.0 kPa -105.0 to 105.0 kPa -0.105 to 1.050 MPa Withstand pressure 500 kPa 500 kPa 1.5 MPa Minimum display unit 0.1 kPa 0.1 kPa 0.001 MPa Applicable fluid Air, inert gases and incombustible gases Power supply voltage 12 to

PFxx-OMS0001CN

500] 500 L/min(PFMC7102) 29 [F 1] [ 1000] 1000 L/min(PFMC7202) [ 25] 25 L/min(PFMC7501) [ H_1] OUT1 [ 50] 50 L/min(PFMC7102) [ 100] 100 L/min(PFMC7202) [ CoL] OUT1 [SoG] ONOFF [ oU2] OUT2 2 [ HYS] [ 2ot] OUT2 2 [ 2_P] [ 250] 250 L/min(PFMC7501) [ P_2] OUT2 2 [ 500] 500 L/min(PFMC7102) 37 [F 2] [ 1000] 1000 L/min(PFMC7202) [ 25] 25 L/min(PFMC7501) [ H_2] OUT2 2 [ 50] 50 L/min(PFMC7102) [

CY1F

speed mm/s Piston speed mm/s 4 CY1F/m1 5 CY1F/m2 6 CY1F/m3 7 CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm/s Piston speed mm

39

A002 CKZ Arm 63 Arm code (Refer to page 3 and 8 through to 11.)

Flow Control Equipment

4.6 7.5 6 12 7.2 6.6 18 3.3 6.3 6.4 9.3 7.7 15.4 8.5 8.3 21 TMH-06J TMH-06 TMH-08 TMH-10 4.3 7.1 7.2 11 10 20 11 10.6 26.5 TMH-07 TMH-09 TMH-11 4.3 9.5 9.6 14 14 28 14.2 14.6 34 TMH-12 TMH-13 Note 1) Mounting bracket is not available.

Process Valve Series VNA

(mm) Model Rc FlangeNote) Cv 7 12 11 18 11 18 19 28 19 28 29 43 29 43 Effective area (mm2) 130 220 210 320 210 320 330 500 330 500 520 770 520 770 VNB44-25A VNB4-25A VNB54-32A VNB5-32A VNB54-32F VNB5-32F VNB64-40A VNB6-40A VNB64-40F VNB6-40F VNB74-50A VNB7-50A VNB74-50F VNB7-50F 16 25 22 32 22 32 28 40 28 40 33 50 33 50 1.4 1.5 1 2.5 2.6 1 4 1 5.7 5.8 32 4.1 4.2 1 2 1 JIS Symbol Valve