(For details, refer to "Specific Product Precautions 1" on Page 11.)
or less (24 VDC) P2: Analog output 1 to 5 V Allowable load resistance 100 k or more P6: Analog output 4 to 20 mA Allowable load resistance 300 or less (12 VDC), 600 or less (24 VDC) 339 LLB Series Refer to the operation manual for how to set and to operate.
Part Material AXT662-11 (1: M5, 2: M3) 2 Sub-plate ZDC o Optional Parts Gasket, screw: VQ100-GS-5 Note) 1 set includes: 1 gasket and 2 screws.
Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size Rc A B C D E F H K L M N Model Note) U Q V R Q R Q R S Q R S 83 22 23 45 44 43 58 40.5 46.5 99 43 66 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 1/8 VCL21 86 22 23 46 44 44 58
Material Note PBT PBT Description Body A Body B Needle Seat ring Spring U seal Cassette Seal O-ring O-ring O-ring O-ring Gasket 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 1 2 3 4 5 6 7 8 9 10 11 12 13 14 Body A Elbow body Body B Needle Seat ring Spring U seal Cassette Seal O-ring O-ring O-ring O-ring O-ring Electroless nickel plated Electroless nickel plated Electroless nickel plated Brass
1 q t i 16-11-40 5 Series PF2D Digital Flow Switch For Deionized Water and Chemicals Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuit and wiring example 60 70 176 z to , are terminal numbers.
: 0.5 MPa 12, 13 10, 11 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 10, 11, 12 Effective area (mm2) Effective area (mm2) 08, 09 AS 06, 07 ASP ASN AQ Number of needle rotations Number of needle rotations ASV AK JIS Symbol Flow Direction Symbols on Body ASS Meter-out type Meter-in type ASR Symbol JIS Symbol ASF Flow Rate and Effective Area AS121F AS131F AS221F-01 AS231F-01 AS221F-02 AS231F
2 3 4 5 n U side VDW23-GVDW23-GVDW23-GVDW23-G70 31.5 21 18.5 (OUT port) n-1/8 n-M5 x 0.8 11 P = 22 11 4.5 1.5 54 6 32 6 (19.5) 9.5 11 9.5 11 4-M4 x 0.7 46 10 24 10 When w/o bracket, M3 threads at both ends (4 positions) can be used for other purposes.
Manifold base recommended dimensions Lead wire Base mounting hole 1 (IN) 2 (OUT) 1 (IN) 9.5 or more Valve mounting pitch 2 (OUT) A A M3 x 0.5 Thread depth 5 2 (OUT) port 1 (IN) port 3 M3 x 0.5 Thread depth 5 Electrical entry can be on the either side, right or left. 2 (OUT) port 3 11 11 40 Sectional view A-A (2:1) 4 4 46 or more RZ12.5 1 (IN) port 510 High Speed 2 Port Valve SX10 Series Control
Display the error code on LCD. 3 1/2 digits (5 mm-size numerals) Overcurrent, Overpressure, Data error Pressure during 0 clear 0 to 60C (No dewing) 1000 Vp-p, Pulse width 1 s, Rise time 1 ns Between external terminals and housing 1000 VAC, 50/60 Hz for 1 min.
200mm/s 30mm/s 80mm/s Positioning repeatability :tO.05mm i0.03mm Type ot guide Linear guide Operating temperature range s to 4o"C (40-105"F) Pitch (Nm) Statlc moment allowance Boll (Nm) Yaw (Nm) 4 Construction Com 1 0 Stopper B Sensor plate Sofl steel Chrcmated 12 Co!
Reed switch isee P.11 lor detaits.) Cylinder stroke (mm) 1 0 , 1 5 , 2 0 1 0 , 1 5 , 2 0 Solid state switch (see P.ll tordetails.) Rod end contiguration Auto switch mounting bracket o-Am H AEOH A-7trC A80C D F79 D J79 D J79C ' The leler model is applied only 10 bore siz$ i M 3 r 0 . 5 x S l The slandad ead w 6 anglh s 0.5m.'L' 5 added lor 3m Ltrdfl,#:"[ffi."
11 100+55!fl 110+559120+559 Differenl 1 5 90 100 1 1 0 Same 90 100 1 1 0 Ditterent 15+5d!
M U D J Bracket (Option) AR20(K)-B to AR40(K)-06-B 2 x P1 Panel fitting dimensions A (Port size) Y W C B Q V K OUT OUT IN IN Z Plate thickness AR20(K)-B to AR30(K)-B: Max. 3.5 AR40(K)-B : Max. 5 R F P2 S (Pressure gauge port size) Bracket (Option) U M J D T N AR50(K)-B/AR60(K)-B 2 x P1 A (Port size) B Q C K OUT IN R F P2 S (Pressure gauge port size) Bracket (Option) T N J M D U 73 Regulator
T U V W Y Z AR10-A 25 28 30 4.5 6.5 40 2 18 18.5 AR20(K)-B 30 34 43.9 5.4 15.4 55 2.3 24.7 28.5 14 6 AR25(K)-B 30 34 43.9 5.4 15.4 55 2.3 25.7 32.5 16 6 AR30(K)-B 41 40 45.8 6.5 8 53 2.3 31.1 38.5 19 7 AR40(K)-B 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 AR40(K)-06-B 50 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 AR50(K)-B 70 66 65.8 11 13 90 3.2 AR60(K)-B 70 66 65.8 11 13 90 3.2 *1 The dimension
Rc NPT G Function 0 1 2 3 position closed center 3 position exhaust center 2 position Flow Characteristics VH200 VH300 VH400 Effective area S = 55 mm2 Effective area S = 7.5 mm2 Effective area S = 20 mm2 Supply pressure MPa Supply pressure MPa Supply pressure MPa Supply pressure MPa Supply pressure MPa Supply pressure MPa Supply pressure MPa Supply pressure MPa 1.0 1.0 1.0 1.0 1.0 1.0 Valve
I { 0 s l I l 6 l ; D.0 t' 6 l 0.6 0.5 o.4 0.3 6 ' ) !
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Breaker capacity Sensitivity current Model Voltage Maximum operating pressure: 1.6 MPa (IDFA100F to 150F: 1.0 MPa) IDFA4E-23, IDFA6E-23 IDFA8E-23, IDFA11E-23 5 A The timer-type solenoid valve actuates once (for 0.5 s) every 30 s. Replacement Parts 230 V type IDFA15E1-23, IDFA22E-23 IDFA37E-23, IDFA55E-23 IDFA75E-23 10 A 30 mA Model Part no.
No.PF-OMP0001CN-F // PFMB7501 PFMB7102 PFMB7202 2 10 11 12 14 14 16 17 [] 21 OU1OUT2 {3 ] 22 22 [] 24 25 F0 26 F1 OUT1 28 F2 OUT2 36 F3 41 F10 42 F13 43 F20 44 F22 45 F30 46 F31 47 F80 OFF 48 F81 49 F90 50 F98 52 F99 53 54 58 59 61 62 62 65 67 -1No.PF-OMP0001CN-F (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems