3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

L dimension 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 VQZ 285.5 21 273 No.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

1.5 6 ZPNA-M18 27 31.2 M18 x 1.5 9 ZPNA-M22 30 34.6 M22 x 1.5 8 Bolts (Hexagonal Socket Head Cap Screw) Dimensions d Dimensions (mm) B A B d L 11 5.5 M3 x 0.5 8 L 12 7 M4 x 0.7 8 10 A 15 8.5 M5 x 0.8 1214

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

flats C G E H B NN Effective thread length T (R) NA Q N F NA I F N CC 0.1 + 12-CY3B50, 63 12-CY3B6 to 15 (mm) B 17 25 35 36 46 60 70 86 100 0.007 0.043 30 32 CC 32 38 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 E 4 1.5 2 2 2 2 3 8 8 F 8 9 10 13 13 16 16 2 2 G 5 5 5.5 7.5 7.5 8 11 14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 N 9.5 11 11 18 18.5 20

Compact Cylinder

RB T Z 32 40 50 63 51 44 12 16 46 8.5 M8 x 1.25 59 2 14 7 32.5 5.5 M6 x 1.0 9 14.5 11 5 1 15 52 45 12 16 52 9.5 M8 x 1.25 67 3 14 7 38 5.5 M6 x 1.0 9 14.5 11 5 1 17 53 45 16 20 64 10.5 M10 x 1.5 82 2 17 8 46.5 6.6 M8 x 1.25 10.5 13.5 11 5 1.6 17 57 49 16 20 74 14.5 M10 x 1.5 96 3 17 8 56.5 6.6 M8 x 1.25 10.5 15.5 11 5 1.6 17 7 ISO Standards [ISO/21287] Compact Cylinder Series C55 Mounting

ML2B

2-PA (Port for operating cylinder) J J J J D D 2-PB 2-PB 2-MB, Depth LB II II (Hexagon socket head taper plug) (Hexagon socket head taper plug) J J 28 32 36 G 30 37 45 J 40 46.5 55 DD 11 15 16.5 A 110 140 170 H 73 88 106 EE 14.5 16 22 K 46 58 68 FF 63.5 77.5 95 L 45.5 54 64 GG 22 27 35 M 30.9 32.4 41.4 HH 24 32 37 N 16 15 19 O 69 84 102 P 41 56 68 CC 16 19 23 BB 30 35 40 AA 106 133 164 B

ML2B

h 3.5 4.5 4.5 Applicable cylinder ML2B25 ML2B32 ML2B40 10-13-15 13 Series ML2B Dimensions Side support A MY-SA 2-G F E 2-H C D A B Side support B MY-SB 2-J C D A B (mm) A 61 70 87 B 75 84 105 C D E F G H J Part no.

Compressed Air Preparation Filter

1 90 314.8 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 336.3 Specific Product Precautions Semi-standard specifications PC/PA bowl1 Stainless steel bowl2 Metal bowl1 Metal bowl with level gauge1 Element service indicator With barb fitting With drain guide With drain cock With drain guide With drain cock With drain guide Model B B B B B B W AFF20-D/AM20-D/AMD20-D 146.1 142.1 148.6 50.6 AFF30

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Description Side cover Bearing retainer Bumper End cover A End cover B Inner cover Motor cover A Motor cover B Auto switch Magnet Brake Material Note 200W Ball screw/Slide screw 1 2 3 4 5 6 7 8 9 10 11 No.

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

Specifications Suction Flow Rate of Vacuum Suction Type (Reference values) Nominal size Item 15, 20, 30 10 0.2 to 0.6 MPa 0 to 60C 0.15 to 0.6 MPa Operating pressure Ambient and fluid temperature Size Suction flow rate L/min (ANR) 10/15 20/30 0.01 mm 180 c.p.m. 1 2 Repeatability Maximum operating frequency 11-: Fluorine grease 22-: Lithium soap based grease 11-/22-: Class 3 Grease Cleanliness

IDX-OM-W011

M 11-1 . 11-1 11-2 . 11-1 11-3 . 11-2 11-4 . 11-2 12 R 12-1 . 12-1 12-2 . 12-1 12-3 . 12-1 12-4 . 12-2 12-5 . 12-2 2 13 S 13-1 . 13-1 13-2 . 13-2 13-3 . 13-2 14 T 14-1 . 14-1 14-2 . 14-1 14-3 . 14-1 14-4 . 14-2 14-5 . 14-3 15 15-1 . 15-1 3 IDX-OM-W011 i i i-1 () 3 i 1 1 3 IDF Series i-1 i-1 IDX-OM-W011 i i-2 5 i 2 1 IDF Series i-2 i-2 IDX-OM-W011 i

Air Pilot Operated Series NVSA

I$ODEL NO. 2 , 1 3 (s4) S P & S P A 0 1 1 3 43 y. qB siB s/B s/g 9a SP & SPA 0114 54 B B B B sP & sPA 0115 45 S s I 2 MTNG HOLES .FOOTPRINT' CLASS 1 SUB.PLATE MOUNTED 'SWAY VATVES '49 i.'8 (?

MHF2

) 7 2-2H9 +0.025 0 depth 2 3 3 7 11 11 Groove for auto switch mounting 2-M3 x 0.5 thread depth 4 Mounting thread 11 34 12-3-13 14 Series MHF2 Dimensions MHF2-8D2 2.5H9 +0.025 0 depth 2.5 17 17 17 2.5H9 +0.025 0 depth 2.5 3 3.4 64.3 4-M3 x 0.5 thread depth 7 Mounting thread 32 72 2-M3 x 0.5 thread depth 4 Mounting thread 15.8 58 5.9 E 11 11 14 19 E 0 -0.1 4-2.6 through (Mounting hole) M3 x

MHF2

x 0.5 thread depth 4 Mounting thread 50 Auto Switch Mounting Groove Dimensions M2.5 x 0.45 4 1.3 15 26 12 4 Accessory option: Hexagon socket head screw (special screws) 3 3 2-2H9 +0.025 0 depth 2 8 5 8 5 Groove for auto switch mounting 2-M3 x 0.5 thread depth 4 Mounting thread 11 58 12-3-14 15 Series MHF2 Low Profile Air Gripper Dimensions MHF2-12D 3H9 +0.025 0 depth 3 26 3H9 +0.030 0 depth

CUJ

Solid state switch D-F8 CUJ (As compared with SMC Series CU cylinders without magnet) Dimensions (Without magnet) Series Variations Bore size (mm) A(a) B(b) C(c) Bore size (mm) Rod end configuration Stroke (mm) Clean series 4 6 8 10 15 20 b Action Series Auto switch B Double acting Male thread Without thread None 4 10() 15() 13() 4 Single acting, Spring return 6 13(13) 19(22) 13(33) Double

240

8 4 x M5 x 0.8 Depth 11 2 x M5 x 0.8 Cylinder port MXJ 4 x M5 x 0.8 Depth 8 6.5 34 6 MXP 24.5 34 63.5 64.5 MXY MTS 32 7 32 7 34 6 6 NS 52.5 + Stroke 68 + Stroke 32 20 11 15.5 20 15 10 + Stroke 15 4 x M5 x 0.8 Depth 8 20 Note 1) Refer to Specific Product Precautions for mounting of the Compact Slide and a workpiece.

EXxx-OMS0026CN

to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: (1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4

Aluminum High Vacuum Angle Valve

XLG50, 63, 80, 100, 160/ Air operated (b) D E C E C E XLA Fn (KF flange) Fd (K flange) (a) XL XL XLQ (c) XM XY DJ K XSA H B XVD A XGT G CYV A (mm) J A B C D E Note 1) Fn Fd G H K Model XLG-50 XLG-63 XLG-80 XLG-100 XLG-160 70 183 80 31 10.5 75 52 77 29 10.5 88 209 100 39 11 87 95 70 76.5 36 9 90 250 117 45.5 11 114 110 83 105 44 9 108 270.5 154 55 11 134 130 102 92 58 9 138 339 200 65 11

Compact manifold regulator ARM5 Series

Stations L2 dimension IN IN 1 2 3 4 5 6 7 8 9 M VVQ1000-90-6 85.5 35 VVQ1000-90-7 98 16 VVQ1000-90-8 110.5 VVQ1000-90-9 123 IN side OUT side VVQ1000-90-10 135.5 Fitting size VVQ1000-90-12 160.5 Straight Elbow Elbow Elbow Straight Elbow Elbow Elbow R S T U V W X Y VVQ1000-90-13 173 4, 5/32 VVQ1000-90-14 185.5 2.5 6 11 37.5 2.5 6 11 37.5 6 VVQ1000-90-15 198 3 6.5 11 38 3 6.5 11 38 1/4 VVQ1000

MGC

View A-A Bore size (mm) Stroke range (mm) AF AE AD AC AB AA A G F E D C B AP H 20 25 32 40 50 75, 100, 125, 150, 200 25 62 15.5 13 11 84 5.6 90 45 24 106 M5 x 0.8 depth 10 9.5 depth 6 22 M6 x 1 depth 10 30 65 16.5 13 15 89 6.8 103 45 26.5 120 11 depth 8 M6 x 1 depth 12 M8 x 1.25 depth 14 27 75, 100 125, 150 200, 250 300 35 70 16.5 13 15 94 6.8 118 50 26.5 135 11 depth 8 M6 x 1 depth 12 M8

S070

It can cause malfunction or break the coil. 4-11-19