ARM10/11

Metric size Inch size 1 2 3 4 5 6 7 8 9 M 1 station Elbow Straight Elbow OUT side IN side Straight 6 Elbow Straight Elbow OUT side IN side Straight 2 stations Symbol Symbol Note) 3 stations 8 10 6 8 10 4 6 4 6 1/4 5/16 3/8 1/4 5/16 3/8 5/32 1/4 5/32 1/4 4 stations 07 08 09 10 11 12 19 20 21 22 23 24 26 27 28 29 30 31 33 34 35 36 37 38 57 58 59 60 61 62 69 70 71 72 73 74 76 77 78 79 80

ARM10/11

Metric size Inch size 1 2 3 4 5 6 7 8 9 M 1 station Elbow Straight Elbow OUT side IN side Straight 6 Elbow Straight Elbow OUT side IN side Straight 2 stations Symbol Symbol Note) 3 stations 8 10 6 8 10 4 6 4 6 1/4 5/16 3/8 1/4 5/16 3/8 5/32 1/4 5/32 1/4 4 stations 07 08 09 10 11 12 19 20 21 22 23 24 26 27 28 29 30 31 33 34 35 36 37 38 57 58 59 60 61 62 69 70 71 72 73 74 76 77 78 79 80

modular-press-e

Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 E100-M5 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure switch with piping adapter Note 7) Y24-01 02 Y34-01 02 Y54-03 04 Cross spacer Note 7) Y14-M5 Y14-M5 Note 1) in part numbers for a round pressure gauge indicates

Modular F.R.L. Pressure Control Equipment

Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 E100-M5 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure switch with piping adapter Note 7) Y24-01 02 Y34-01 02 Y54-03 04 Cross spacer Note 7) Y14-M5 Y14-M5 Note 1) in part numbers for a round pressure gauge indicates

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

x 0.8 M8 x 1.25 M10 x 1.5 GB 17 19.5 31.5 H 28 37 58 L 80 110.8 180 LA 70 100 158 NE 27 35.5 56.5 NH 3 4 5 NT 4.7 6.5 9 G 8.5 10.7 15.5 LW 120 176 229 M 9 12 16 N 20 25 40 NC 14 21.3 32.4 A 80 105 165 B 9.5 14 17.5 C 5.4 8.6 10.8 LB 87.4 124.7 148.3 LE 5 6 8 (LL) 40 49.6 75 LD 5.5 9 11 Model MY2HT16G MY2HT25G MY2HT40G P M5 x 0.8 1/8 1/4 PF 10 12 20 PC 4 9.4 8.5 PD 23 29.2 36 PG 10 12.5 20

ASD

Millimeter Inch With One-touch fittings 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 01 03 05 07 09 11 4 6 8 10 12 04 06 08 10 12 Thread _ Meter thread (M5) Unified thread (10-32 UNF) R(PT) N NPT Port size M5 X 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 AS ASN AQ ASV Needle Valve/Flow Characteristics AK ASD230F ASD330F ASD430F ASS 100 200 400 1.5 6 3 07, 08, 09, 10, 11 Effective area (mm2) Flow

Dedicated Controller

SET-ON 10 Start readiness signal CN2 24V DC + COM 1 COM 11 NO. 0 Indicates operation in progress when ON. ON when program is being executed and when returning to the home position. 2 BUSY 11 Operating signal NO. 1 12 NO. 2 3 <1> When this signal is OFF, an alarm is being generated for the actuator/controller.

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

light and $rge With surge voltage Voltag Surge voltage suppressor of grommet type. ' Not aveil.lor grolnmel typo. t Spcial order 5;3 position pressure cenrer Pott size 10-32Nom, (M5 x0.8) ' Spedel Order.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

: 0.5 MPa 1500 Inlet pressure: 0.5 MPa 1000 10, 11, 12 Flow rate [L/min(ANR)] Flow rate [L/min(ANR)] 12, 13 1000 08, 09 10, 11 06, 07 500 500 0 0 5 10 0 0 5 10 Number of needle rotations Number of needle rotations The numbers above the flow rate characteristic curves in the charts show the applicable tubing outside diameter as defined by the product number.

Vacuum Pad

ZP3PA-T2-B8 [Weight: 8.5 g] 24 16 M5 x 0.8 M8 x 1.25 4 12.5 1.9 6 12 2.4 5 8 Width across flats 14 Width across flats 21 10 7.5 3 13 10.7 4 Applicable pad part no. ZP3P-20PTSF ZP3P-25PTSF Applicable pad part no. ZP3P-35PTSF ZP3P-50PTSF 11 ZP3P Series Buffer Assembly Part Nos.

Slider Type Ball Screw Drive/11-LEFS Series

11-LEFS32ll-450l 791 821 456 580 8 3 450 11-LEFS32ll-500l 841 871 506 630 10 4 600 11-LEFS32ll-550l 891 921 556 680 10 4 600 11-LEFS32ll-600l 941 971 606 730 10 4 600 11-LEFS32ll-650l 991 1021 656 780 12 5 750 11-LEFS32ll-700l 1041 1071 706 830 12 5 750 11-LEFS32ll-750l 1091 1121 756 880 12 5 750 11-LEFS32ll-800l 1141 1171 806 930 14 6 900 525 11-LEFS Series AC Servo Motor Clean Room Specification

Cylinder

> I A, ' Y.POO6 I 6 5 6 3g 040 112 3,5 M3XQ,5 5 3 5 I ~POO6 6 5 6 I 3 I-g040 112 3,5 M3 x Q,5 5 3 5 1 4 -1 -11'(51.0,1 '10 $,~ ~o ! 5+ g"'" 116 5:5 M4XO,7 YPOIO , '10 6.S 10 sg04I 16 5.5I M,4 XQ,7 71' 5 a 6.3 7 I 5 a 1 6.3 YP015 I 15 7 12 ~-g.048 19 7 M5XO,a 9 I 6 10 ,7.8 10 7,a ...!:!'.015 l 15 7 12 6 -g~ 19 9 I 6 7 M5 x O.B . ~I ~--~~ K ~~ P~ ' ~k I -TFunnion Pin' . , nue ' :e In .

212

140.5 LVR50-V19 22 80 120 169 C F E Breathing port M5 x 0.8 J Tube extensions 4 x 7 Mounting hole 1/8 (Rc, NPT) Pilot port A H D B G Breathing port M5 x 0.8 Model A B C D E LVR20-T07(06) 40 40 49.3 68 20.1 LVR40-T11(10) 82.5 82.5 89 115 33 IN C F Model F G H J K LVR20-T07(06) 8 27 56 33.5 126.2 LVR40-T11(10) 14 64.5 100 40 183.3 E K J J Breathing port M5 x 0.8 5 Applicable Fluids Regulator

LX

/Without Motor Brake Series LXS Dimensions/LXSH2BD Scale: 25% F G x I 5H9 +0.030 0 depth 5 +0.030 0 depth 5 D-5.1 through 5H9 10 7.5 E-M5 thread depth 10 Refer to Cross section C-C, bottom view. 6 LJ1 LG1 LC1 LX LC6D/LC6C Switches 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 13 15 Stroke + 127 3.5 (5) 0.5 46.5 2-

VM

-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM-30AR Red Push button (Mushroom) VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM-30AB Black VM120-01-30B VM-30AG Green VM120-01-30G VM

VCW

) 10 is N.C.

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

Applicable cable O.D. 3.5 to 7 Station n L1 L2 3 80 68 Station 20 403 391 6 137 125 8 175 163 10 213 201 Station 2 61 49 4 99 87 5 118 106 7 156 144 9 194 182 11 232 220 12 251 239 13 270 258 14 289 277 15 308 296 16 327 315 17 346 334 18 365 353 19 384 372 47 Series SYJ700 N7 N9 C6 C8 [ ] for AC Type 42R Manifold: Side Ported/SS3YJ7-42RStations -01, , Grommet (G) 63.5 M5 x 0.8 (X port

Title not found

-diameier r-t, L, | , u, E 3/16" 1t4" 07 09 1 1 3/8" 1/2" 6mm 8mm 10mm 12mm 06 08 1 0 H , T , U , X , N '10-32 UNF Thread 1/16" NPT 1/8" NPT 1/; NPT H, L, W, T, Y, U, E Double branch \" Male run tee Double branch universal elbow Branch unNersal elbow Branch universal female elbow Triple branch universal elbow M5 x 0.8 M6 x 1.0 PT1/8 PT1/4 PT3/8 Pr1/2 M6 0 t 02 03 o4 a a a a a a a a a a a

Series SYJA300 3 Port Air Operated Valve

holes) 17 3 (For solenoid valve) M3 X 0.5 2.5 (Pilot port) A 11 17.5 1.5 21 27 30 28.5 P R 1 (Bleed port) 13 5 8.6 10 (P, A, R port) 3-M5 X 0.8 23 3.3-2 3 Port Air Operated Valve Series SYJA500/700 Model Valve model Actuation Port size Weight (g) Pilot port size Effective area (mm2) (Cv) SYJA512-M5 N.C. 3.6 (0.2) 45 Body ported M5 X 0.8 SYJA522-M5 N.O.

PSxx-OMM0006CN

(M8(3 )11 ) 01 X M ISE40A 2 K ISE40A -0.11.000 MPa ZSE40A 0.0-101.3 kPa ZSE40AF -100.0100 kPa 1 01 R1/8 (M5) A A N01 NPT1/8 (M5) W1 Rc1/8 B B WF1 G1/81 D D M5 M5X0.8 () E C4 4 C6 6 F + 1IS0228-1 P10/1 X NPN2() Y PNP2() 1 R NPN2 +/ T PNP2 +/ M SI2 P (psi)1 S NPN2 +/ 1 2kPaMPa V PNP2 +/ -9No.PS-OMM0006CN-E /1 1 01 N01 W1 WF1 M5 C4 C6 A A ZS-24-A X X X B B ZS-24-B X X X X X D