Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

0.10 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250 Load (N) 150 100 50 200 250 Load (N) 150 100 100 400 500 Load (N) 300 200 8-8-10 10 Precision Air Slide Table Series MXP Table Accuracy Traveling parallelism C C side parallelism to A side D M D side parallelism to B side B W A Port C MX M MTS B Distance from 0 of gauge dial when guide block is moved to full stroke after body

KN Series Nozzles for Blowing

Copper extension nozzle/KNL (mm) Model Nozzle size D Outside diameter L1 Weight (g) KNL3-06-150 KNL3-06-200 KNL3-08-200 KNL3-08-250 KNL3-10-250 KNL3-10-300 KNL6-06-150 KNL6-06-200 KNL6-08-200 KNL6-08-250 KNL6-10-250 KNL6-10-300 1.5 2 2 2.5 2.5 3 1.5 2 2 2.5 2.5 3 6 6 8 8 10 10 6 6 8 8 10 10 300 300 300 300 300 300 600 600 600 600 600 600 43 43 61 61 94 94 84 84 117 117 183 183 O.D.

HRX-OM-X071

13 Power supply Single-phase 200 to 230VAC 50/60Hz Allowable voltage range +/-10%13 3-phase 460 to 480VAC (60Hz) Allowable voltage range +4%, -10%13 Circuit protector A 20 10 Applicable earth leakage breaker12 Rated current20A Rated current10A Electrical Sensitivity current30mA Sensitivity current30mA system Cable Qty x size(Inculding ground) 15 3core12AWG(3 core3.5mm2) 4core14AWG(4 core2.0mm2

Soft Start-up Valve

, 110 [115], 220 [230]*1 DC 24 V 10% of the rated voltage 12 V 10% of the rated voltage 100 V 10% of the rated voltage 110 V*1 [115 V] 10% of the rated voltage [15% to +5% of the rated voltage] 200 V 10% of the rated voltage 220 V*1 Allowable voltage fluctuation AC [230 V] 10% of the rated voltage [15% to +5% of the rated voltage] Power consumption [W] DC 0.35 (With light: 0.4) 0.35 (With

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Specifications Fluid Air 0.15 to 0.7 0.1 to 0.7 0.15 to 0.7 10 to 50 (No freezing.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

] Approx. 300 (Lead wire length) 98.6[103] 79 [83.4] R1 P R2 R1 P R2 R1 P R2 10 10 10 10 10 10 96.8 28 28 69 28 82 14 14 14 5 5 5 Refer to the page 91 for dimentions with connector cable. 9 Series SYJ3000 3 Position Closed Center/Exhaust Center/Pressure Center [ ]: AC 3 4 5 G H Grommet (G), (H): SYJ3 40-M5 M5 x 0.8 (A, B port) 10 5 10 2-3.2 (For mounting) 15.3 32 22 3 2.5 Manual override

Electromagnetic Digital Flow Switch

Magnetic flux density (B) 1 Flow Switch for Fluid Variations Rated flow range [L/min] Smallest settable increment Detection method Enclosure1 Display Applicable fluid Series 2 0 0.5 5 10 20 30 40 50 100 200 150 250 LFE 0.1 L/min 0.5 20 Water, Water-soluble coolant Electromagnetic IP65 3-color display 0.5 L/min 2.5 100 5 200 1 L/min PF3W 0.01 L/min 0.5 4 0.1 L/min 2 16 Water, Ethylene glycol

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

74 60 820 263 86 70 0.05 AN300-03 3 8 AN400-04 1 2 0.02 AN500-06 3 4 0.01 AN600-10 1 1 1 0.005 AN700-12 1 4 AN800-14 1 2 AN900-20 0.002 50 200 1000 5000 20 100 500 2000 10 50 10 Construction/Parts/Dimensions Air flow (l/min (ANR)) AN500 to 900 AN200 to 400 Noise Level (Initial conditions) End plate End plate AN200 to 900 Condition: 0.5 MPa at inlet pressure of solenoid valve Measurement

7

knuckle joint Press-fit spring pin 3 x 22 L 10 +0.022 H8 0 13 Press-fit spring pin 3 x 22 L Shaft: 10 Hole: 10 13 0.040 d9 0.076 +0.022 H8 0 24 24 C7 C7 30 +0.5 +0.2 12 0.1 0.3 12 41.2 26 24 18 36 36 D48 48 Please contact SMC for details of the CKGA32 series.

OMR0031

Controller USB cable Communication 120.3 120.3 mm mm 200 200 mm/s mm/s (type A to mini-B) cable 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN3 PC (PC is prepared by the user.) 20 - 4.4 CN4: Counter connector (option) Connect the controller to the Multi-counter (CEU5) using the counter cable (LATH3-). Refer to section 6.2 Counter plug wiring (P.24).

SL5200

0.07 10 0.07 5 0.03 5 0.03 0 0.00 0 0.00 0 20 40 60 80 100 Flow rate (slpm, N2) 0 40 80 120 160 200 240 280 320 Flow rate (slpm, N2) ) If connection size differs, flow characteristics also differ.

125

fluctuation 10 to +10% of rated voltage* a a 12(P1) PA 2(A) 3(R) 1(P) 2(A) 3(R) 1(P) 2(A) 3(R) 1(P) 100 V 0.78 (With indicator light: 0.81) 110 V 0.86 (With indicator light: 0.89) 200 V 1.18 (With indicator light: 1.22) 220 V 1.30 (With indicator light: 1.34) G, L, M Apparent power [VA] AC 100 V 0.78 (With indicator light: 0.87) 110 V 0.86 (With indicator light: 0.97) 200 V 1.15 (With indicator

Stroke Reading Cylinder and Counter

W or less 20 VA or less 10 W or less 20 VA or less 10 W or less 20 VA or less 10 W or less Between case and AC line: 1500 VAC for 1 min.

4-channel Flow Monitor ( compatible)

Normal output Reversed output -100No.PF-OMA1011-A Specifications Model PFG20# series PF2A5 PF3W5 PF2D5 Applicable flow sensor 10 50 11 21 51 04 20 40 11 25 04 20 40 Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 0.5 to 4 2 to 16 5 to 40 10 to 100 50 to 250 0.4 to 4 1.8 to 20 4 to 40 L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min 0.35 to 1.7 to

48

20 25 30 50 100 150 200 12 (10 x 2) 0.13 0.10 0.08 0.06 0.04 [kg] Bore size Stroke [mm] 10 20 25 30 50 100 150 200 12 (10 x 2) 0.9 0.7 0.5 0.4 0.2 16 (12 x 2) 0.14 0.11 0.09 0.07 0.04 16 (12 x 2) 0.9 0.7 0.6 0.4 0.2 20 (16 x 2) 0.27 0.22 0.16 0.10 0.07 20 (16 x 2) 1.3 1.0 0.8 0.5 0.3 25 (20 x 2) 0.54 0.45 0.34 0.21 0.15 25 (20 x 2) 2.3 1.9 1.4 0.9 0.6 32 (25 x 2)

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

C95Series

).1A or less 24 VDC 10).1A or less 24 VDC: lmA or less 100 VAC: 1mA or less 200 VAC: 1.5mA or less Indlcetor lamp.

IR1000/2000/3000

Standard part number 10 Note) Contact SMC if equipped with pressure gauge.

Table of Contents

P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 CDRB1BW50 Series CRB1 Series CRB2 Single/Double type CDRB1BW63, 80, 100 Solid state switch for size 10 and 15 requires no switch block, therefore the unit part no. will be P611070-13.

CXT

10 2 10 15 20 CXT 32 40 5 15 10 5 1 10 10 20 (mm) D-F7W D-J79W D-F7BAL D-F7NT D-F79F Auto switch model D-A7 D-A8 D-A73C D-A80C D-A7H D-A80H D-F7 D-J79 D-F7V D-J79C D-F7WV D-F7BAVL D-A79W Application No. of auto switches mounted 2 5 10 15 15 20 20 CXT 32 40 1 5 5 10 15 15 20 Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted.