ISG

AC 110 12 2 12 3 q e w e t y 220 10 1 10 1.5 440 6 1 3 1 550 5 0.8 2 0.5 r b contact w a contact r q DC 24 3 2.5 3 2.5 C C 48 1.5 1.2 1.5 1.25 When rising pressure q w = ON e r = OFF When rising pressure q e r y = ON q w r t = OFF 110 0.5 0.25 0.5 0.2 220 0.25 0.1 0.25 0.1 Insulation resistance: 100 M or more at 500 VDC by megameter Voltage resistance: 2000 VAC/1 min. 16-9-5 2 Series

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Tubing Size Symbol Type Body Class Tubing outside diameter Metric size 4 04 6 06 8 08 10 10 1/8 03 3/16 05 1/4 07 3/8 11 1/2 13 3 J Inch size Table 2. AC Insert Pin. Holder Assy Model Number LQ-GPJ LQ-GPJ-N LQ-GPJS LQ-GPJS-N LQ-GJLQ-GJ-NLQ-GJSLQ-GJS-NLQ-GC Larger Diameter Tubing How To Order LQ GC Nil B None With bracket Type Table 1.

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Dedicated Controller Series LC1 Uniaxial Type

1-RD 12 7.5 7.5 20 21 29 30 Cable length 02 2m 04 4m 03 3m 05 5m PC Controller Controller connector The connector used for CN1 (control terminal) and CN2 (generalpurpose input/output).

Speed Controller: Standard Type In-line Type AS Series

Free flow Controlled flow Weight (g) Sonic conductance dm3/(sbar) Sonic conductance dm3/(sbar) Critical pressure ratio Critical pressure ratio Model Port size Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS1000-M3 AS1000-M5 AS2000-01 AS2000-02 AS3000-02 AS3000-03 AS4000-02 AS4000-03 AS4000-04 AS5000-02 AS5000-03 AS5000-04 0.06 20 0.06 20 M3 x 0.5 4.7 0.15 0.22 80 0.25 90 M5 x 0.8 33 0.7

Metering Valve with Silencer Series ASN2 1

ASN How to Order AQ ASN2 03 ASV JIS Symbol AK Option Nil S None With seal ASS Port size ASR M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 ASF Thread type Metric thread (M5) Unified thread (10-32 UNF) R NPT Nil N Needle Valve/Flow Characteristics Inlet pressure: 0.5 MPa Flow rate (l/min (ANR)) Effective area (mm2) Number of needle rotations 15-11-1 2 Series ASN Construction Component

VQ4000

(A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) Vibration resistance: 3 position pressure center (A) 4 (B) 2 Note 3) Values in case of low power consumption model (0.5W). 1 (P) 5 (R1) 3 (R2) 1.11-4 Single Unit Series VQ4000 Base Mounted How to Order Valve Body style Port size Without sub-plate (for manifold) O: Plug-in Sub-plate 02 03 Rc1/4 Rc3/8 Piping Side piping Bottom piping B Note) Refer to p.1.11

Residual Pressure Release Valve

17 19 Weight (g) Connection thread D L1 L2 Q KEC-02 KEC-03 665

,

insulation Not required (non-lube type) Push type (tool required) 150, 30m/s Note 2) 1 (P) 5 (R1) 3 (R2) 2-position double (rubber) IP65 (Dust/Splashproof type) 12VDC, 24VDC 10% of rated voltage Equivalent to class B 1W DC (42mA) 1W DC (83mA) (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) Power consumption (Current) 24VDC 12VDC 3-position closed center (A) 4 (B) 2 Note 1) Use dry air to prevent condensation

,

insulation Not required (non-lube type) Push type (tool required) 150, 30m/s Note 2) 1 (P) 5 (R1) 3 (R2) 2-position double (rubber) IP65 (Dust/Splashproof type) 12VDC, 24VDC 10% of rated voltage Equivalent to class B 1W DC (42mA) 1W DC (83mA) (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) Power consumption (Current) 24VDC 12VDC 3-position closed center (A) 4 (B) 2 Note 1) Use dry air to prevent condensation

VHS20/30/40/50

I 10 I G H F E X H .

Exhaust Cleaner for Clean Rooms AMP Series

106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

I 10 I G H F E X H .

Miniature Regulator Series ARJ310

3 10 01 BG ARJ 3 10 F BG With One-touch fitting 04 01 Body size Option specifications 0.7MPa setting (standard) 0.2MPa setting With thread sealant Nil 1 S Model Relieving type 10 When set at 0.2MPa, a pressure gauge is not included.

Peltier-type Chiller Thermo-con/ Compact Type

temperature [C] 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] For the high-pressure pump (Option), the heating capacity increases by approx. 10 W.

VKF300

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004 JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing August, 1998 D-SMC.L.A. P-69.5 (JT)

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

Applicable cylinder bore size (mm) AS121-M5 Model Port size 4 6 8 10 12 M5 x 0.8 6, 10, 16, 20 Construction 1 8 AS221-01 R 20, 25, 32 1 4 AS221-02 R 20, 25, 32, 40 3 8 AS321-03 R 40, 50, 63 1 2 AS421-04 R 63, 80, 100 Note) marking is electroless nickel plated, provided as standard.

Speed Controller with One-touch Fittings Series AS In-line Type 1

Metric size Inch size P . 15-11-3 3.2 With One-touch fittings 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" Use 1/8" tube. 23 04 06 08 10 12 01 03 05 07 09 11 13 4 6 8 10 12 Flow Direction Symbols on Body JIS Symbol Symbol 15-9-10 2 Speed Controller with One-touch Fittings In-line Type Series AS Needle Valve/Flow Characteristics Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5

SRP

mounting hole 40 8.5 20 28 72.5 (when set = 75.5) Bleed exhaust hole 6.5 28 41 1.6 Port size A B IN OUT Model Port size D C B A 30 30 23.5 14 M5 x 0.8 SRP111-M5 40 40 22.5 15 Rc 1/8 SRP111-01 C D 3 Series SRP Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

SRP

mounting hole 40 8.5 20 28 72.5 (when set = 75.5) Bleed exhaust hole 6.5 28 41 1.6 Port size A B IN OUT Model Port size D C B A 30 30 23.5 14 M5 x 0.8 SRP111-M5 40 40 22.5 15 Rc 1/8 SRP111-01 C D 3 Series SRP Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.