Body Size: 20, Model Type: Air Filter + Regulator + Lubricator, Thread: N (NPT), Port Size: 02 (1/4), Float Type Auto Drain: w/o Auto Drain, Pressure Gauge/Digital Pressure Switch: G (Round Type Pressure Gauge, w/Limit Indicator), Attachment: V (Mounting Position: AF + AFM + AR + V), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: Standard (Polycarbonate Bowl + Lubricator)

Body Size: 20, Model Type: Air Filter + Regulator + Lubricator, Thread: N (NPT), Port Size: 02 (1/4), Float Type Auto Drain: w/o Auto Drain, Pressure Gauge/Digital Pressure Switch: G (Round Type Pressure Gauge, w/Limit Indicator), Attachment: V (Mounting Position: AF + AFM + AR + V), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: Standard (Polycarbonate Bowl + Lubricator)

IDX-OM-W017

Rc1/2 453 13 498 283 275 IDFA6E 455 275 Rc3/4 15 485 568 355 300 270 31 42 80 230 32 15 240 80 IDFA8E IDFA11E IDFA15E1 Rc1 300 603 578 41 54 396 87 258 43 15 270 101 380 314 16 IDFA Series 6-3 6 3 IDX-OM-W017 6 6-4 IDFA3E / 4E / 6E / 8E IDFA11E C R GFGI R C R GFGI R L N PE L N PE TB TB ILS ILS V V V V EVD EVD PTC OLR PTC OLR PE CM PE CM PE FM1 PRS PE FM1 PRS P P PE FM2 PE FM2 FM2DFA6E

/N.C.), 1st Selection Vacuum V Port: 6 (Vacuum, V Port: Ø6), 1st Selection Quantity: 1, /: None, 2nd Nominal Nozzle Size: 0 (0)

10

v v v v v v v MBlR V Water resistant V v V v V v V v 10Clean series Note 6) v v v v v v v v 32 to 125 20Copper Note 5) and Fluorine-free Note 6) Note 9) Note 9) Note 9) Note 9) Note 9) Note 9) Note 9) Note 9) XAl Change of rod end shape XB5 Oversized rod cylinder Note 6) v v v v v v v XB6 Heat resistant cylinder (10 to 150C) v v v v v XB13 Low speed cylinder (5 to 50 mm/s) Note 6) v v v v

Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa)], Material: S (Body: 316 SS; Poppet: 316 SS; Diaphragm: Hastelloy® C-22), Ports: 3P [3 Ports (1-In; 2-Out; 4-Gauge Port Out)], Connections, Inlet: 6 (NPT 3/8 Inch), Connections, Outlet: 6 (NPT 3/8 Inch), Gauge Port, Outlet 3: V3 [-30 in.Hg to 30 psig (-0.1 to 0.2 MPa)], Gauge Port, Outlet 4: No Gauge Port, Pressure Gauge Unit: psig/bar

PSxx-OMM0002CN

P PNP Max.80 mA 1 V -S/-R () NPN 2 Max.28 V80 mA 1 V R15 V 1 k S420 mA 12 V 300 24 V 600 50 -S/-R () NPN 2 Max.28 V80 mA 1 V -17No.PS-OMM0002CN-F -V/-T () PNP 2 Max.80 mA 1 V T15 V 1 k V420 mA 12 V 300 24 V 600 50 -V/-T () PNP 2 Max.80 mA 1 V -A NPN2 Max.28 V80 mA 1 V -B PNP2 Max.80 mA 1 V -18No.PS-OMM0002CN-F ONOFF () ON OFF ON5OFF 20 P 1 H_1 [Pa] ON OFF [s] -19No.PS-OMM0002CN-F

PSxx-OMH0002CN

OUT1(NPN) DC12 24 V OUT2(NPN) DC(-) -43 43 43 43 NPN 1 + PNP 1 Max.30 V(NPN)80 mA 1 V NPN PNP DC(+) OUT1(NPN) DC12 24 V OUT2(PNP) DC(-) DC(+) OUT1(PNP) -65 65 65 65 PNP 1 Max.80 mA DC12 24 V N.C.

Body Class: 3 (ø8 Orifice), Valve Type: 0 (N.C.), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Tube Size: 10 (ø10), Output Tube Size: None, Pilot Connection: M (LQ1 Integral Fitting, 5/32" (4mm), Pilot Port Direction: P2 (Direction 2)

Body Class: 3 (ø8 Orifice), Valve Type: 0 (N.C.), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Tube Size: 10 (ø10), Output Tube Size: None, Pilot Connection: R (Thread Type 1/8 Rc), Pilot Port Direction: P7 (Direction 7)

Body Class: 3 (ø8 Orifice), Valve Type: 0 (N.C.), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Tube Size: 07 (1/4"), Output Tube Size: None, Pilot Connection: N (Thread Type 1/8"NPT), Pilot Port Direction: P2 (Direction 2)

Body Size: 30, Thread: N (NPT), Port Size: 03 (3/8), Option: DG (D + G), Attachment: SV (S + V), Semi-Standard 1: 6 (Nylon Bowl), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Float Type Auto Drain), Attachment: V1 (3-Port Valve for Residual Pressure Release; Mounting: V+AF+AR), Semi-Standard 1: 6 (Nylon Bowl), Semi-Standard 2: RZ (R + Z)

SI Unit: V (CC-link System (Mitsubishi Electric Corp.)), Serial Interface Position: D Side, Valve Stations: 6 Stations, SUP/EXH Block Mounting: B (Both Sides 2~16 Stations), Pilot Type: Standard Internal Pilot, A, B Port Size: N7 (1/4" One-touch Fitting)

SI Unit: V (CC-link System (Mitsubishi Electric Corp.)), Serial Interface Position: U Side, Valve Stations: 6 Stations, SUP/EXH Block Mounting: B (Both Sides 2~16 Stations), Pilot Type: Standard Internal Pilot, A, B Port Size: N7 (1/4" One-touch Fitting)

Stations: 6 Stations, Port Size: C6 (ø6 One-touch Fitting), Kit Name: S (Serial Transmission), SI Unit: V (CC-LINK), Option 1: None, Option 2: D (DIN Rail Mounting), Option 3: None, Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust)

Stations: 6 Stations (Note: 2 Stations are Required for Serial Unit Mounting), Port Size: C10 (ø10 One-touch Fitting), Mounting Base: S (U Side), Kit Type: V (CC-Link, 16 Output Points), Option 1: None, Option 2: W (Dust Poof IP65 Rated)

Stations: 6 Stations (Note: 2 Stations are Required for Serial Unit Mounting), Port Size: C8 (ø8 One-touch Fitting), Mounting Base: S (U Side), Kit Type: V (CC-Link, 16 Output Points), Option 1: SD (Built-in Silencer, Direct Exhaust from D Side)

Stations: 6 Stations (Note: 2 Stations are Required for Serial Unit Mounting), Port Size: B (Bottom Ported Rc1/4), Mounting Base: S (U Side), Kit Type: V (CC-Link, 16 Output Points), Option 1: None, Option 2: W (Dust Poof IP65 Rated)

Stations: 6 Stations (Note: 2 Stations are Required for Serial Unit Mounting), Port Size: C10 (ø10 One-touch Fitting), Mounting Base: SD (D Side), Kit Type: V (CC-Link, 16 Output Points), Option 1: None, Option 2: W (Dust Poof IP65 Rated)